LSI Mask / Wafer Pattern Inspection (Unknown)
- New search for: Ito, M.
- New search for: Ito, M.
In:
JOURNAL OF JSNDI
;
50
;
277-283
;
2001
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ISSN:
- Article (Journal) / Print
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Title:LSI Mask / Wafer Pattern Inspection
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Contributors:Ito, M. ( author )
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Published in:JOURNAL OF JSNDI ; 50 ; 277-283
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Publisher:
- New search for: JAPANESE SOCIETY FOR NON-DESTRUCTIVE INSPECTION
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Publication date:2001-01-01
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Size:7 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:Unknown
- New search for: 620.1127
- Further information on Dewey Decimal Classification
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Classification:
DDC: 620.1127 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 50
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 2
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Commemorating Publication of the Journal's 50th VolumeIwashimizu, Y. et al. | 2001
- 4
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NDI in the IT EraOnoe, M. et al. | 2001
- 10
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My Experience in Editing the JournalKatoh, M. et al. | 2001
- 15
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NDI Through a Friendship of 30 YearsOoka, N. et al. | 2001
- 19
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First in a Series Introducing Famous Institutes in the WorldMasuda, T. et al. | 2001
- 20
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Battelle Memorial InstituteBubenik, T. A. / Leis, B. N. / Nestleroth, J. B. / Francini, R. B. et al. | 2001
- 24
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Identification of Shape of Void by Edge Analysis of Thermal Image Pattern above VoidAkamatsu, Y. / Setojima, M. / Yasuda, Y. et al. | 2001
- 34
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Relationship between Ultrasonic Parameters and Local Strain in Plastically Deformed Brass PlatesKato, H. / Itoi, N. / Kageyama, K. et al. | 2001
- 41
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Reinforcing Bar Testing System by Electromagnetic Test Method using MulticoilKoido, J. / Hoshikawa, H. et al. | 2001
- 67
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For Special Issue of "Reviews on Non-Destructive Examination Standards"Yokono, Y. et al. | 2001
- 68
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A Review for Present and Future of ISO StandardOoka, N. et al. | 2001
- 73
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A Review for Present and Future of Radiographic Examination StandardTerada, Y. et al. | 2001
- 77
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A Review for Present and Future of Ultrasonic Examination StandardKikuchi, S. et al. | 2001
- 80
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A Review for Present and Future of Surface Testing StandardTaguchi, T. et al. | 2001
- 84
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A Review for Present and Future of Leak Testing StandardTaguchi, T. et al. | 2001
- 88
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A Review for Present and Future of Strain Measurement StandardKumazawa, T. et al. | 2001
- 91
-
A Review for Present and Future of Acoustic Emission ExaminationShiwa, M. et al. | 2001
- 95
-
Unconstrained and Noninvasive Measurement of Respiration and Heartbeat of Humans in Cars Using a Strain GaugeTanaka, S. / Hayashi, H. / Matsubara, A. et al. | 2001
- 101
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Study of Appropriate Exciter-to-Detector Distance in Remote Field Eddy Current Tubing InspectionKoyama, K. / Hoshikawa, H. / Karasawa, H. / Hayakawa, H. / Morisaki, H. et al. | 2001
- 108
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Noncontact Testing for Plastic Plates using Air-coupled Ultrasonic SensorsHayashi, T. / Kawashima, K. / Suzuki, K. / Arai, K. / Endoh, S. et al. | 2001
- 129
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For Special Issue of "Nondestructive Testing in Industry (Entering the 21st Century)"Iwashimizu, Y. et al. | 2001
- 130
-
Current Status of NDT in Thermal & Nuclear Power PlantsShiwa, M. / Yoneyama, H. et al. | 2001
- 133
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Current Status of NDT in Concrete StructuresMorihama, K. et al. | 2001
- 137
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Current Status of NDT in ExpresswaysIshizaki, Y. / Miyawaki, K. / Matsumoto, S. et al. | 2001
- 141
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Current Status of NDT in Plant MaintenanceImanaka, T. et al. | 2001
- 146
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Current Status of NDT in Architectural Steel StructuresKuramochi, M. et al. | 2001
- 150
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Current Status of NDT in Gas PlantsKishino, H. et al. | 2001
- 153
-
The Welding InstituteWylde, G. et al. | 2001
- 157
-
Elastic Property Evaluation of Sprayed Thermal Barrier Coatings at Elevated Temperatures by the Inverse Processing of Laser Lamb WaveMa, X. Q. / Mizutani, Y. / Takemoto, M. et al. | 2001
- 164
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NDE of Degradation of Thermal Barrier Coatings in a High Temperature EnvironmentOgawa, K. / Shoji, T. / Chiba, H. / Abe, H. / Torigoe, T. et al. | 2001
- 170
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Characterization of Impact Damage in Plain Woven C/C Composites and Damage Detection by Electric Potential Drop TechniqueKojima, T. et al. | 2001
- 198
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Current Status of NDT in Space Transportation VehicleIshikawa, T. et al. | 2001
- 202
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Current Status of NDT in AircraftHiguchi, N. et al. | 2001
- 206
-
Current Status of NDT in RailwayKashiwaya, K. et al. | 2001
- 209
-
Current Status of NDT in Offshore StructureYamawaki, Y. et al. | 2001
- 212
-
Secretariat Report of ISO / TC (Rome, October 2000)Takagi, M. / Hatano, H. et al. | 2001
- 217
-
ISO Quality Assurance goes to Quality Management SystemShimizu, T. et al. | 2001
- 224
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Fraunhofer Institute for Nondestructive TestingDrchel, U. et al. | 2001
- 229
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Temperature and Tensile Speed Dependence on Craze Nucleation in a PolycarbonateKawanobe, D. / Ezumi, T. / Takahashi, S. et al. | 2001
- 235
-
Energy Sensitive Backscatter RadiographyTaniguchi, R. / Tsujii, Y. / Jinno, S. et al. | 2001
- 241
-
Numerical Analysis for Evaluating Surface Hardened Depth Magnetic Testing Considering The Heterogeneity of PermeabilityGotoh, Y. / Tanaka, M. / Yano, H. et al. | 2001
- 271
-
For Special Issue of "Nondestructive Inspection in the Electronics Industry"Jitsumori, A. et al. | 2001
- 272
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Semiconductor Inspection Systems for the New GenerationUsami, Y. et al. | 2001
- 277
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LSI Mask / Wafer Pattern InspectionIto, M. et al. | 2001
- 284
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Inspection of Glass Substrate for Flat Panel DisplayHayashi, M. et al. | 2001
- 290
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Present Status of Non-destructive Testing for Semiconductor PackagesOgura, Y. et al. | 2001
- 296
-
Three Dimensional X-ray Radioscopic Technology for Electronic partsFujii, M. et al. | 2001
- 302
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Measurement of Thermal Distribution for Electronic Devices using Infrared CameraUemura, H. et al. | 2001
- 306
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Quantitative Estimation of Flaw Height by Radiographic Testing (Report 4)-Estimation of flaw height of a slit-like flaw-Nakamura, K. / Suetsugu, J. / Hirayama, K. / Hashimoto, K. / Katoh, M. et al. | 2001
- 314
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Damage Zone Location in a GFRP Storage Tank by Lamb Wave AE AnalysisMizutani, Y. / Fukawa, N. / Futatsugi, T. / Nishino, H. / Takemoto, M. et al. | 2001
- 321
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Eddy Current Testing of Weld Zone using Uniform Eddy Current ProbeKoyama, K. / Hoshikawa, H. / Taniyama, N. et al. | 2001
- 343
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For Special Issue of "TALK via e-mail"Fujii, M. et al. | 2001
- 344
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E-mail TALKING - for Future Development of The Journal of JSNDI -Onoe, M. / Katoh, M. / Iwashimizu, Y. et al. | 2001
- 355
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For special Issue of "Application of Nondestructive Inspection Techniques for Maintenance Inspection II"Yotsutsuji, M. et al. | 2001
- 356
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High-speed and Accurate Measurement of Stress, Deformation and ShapeMorimoto, Y. / Fujigaki, M. / Yoneyama, S. et al. | 2001
- 363
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Automatic Ultrasonic Inspection System Using Magnet Wheel Robot for On-Stream Inspection of Spherical TankWakibe, Y. et al. | 2001
- 368
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On the Evaluation of Crevice Corrosion at the Outer Surface of Piping Contacted to Rack-support through Ultrasonic MethodHirota, N. / Kishi, E. / Yokono, Y. / Imanaka, T. / Yotsutsuji, M. et al. | 2001
- 374
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FORCE InstituteJeppesen, L. et al. | 2001
- 379
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Comparative Study on Film - Density Intensifying Screens for High Energy Bremsstrahlungs (III)Working Group for Research on Film-Density Intensifying Screens for High EnergyResearch & / Technical Committee on Radiographic Testing, JSNDI et al. | 2001
- 385
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Dynamic Behavior of Delayed Fracture of Low Alloy Steel Thin Plate by Quantitative Analysis of Lamb Wave Acoustic EmissionSato, T. / Takemoto, M. / Ono, K. et al. | 2001
- 392
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Development of Focusing Sensor for Microwave Nondestructive InspectionJu, Y. / Saruta, K. / Saka, M. / Abe, H. et al. | 2001
- 413
-
Review and Trend of Non-Destructive Tests on Concrete StructuresIkenaga, H. et al. | 2001
- 416
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Method of Test for Neutralization Depth of Concrete in Structures with Drilling Powder (NDIS 3419 - 1999)Kasai, Y. et al. | 2001
- 420
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Recommended Practice for in situ Monitoring of Concrete Structures by Acoustic EmissionOhtsu, M. et al. | 2001
- 424
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Estimation Method for Strength of Concrete in Structures with Small Size CoresWakabayashi, S. / Tanigawa, Y. / Nakagome, A. / Sahara, H. et al. | 2001
- 429
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Rapid Test Method on Water Content of Fresh ConcreteKatahira, H. et al. | 2001
- 434
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Mini-destructive Testing Methods for Structural Concrete Qualities - Estimation for Mixture Proportion with Small Core and Durability with Drilled Powder and Hole -Yuasa, N. et al. | 2001
- 440
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Estimation of Compressive Strength of Concrete Using Nondestructive TestsMorihama, K. / Yoshiara, T. / Ohta, S. et al. | 2001
- 446
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Non-Destructive Inspection of Concrete Structures Using an Ultrasonic Sensor Based on a Stationary Wave ModelTanaka, S. / Okada, T. et al. | 2001
- 454
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Investigation of Thickness Measuring Technique Based on Repulsion Behavior of Steel Plates (first report) -Steel Ball Drop and Schmidt Hammer Methods-Shimada, M. / Yoshii, T. / Naruse, T. et al. | 2001
- 462
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Effect of Ultrasonic Beam Radius for Shape Reconstruction of Defects by Inverse Scattering AnalysisNakahata, K. / Kitahara, M. et al. | 2001
- 485
-
The Review on Radiographic Testing in 2000Kobayashi, N. et al. | 2001
- 489
-
The Review on Ultrasonic Testing in 2000Hatano, H. et al. | 2001
- 497
-
The Review on Magnetic, Electromagnetic, Penetrant and Other Nondestructive Methods in 2000Wakiwaka, H. et al. | 2001
- 503
-
The Review on Experimental Stress and Strain Analysis in 2000Takeishi, H. et al. | 2001
- 507
-
The Report of Ad-Hoc Research & Technical Committee on Maintenance in 2000Ogura, Y. et al. | 2001
- 510
-
The Report of Ad-Hoc Research & Technical Committee on Image Processing in 2000Suga, Y. et al. | 2001
- 513
-
The Report of Ad-Hoc Research & Technical Committee on Acoustic Emission in 2000Higo, Y. et al. | 2001
- 515
-
The Report of Ad-Hoc Research & Technical Committee on NDE of New Materials in 2000Kawashima, K. et al. | 2001
- 519
-
The Report of Ad-Hoc Research & Technical Committee on NDT of Reinforced Concrete in 2000Ikenaga, H. et al. | 2001
- 522
-
The Report of Ad-Hoc Research & Technical Committee on Thermographic NDT & NDE Techniques in 2000Terada, H. et al. | 2001
- 525
-
The Report of Standardization Committee in 2000Yokono, Y. et al. | 2001
- 530
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The Report of ISO Committee in 2000Ooka, N. et al. | 2001
- 537
-
The Report of International Committee in 2000Arakawa, T. et al. | 2001
- 539
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The Report of Education Committee in 2000Takenaka, K. et al. | 2001
- 542
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The Report of Personnel Certification Committee in 2000Kishi, T. / Kato, H. et al. | 2001
- 547
-
The Report of Certification Steering Committee in 2000Katoh, M. et al. | 2001
- 577
-
For Special Issue of "Recent Trends of Strain Measurement by Optical Fiber Sensor"Ishikawa, H. et al. | 2001
- 578
-
Strain Measurement by Fiber-Optic Interferometric SensorsKoshide, S. et al. | 2001
- 583
-
BOTDR for Distributed Strain SensingOhno, H. / Naruse, H. et al. | 2001
- 587
-
Strain Measurement by Optical Fiber Micro-Bending Loss and Connecting LossNemoto, I. / Okamoto, K. / Uesugi, T. / Fujishima, E. et al. | 2001
- 591
-
Application of Fiber Bragg GratingTeruya, H. / Hayashi, Y. et al. | 2001
- 595
-
Structural Monitoring by Using Fiber-Optic TechnologyKageyama, K. / Murayama, H. et al. | 2001
- 601
-
Analysis of Delayed Echoes Appearing in Circumferential Wave Propagation in Pipes Filled with FluidNagamizo, H. / Kawashima, K. / Miyauchi, J. et al. | 2001
- 607
-
Microwave Nondestructive Evaluation of a Closed Fatigue Crack on the Metal SurfaceSaka, M. / Ju, Y. / Luo, D. / Abe, H. et al. | 2001
- 612
-
Unconstrained and Non-invasive Measurement of Heartbeat and Respiration Periods Using Phonocardiographic SensorTanaka, S. / Matsumoto, Y. / Wakimoto, K. et al. | 2001
- 637
-
For Special Issue of "New Developments in Application of Image Processing to Nondestructive Inspection and Monitoring"Suga, Y. et al. | 2001
- 638
-
Use of Image Processing in Radiation Film InspectionAoki, K. / Suga, Y. et al. | 2001
- 642
-
Detection of Convex and Concave Defects on Optical Films by Image ProcessingHirose, O. / Ishii, A. et al. | 2001
- 647
-
Inspection Technique for Internal Defects of Glasses by Image ProcessingKurumisawa, M. et al. | 2001
- 652
-
Flame Detection Method for Fire Recognition by Image ProcessingYamaguchi, J. et al. | 2001
- 657
-
Development of High-performance One-chip Image Processing LSIMuramatsu, S. / Kobayashi, Y. / Otsuka, Y. / Shojima, H. / Hirose, K. et al. | 2001
- 664
-
Development of Rotating Inner ECT Probe to be Suited for Numerical Analysis SupportKosaka, D. / Hashimoto, M. et al. | 2001
- 670
-
Diagnosis for Condition of Spray Cooling Water using Acoustic Sensor in Continuous Casting Process of Iron and Steel IndustryTokuda, M. / Hirota, T. et al. | 2001
- 678
-
Nondestructive Evaluation of Delamination of Tiles by Laser Impact MethodWatanabe, T. / Nakazawa, T. / Cho, H. / Yamanaka, K. et al. | 2001
- 697
-
For Special Issue on "Engineering in Reverse using X-ray Computed Tomography"Fujii, M. et al. | 2001
- 698
-
Reverse Engineering using X-ray CTFujii, M. et al. | 2001
- 704
-
The Modeling of the Free Form Object by Industrial CT Scanner and Volume RenderingSakashita, K. et al. | 2001
- 710
-
Reverse Engineering Applications of X-ray CT to Product Development of Casting PartsMurata, M. et al. | 2001
- 714
-
Non-contact 3-D Measuring System and Reverse Engineering / Inspection SoftwareAwazu, Y. et al. | 2001
- 717
-
AEA TechnologyYeomans, D. et al. | 2001
- 719
-
Difference between Cracks and Artificial Flaws in Ultrasonic Testing - Ultrasonic Testing Performed on the Smooth Part of a phi 40mm Miniature Axle Specimen -Ishiduka, H. / Yohso, J. et al. | 2001
- 724
-
Application of Plastic Strain Freezing Method for Photoplasticity to the Fixed Strain StateNemoto, T. / Shimamoto, A. et al. | 2001
- 729
-
Numerical Analysis to Evaluate Surface Hardness Measurement of Hardened Steel Using Magneto Static-field Magnetization Eddy Current TestingGotoh, Y. / Tanaka, M. / Yanoh, H. et al. | 2001
- 736
-
Study of a New Surface Eddy Current Probe without Lift-off NoiseHoshikawa, H. / Koyama, K. / Karasawa, H. et al. | 2001
- 785
-
Development of an UT Transducer Equipped with Adjustable Focusing Mechanism for Local ImmersionHayakawa, M. / Kuroki, M. et al. | 2001
- 789
-
Integrity Evaluation for Electrofusion Joint of Polyethylene Pipe Using Ultrasonic Testing TechniqueToda, H. / Kitaoka, T. / Inoue, F. / Murata, Y. / Yoshida, I. / Furukawa, J. et al. | 2001
- 798
-
Influence of Heat Treatments for Stress Measurement of Steel by Barkhausen Noise MethodYatsushiro, K. / Hihara, M. / Kuramoto, M. et al. | 2001