A compact physical CD-SEM simulator for IC photolithography modeling applications [9236-42] (English)
- New search for: SPIE (Society)
- New search for: Postek, Michael T.
- New search for: SPIE (Society)
In:
Scanning microscopies
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9236 18
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2014
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ISBN:
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ISSN:
- Conference paper / Print
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Title:A compact physical CD-SEM simulator for IC photolithography modeling applications [9236-42]
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Contributors:
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Conference:Conference, Scanning microscopies ; 2014 ; Monterey, CA
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Published in:Scanning microscopies ; 9236 18PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 9236 ; 9236 18
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Publisher:
- New search for: SPIE
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Place of publication:Bellingham, Washington
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Publication date:2014-01-01
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Size:9236 18
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Remarks:Includes bibliographical references and author index.
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 92360A
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Shear force microscopy using piezoresistive cantilevers in surface metrologyGotszalk, Teodor / Kopiec, Daniel / Sierakowski, Andrzej / Janus, Paweł / Grabiec, Piotr / Rangelow, Ivo W. et al. | 2014
- 92360B
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High throughput data acquisition with a multi-beam SEMKeller, Anna Lena / Zeidler, Dirk / Kemen, Thomas et al. | 2014
- 92360C
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On the limits of miniature electron column technologyMuray, Lawrence / Spallas, James / Meisburger, Dan et al. | 2014
- 92360E
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Assessing the viability of multi-electron beam wafer inspection for sub-20nm defectsThiel, Brad / Lercel, Michael / Bunday, Benjamin / Malloy, Matt et al. | 2014
- 92360H
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Rigorous quantitative elemental microanalysis by scanning electron microscopy/energy dispersive x-ray spectrometry (SEM/EDS) with spectrum processing by NIST DTSA-IINewbury, Dale E. / Ritchie, Nicholas W. M. et al. | 2014
- 92360J
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First experiences with 2D-mXRF analysis of gunshot residue on garment, tissue, and cartridge casesKnijnenberg, Alwin / Stamouli, Amalia / Janssen, Martin et al. | 2014
- 92360K
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Developing a quality assurance program for gunshot primer residue analysisWhite, Thomas R. et al. | 2014
- 92360L
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An electro-conductive organic coating for scanning electron microscopy (déjà vu)Burnett, Bryan R. et al. | 2014
- 92360M
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Using the Hitachi SEM to engage learners and promote next generation science standards inquiryMenshew, D. E. et al. | 2014
- 92360N
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Integrating electron microscopy into nanoscience and materials engineering programsCormia, Robert D. / Oye, Michael M. / Nguyen, Anh / Skiver, David / Shi, Meng / Torres, Yessica et al. | 2014
- 92360P
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Teaching K-12 teachers and students about nanoscale science through microscopyHealy, Nancy et al. | 2014
- 92360Q
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Project NANO (nanoscience and nanotechnology outreach): a STEM training program that brings SEM's and stereoscopes into high-school and middle-school classroomsCady, Sherry L. / Blok, Mikel / Grosse, Keith / Wells, Jennifer et al. | 2014
- 92360R
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Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantileverJanus, Paweł / Grabiec, Piotr / Sierakowski, Andrzej / Gotszalk, Teodor / Rudek, Maciej / Kopiec, Daniel / Majstrzyk, Wojciech / Boetsch, Guillaume / Koehler, Bernd et al. | 2014
- 92360W
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Particle deformation induced by AFM tapping under different setpoint voltagesWu, Chung-Lin / Farkas, Natalia / Dagata, John A. / He, Bo-Ching / Fu, Wei-En et al. | 2014
- 92360X
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Wavelet transform-based method of compensating dispersion for high resolution imaging in SDOCTBian, Haiyi / Gao, Wanrong et al. | 2014
- 92361A
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Do electron flux and solar x-ray in juxtaposition prior a seismic event make signature?Verma, Umesh Prasad / Sinha, Madhurendra Nath et al. | 2014
- 92361C
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Confirmatory analysis of field-presumptive GSR test sample using SEM/EDSToal, Sarah J. / Niemeyer, Wayne D. / Conte, Sean / Montgomery, Daniel D. / Erikson, Gregory S. et al. | 2014
- 923601
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Front Matter: Volume 9236| 2014
- 923602
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3D Monte Carlo modeling of the SEM: Are there applications to photomask metrology?Villarrubia, J. S. / Vladár, A. E. / Postek, M. T. et al. | 2014
- 923604
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A novel approach for scanning electron microscopic observation in atmospheric pressureOminami, Yusuke / Nakahira, Kenji / Kawanishi, Shinsuke / Ushiki, Tatsuo / Ito, Sukehiro et al. | 2014
- 923605
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Does your SEM really tell the truth? How would you know? part 3: vibration and driftPostek, Michael T. / Vladár, András E. / Cizmar, Petr et al. | 2014
- 923607
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Investigations on CMOS photodiodes using scanning electron microscopy with electron beam induced current measurementsKraxner, A. / Roger, F. / Loeffler, B. / Faccinelli, M. / Kirnstoetter, S. / Minixhofer, R. / Hadley, P. et al. | 2014
- 923608
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A novel transmission electron imaging technique for observation of biological samples on a plateOminami, Yusuke / Nakajima, Masato / Ushiki, Tatsuo / Ito, Sukehiro et al. | 2014
- 923609
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Three-dimensional surface reconstruction using scanning electron microscopy and the design of a nanostructured electron trapScheuer, Renke / Reithmeier, Eduard et al. | 2014
- 923610
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Scan mirrors relay for high resolution laser scanning systemsKessler, David et al. | 2014
- 923611
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Using scanning near-field microscopy to study photo-induced mass motions in azobenzene containing thin filmsVu, A. D. / Fabbri, F. / Desboeufs, N. / Boilot, J.-P. / Gacoin, T. / Lahlil, K. / Lassailly, Y. / Martinelli, L. / Peretti, J. et al. | 2014
- 923613
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Nanoscale imaging by micro-cavity scanning microscopyDi Donato, Andrea / Ippoliti, Gianluca / Rozzi, Tullio / Mencarelli, Davide / Orlando, Giuseppe / Farina, Marco et al. | 2014
- 923618
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A compact physical CD-SEM simulator for IC photolithography modeling applicationsFang, Chao / Smith, Mark D. / Vaglio Pret, Alessandro / Biafore, John J. / Robertson, Stewart A. / Bekaert, Joost et al. | 2014
- 923619
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A tale of three trials: from science to junk scienceBurnett, Bryan R. et al. | 2014
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Investigations on CMOS photodiodes using scanning electron microscopy with electron beam induced current measurements [9236-7]SPIE (Society) et al. | 2014
-
High throughput data acquisition with a multi-beam SEM [9236-11]SPIE (Society) et al. | 2014
-
Project NANO (nanoscience and nanotechnology outreach): a STEM training program that brings SEM's and stereoscopes into high-school and middle-school classrooms [9236-54]SPIE (Society) et al. | 2014
-
Wavelet transform-based method of compensating dispersion for high resolution imaging in SDOCT [9236-31]SPIE (Society) et al. | 2014
-
Shear force microscopy using piezoresistive cantilevers in surface metrology [9236-10]SPIE (Society) et al. | 2014
-
Using the Hitachi SEM to engage learners and promote next generation science standards inquiry [9236-22]SPIE (Society) et al. | 2014
-
Developing a quality assurance program for gunshot primer residue analysis [9236-20]SPIE (Society) et al. | 2014
-
Rigorous quantitative elemental microanalysis by scanning electron microscopy/energy dispersive x-ray spectrometry (SEM/EDS) with spectrum processing by NIST DTSA-II [9236-17]SPIE (Society) et al. | 2014
-
Confirmatory analysis of field-presumptive GSR test sample using SEM/EDS [9236-51]SPIE (Society) et al. | 2014
-
3D Monte Carlo modeling of the SEM: Are there applications to photomask metrology? (Invited Paper) [9236-1]SPIE (Society) et al. | 2014
-
Does your SEM really tell the truth? How would you know? part 3: vibration and drift [9236-4]SPIE (Society) et al. | 2014
-
On the limits of miniature electron column technology [9236-12]SPIE (Society) et al. | 2014
-
Nanoscale imaging by micro-cavity scanning microscopy [9236-37]SPIE (Society) et al. | 2014
-
A tale of three trials: from science to junk science [9236-44]SPIE (Society) et al. | 2014
-
Using scanning near-field microscopy to study photo-induced mass motions in azobenzene containing thin films [9236-35]SPIE (Society) et al. | 2014
-
A novel approach for scanning electron microscopic observation in atmospheric pressure [9236-3]SPIE (Society) et al. | 2014
-
Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever [9236-25]SPIE (Society) et al. | 2014
-
A compact physical CD-SEM simulator for IC photolithography modeling applications [9236-42]SPIE (Society) et al. | 2014
-
A novel transmission electron imaging technique for observation of biological samples on a plate [9236-8]SPIE (Society) et al. | 2014
-
Integrating electron microscopy into nanoscience and materials engineering programs [9236-23]SPIE (Society) et al. | 2014
-
Particle deformation induced by AFM tapping under different setpoint voltages [9236-30]SPIE (Society) et al. | 2014
-
First experiences with 2D-mXRF analysis of gunshot residue on garment, tissue, and cartridge cases [9236-19]SPIE (Society) et al. | 2014
-
Do electron flux and solar x-ray in juxtaposition prior a seismic event make signature? [9236-48]SPIE (Society) et al. | 2014
-
Three-dimensional surface reconstruction using scanning electron microscopy and the design of a nanostructured electron trap [9236-53]SPIE (Society) et al. | 2014
-
Teaching K-12 teachers and students about nanoscale science through microscopy [9236-52]SPIE (Society) et al. | 2014
-
Scan mirrors relay for high resolution laser scanning systems [9236-34]SPIE (Society) et al. | 2014
-
Assessing the viability of multi-electron beam wafer inspection for sub-20nm defects (Invited Paper) [9236-14]SPIE (Society) et al. | 2014
-
An electro-conductive organic coating for scanning electron microscopy (deja vu) [9236-21]SPIE (Society) et al. | 2014