Trajectory Planning and Precision Control of Scan-move for Step-scan Lithography Stage (Unknown)
- New search for: Mu, H.
- New search for: Zhou, Y.
- New search for: Mu, H.
- New search for: Zhou, Y.
In:
CHINESE JOURNAL OF MECHANICAL ENGINEERING
;
46
, 2
;
166-171
;
2010
-
ISSN:
- Article (Journal) / Print
-
Title:Trajectory Planning and Precision Control of Scan-move for Step-scan Lithography Stage
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Contributors:
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Published in:CHINESE JOURNAL OF MECHANICAL ENGINEERING ; 46, 2 ; 166-171
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Publisher:
- New search for: CHINA MACHINE PRESS
-
Publication date:2010-01-01
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Size:6 pages
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ISSN:
-
Type of media:Article (Journal)
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Type of material:Print
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Language:Unknown
- New search for: 621
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 46, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
-
Functional Tolerance Specification Design Based on Assembly PositioningYang, J. / Xu, X. / Cao, Y. et al. | 2010
- 9
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Analysis of Ultrasonic Sound Field Characteristic with FDTDZhou, Z. / Wei, D. et al. | 2010
- 14
-
Fluctuation Analysis of Process Flow Based on Error Propagation NetworkLiu, D. / Jiang, P. et al. | 2010
- 22
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Experimental Research on Acoustoelastic Effect of Ultrasonic Guided Waves in Prestressing Steel StrandLiu, Z. / Liu, S. / Wu, B. et al. | 2010
- 28
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Study on Wavelet Threshold Denoising Algorithm Based on Estimation of Noise VarianceQu, W. / Gao, F. et al. | 2010
- 34
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Summary of Virtual Rolling Technology ResearchWang, Y. / Chen, C. / Zhang, W. et al. | 2010
- 40
-
Mechanism of Fatigue Damage Evolution and the Evolution LawXu, J. / Guo, F. et al. | 2010
- 47
-
Simulation of Polymer Extrudsion Swelling by Using Iterative Stabilized Fractional Step AlgorithmWei, W. / Xikui, L. / Xianhong, H. et al. | 2010
- 55
-
Experiment and Numerical Simulation of Size Effects of Mechanical Behaviors of Lead-free Micro-interconnection Solder JointsYin, L. / Zhang, X. et al. | 2010
- 61
-
Kinematic Error Modeling for Tailored Blank Laser Welding Machine Based on the Improved MBSXin, L. / Xu, Z. / Zhao, M. et al. | 2010
- 69
-
Research on Digital Human Model System Used for Heavy Commercial Vehicle Ergonomic DesignRen, J. / Wang, D. / Wang, S. et al. | 2010
- 76
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Model and Architecture of Hierarchical Reinforcement Learning Based on AgentWang, W. / Xiao, S. / Xiangyin, M. et al. | 2010
- 83
-
Simulation Analysis of Car A-alloy Wheel 13^o Impact TestZang, M. / Qin, T. et al. | 2010
- 88
-
Thermo-mechanical Coupling Simulation of Braking Process of Brake DiscYang, Z. / Han, J. / Li, W. et al. | 2010
- 93
-
Model of Lean Production System for Automobile Manufacture EnterpriseZhang, G. / Fu, X. / Zhu, Y. et al. | 2010
- 99
-
Optimization Design of Water-cooled Heat Sink Applied to Power Electronic EquipmentJie, G. / Sun, C. / Wang, G. et al. | 2010
- 106
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Computational Analyses on Aerodynamic Characteristics of Flatback Wind Turbine AirfoilsYang, R. / Li, R. / Zhang, S. et al. | 2010
- 111
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Research on Cryogenic Character of Spatial Low Infrared Radiated Cold-shield with Liquid NitrogenZhang, Z. / Li, Y. / Wang, Y. et al. | 2010
- 119
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Research on Behavior and Modeling of Absorption ChillerZhang, X. / Wu, J. et al. | 2010
- 126
-
Hybrid Neural Network Prediction Model of Hydraulic Valve Characteristics Under the Affection of Multiple Geometric Factors EffectedJia, Z. / Ma, J. / Liu, W. et al. | 2010
- 132
-
Energy-saving Technology of Variable Counterweight and Its Energy Consumption AnalysesYang, H. / Hu, D. / Xu, B. et al. | 2010
- 139
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Numerical Investigation on a New Type of Fully Reversible Axial Fan with Two Blade Rows on Both Sides of the RotorLi, J. / Chen, W. / Lu, F. et al. | 2010
- 145
-
Simulating and Extending Wire Electrical Discharge Machining Reliability Data by Radial Basis Function Neural NetworkJia, Z. / Zhang, H. / Xi, A. et al. | 2010
- 150
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Remaining Life Evaluation Based on Accelerated Life TestingTan, Y. / Zhang, C. / Chen, X. et al. | 2010
- 155
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Robust Design of Structural Fatigue LifeLi, F. / Meng, G. / Zhou, Z. et al. | 2010
- 159
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Moving-gimbal Effects Compensation of Double Gimbal Magnetically Suspended Control Moment Gyroscope Based on Compound ControlWei, T. / Fang, J. / Liu, Z. et al. | 2010
- 166
-
Trajectory Planning and Precision Control of Scan-move for Step-scan Lithography StageMu, H. / Zhou, Y. et al. | 2010
- 172
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Suppression of Disturbance from Test Turntable Dynamic Unbalance by using Adaptive Repetitive ControlXu, F. / Zhao, X. / Lu, Z. et al. | 2010
- 178
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Mental Construction of User Perception Image in Product DesignZhang, Y. / Yang, Y. / Luo, S. et al. | 2010
- 185
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Real-time Model Checking of Dynamic Temporal Consistency for Multi-process of WorkflowDu, Y. / Fan, Y. et al. | 2010
- 192
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Static Postures Assessment Rule of the Steering Layout DesignHan, Y. / Hong, J. / Wang, W. et al. | 2010