Structural, optical, and electrical properties of NiO-In composite films deposited by radio frequency cosputtering (English)
- New search for: Chen, Sheng-Chi
- New search for: Kuo, Tsung-Yen
- New search for: Lin, Hsin-Chih
- New search for: Wen, Chao-Kuang
- New search for: Lin, Yu-Chin
- New search for: Chen, Cong-Da
- New search for: Chen, Sheng-Chi
- New search for: Kuo, Tsung-Yen
- New search for: Lin, Hsin-Chih
- New search for: Wen, Chao-Kuang
- New search for: Lin, Yu-Chin
- New search for: Chen, Cong-Da
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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32
, 2
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4
;
2014
- Article (Journal) / Electronic Resource
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Title:Structural, optical, and electrical properties of NiO-In composite films deposited by radio frequency cosputtering
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Additional title:Structural, optical, and electrical properties of NiO-In composite films
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Contributors:Chen, Sheng-Chi ( author ) / Kuo, Tsung-Yen ( author ) / Lin, Hsin-Chih ( author ) / Wen, Chao-Kuang ( author ) / Lin, Yu-Chin ( author ) / Chen, Cong-Da ( author )
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Published in:
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Publisher:
- New search for: American Vacuum Society
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Publication date:2014-03-01
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Size:4 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 32, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Phase transition characteristics under vacuum of 9,10-di(2-naphthyl)anthracene for organic light-emitting diodesKim, Jin-Tae / Shim, Seob / Shin, Jae-Su / Kang, Sangwoo / Yun, Ju-Young / Kwon, Ohyun et al. | 2014
- 20601
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Letters - Phase transition characteristics under vacuum of 9,10-di(2-naphthyl)anthracene for organic light-emitting diodesKim, Jin-Tae et al. | 2014
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On the possibility to grow zinc oxide-based transparent conducting oxide films by hot-wire chemical vapor depositionAbrutis, Adulfas / Silimavicus, Laimis / Kubilius, Virgaudas / Murauskas, Tomas / Saltyte, Zita / Kuprenaite, Sabina / Plausinaitiene, Valentina et al. | 2014
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Fluorocarbon assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasmaMetzler, Dominik / Bruce, Robert L. / Engelmann, Sebastian / Joseph, Eric A. / Oehrlein, Gottlieb S. et al. | 2014
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Evolution of morphology and structure of Pb thin films grown by pulsed laser deposition at different substrate temperaturesLorusso, Antonella / Gontad, Francisco / Maiolo, Berlinda / Maruccio, Giuseppe / Tasco, Vittorianna / Perrone, Alessio et al. | 2014
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Development of atomic layer deposition-activated microchannel plates for single particle detection at cryogenic temperaturesGorelikov, Dmitry / Sullivan, Neal / de Rouffignac, Philippe / Li, Huazhi / Narayanamoorthy, Jayasri / Tremsin, Anton S. et al. | 2014
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Low-temperature CVD of iron, cobalt, and nickel nitride thin films from bis[di(tert-butyl)amido]metal(II) precursors and ammoniaCloud, Andrew N. / Davis, Luke M. / Girolami, Gregory S. / Abelson, John R. et al. | 2014
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Critical review: Effects of complex interactions on structure and dynamics of supported metal catalystsFrenkel, Anatoly I. / Cason, Michael W. / Elsen, Annika / Jung, Ulrich / Small, Matthew W. / Nuzzo, Ralph G. / Vila, Fernando D. / Rehr, John J. / Stach, Eric A. / Yang, Judith C. et al. | 2014
- 20801
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Review Article - Critical review: Effects of complex interactions on structure and dynamics of supported metal catalystsFrenkel, Anatoly I et al. | 2014
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Controlled ambient and temperature treatment of InGaZnO thin film transistors for improved bias-illumination stress reliabilityVemuri, Rajitha N. P. / Hasin, Muhammad R. / Alford, T. L. et al. | 2014
- 21101
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Interfaces - Controlled ambient and temperature treatment of InGaZnO thin film transistors for improved bias-illumination stress reliabilityVemuri, Rajitha N P et al. | 2014
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Novel method for the prediction of an interface bonding species at alumina/metal interfacesYoshitake, Michiko / Yagyu, Shinjiro / Chikyow, Toyohiro et al. | 2014
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Second-harmonic intensity and phase spectroscopy as a sensitive method to probe the space-charge field in Si(100) covered with charged dielectricsTerlinden, Nick M. / Vandalon, Vincent / Bosch, Roger H. E. C. / Kessels, W. M. M. (Erwin) et al. | 2014
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Determination of subband energies and 2DEG characteristics of AlxGa1−xN/GaN heterojunctions using variational methodManouchehri, Farzin / Valizadeh, Pouya / Kabir, M. Z. et al. | 2014
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Self limiting deposition of pyrite absorbers by pulsed PECVDSentman, Christopher D. / O'Brien, Maria / Wolden, Colin A. et al. | 2014
- 21201
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Photovoltaics and Energy Self limiting deposition of pyrite absorbers by pulsed PECVDSentman, Christopher D et al. | 2014
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Highly transparent Nb-doped indium oxide electrodes for organic solar cellsKim, Jun Ho / Seong, Tae-Yeon / Na, Seok-In / Chung, Kwun-Bum / Lee, Hye-Min / Kim, Han-Ki et al. | 2014
- 21301
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Plasma Science and Technology - MD simulations of low energy Clx+ ions interaction with ultrathin silicon layers for advanced etch processesBrichon, Paulin et al. | 2014
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MD simulations of low energy Clx+ ions interaction with ultrathin silicon layers for advanced etch processesBrichon, Paulin / Despiau-Pujo, Emilie / Joubert, Olivier et al. | 2014
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Plasma damage mechanisms in low k organosilicate glass and their inhibition by Ar ion bombardmentKazi, Haseeb / Kelber, Jeffry A. et al. | 2014
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Modeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic propertiesPateau, Amand / Rhallabi, Ahmed / Fernandez, Marie-Claude / Boufnichel, Mohamed / Roqueta, Fabrice et al. | 2014
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Comparison of surface vacuum ultraviolet emissions with resonance level number densities. I. Argon plasmasBoffard, John B. / Lin, Chun C. / Culver, Cody / Wang, Shicong / Wendt, Amy E. / Radovanov, Svetlana / Persing, Harold et al. | 2014
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Fabrication of tapered graded-refractive-index micropillars using ion-implanted-photoresist as an etch maskMa, Ming / Fred Schubert, E. / Cho, Jaehee / Evans, Morgan / Bum Kim, Gi / Sone, Cheolsoo et al. | 2014
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Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2Song, Sang-Heon / Kushner, Mark J. et al. | 2014
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Process monitoring during AlNxOy deposition by reactive magnetron sputtering and correlation with the film's propertiesBorges, Joel / Martin, Nicolas / Vaz, Filipe / Marques, Luis et al. | 2014
- 21307
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Process monitoring during AINxOy deposition by reactive magnetron sputtering and correlation with the film's propertiesBorges, Joel et al. | 2014
- 21401
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Surfaces - TOF SIMS analysis and generation of white photoluminescence from strontium silicate codoped with europium and terbiumTshabalala, Modiehi A et al. | 2014
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TOF SIMS analysis and generation of white photoluminescence from strontium silicate codoped with europium and terbiumTshabalala, Modiehi A. / Swart, Hendrik C. / Ntwaeaborwa, Odireleng M. et al. | 2014
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Chemical mechanical planarization of goldKarbasian, Golnaz / Fay, Patrick J. / Grace Xing, Huili / Orlov, Alexei O. / Snider, Gregory L. et al. | 2014
- 21501
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Thin Films - Reactive sputtering of substoichiometric Ta2Ox for resistive memory applicationsStevens, James E et al. | 2014
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Reactive sputtering of substoichiometric Ta2Ox for resistive memory applicationsStevens, James E. / Lohn, Andrew J. / Decker, Seth A. / Doyle, Barney L. / Mickel, Patrick R. / Marinella, Matthew J. et al. | 2014
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Properties of zinc oxide films grown on sapphire substrates using high-temperature H2O generated by a catalytic reaction on platinum nanoparticlesYasui, Kanji / Takeuchi, Tomohiko / Nagatomi, Eichi / Satomoto, Souichi / Miura, Hitoshi / Kato, Takahiro / Konya, Takayuki et al. | 2014
- 021503
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Mechanical and transparent conductive properties of ZnO and Ga-doped ZnO films sputtered using electron-cyclotron-resonance plasma on polyethylene naphthalate substratesAkazawa, H. et al. | 2014
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Mechanical and transparent conductive properties of ZnO and Ga-doped ZnO films sputtered using electron-cyclotron-resonance plasma on polyethylene naphtalate substratesAkazawa, Housei et al. | 2014
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Mechanical and tribological properties of Sn-Cu-O films prepared by reactive magnetron sputteringMusil, Jindřich / Hromádka, Martin / Čerstvý, Radomír / Soukup, Zbyněk et al. | 2014
- 21505
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Vibrational spectra of CO adsorbed an oxide thin films: A tool to probe the surface defects and phase changes of oxide thin filmsSavara, Aditya et al. | 2014
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Vibrational spectra of CO adsorbed on oxide thin films: A tool to probe the surface defects and phase changes of oxide thin filmsSavara, Aditya et al. | 2014
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Effect of thermal annealing on the properties of transparent conductive In–Ga–Zn oxide thin filmsLi, Ling / Fan, Lina / Li, Yanhuai / Song, Zhongxiao / Ma, Fei / Liu, Chunliang et al. | 2014
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Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applicationsMohammed, Shakil / Nimmo, Michael T. / Malko, Anton V. / Hinkle, Christopher L. et al. | 2014
- 021508
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Mechanical and phase stability of TiBC coatings up to 1000^oCAbad, M.D. / Veldhuis, S.C. / Endrino, J.L. / Beake, B.D. / Garcia-Luis, A. / Brizuela, M. / Sanchez-Lopez, J.C. et al. | 2014
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Mechanical and phase stability of TiBC coatings up to 1000 °CAbad, Manuel D. / Veldhuis, Stephen C. / Endrino, Jose L. / Beake, Ben D. / García-Luis, Alberto / Brizuela, Marta / Sánchez-López, Juan C. et al. | 2014
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Influence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ionsYadav, Praveen Kumar / Sant, Tushar / Mukherjee, Chandrachur / Nayak, Maheswar / Rai, Sanjay Kumar / Lodha, Gyanendra Singh / Sharma, Surinder Mohan et al. | 2014
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Dynamic XPS measurements of ultrathin polyelectrolyte films containing antibacterial Ag–Cu nanoparticlesTaner-Camcı, Merve / Suzer, Sefik et al. | 2014
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Deposition and characterization of Cd1−xMgxTe thin films grown by a novel cosublimation methodKobyakov, Pavel S. / Moore, Andrew / Raguse, John M. / Swanson, Drew E. / Sampath, Walajabad S. et al. | 2014
- 21511
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Deposition and characterization of Cd-xMgxTe thin films grown by a novel cosublimation methodKobyakov, Pavel S et al. | 2014
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Degradation of transparent conductive properties of undoped ZnO and Ga-doped ZnO films left in atmospheric ambient for several years and trials to recover initial conductanceAkazawa, Housei et al. | 2014
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Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating propertiesBobzin, Kirsten / Bagcivan, Nazlim / Theiß, Sebastian / Trieschmann, Jan / Brugnara, Ricardo Henrique / Preissing, Sven / Hecimovic, Ante et al. | 2014
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Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxideYang, Jialing / Eller, Brianna S. / Kaur, Manpuneet / Nemanich, Robert J. et al. | 2014
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Effects of the cathode grain size and substrate fixture movement on the evolution of arc evaporated Cr-cathodes and Cr-N coating synthesisZhu, Jianqiang / Syed, Bilal / Polcik, Peter / Håkansson, Greger / Johansson-Jöesaar, Mats / Ahlgren, Mats / Odén, Magnus et al. | 2014
- 21601
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Vacuum Science and Technology - Gas flow through microtubes with different internal surface coatingsHadj Nacer, M et al. | 2014
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Gas flow through microtubes with different internal surface coatingsHadj Nacer, M. / Graur, I. / Perrier, P. / Méolans, J. G. / Wuest, M. et al. | 2014
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Hybrid modeling of time-dependent rarefied gas expansionVargas, Manuel / Naris, Steryios / Valougeorgis, Dimitris / Pantazis, Sarantis / Jousten, Karl et al. | 2014
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Optimization of closed ion source for a high-sensitivity residual gas analyzerHan, Cheolsu / Rok Ahn, Jong / Jung Ahn, Sang / Joon Park, Chang et al. | 2014
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Effect of heat treatments and coatings on the outgassing rate of stainless steel chambersMamun, Md Abdullah A. / Elmustafa, Abdelmageed A. / Stutzman, Marcy L. / Adderley, Philip A. / Poelker, Matthew et al. | 2014
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Shop Notes - Vacuum compatibility of silver and titanium parts made using three-dimensional printingGans, Ashley R et al. | 2014
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Vacuum compatibility of silver and titanium parts made using three-dimensional printingGans, Ashley R. / Jobbins, Matthew M. / Lee, David Y. / Alex Kandel, S. et al. | 2014
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Low cost photoelectron yield setup for surface process monitoringHemmi, Adrian / Cun, Huanyao / Roth, Silvan / Osterwalder, Jürg / Greber, Thomas et al. | 2014
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Structural, optical, and electrical properties of NiO-ln composite films deposited by radio frequency cosputteringChen, Sheng-Chi et al. | 2014
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Effect of annealing treatment on the electrical characteristics of Pt/Cr-embedded ZnO/Pt resistance random access memory devicesChang, Li-Chun / Kao, Hsuan-Ling / Liu, Keng-Hao et al. | 2014
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Synthesis and deposition of metal nanoparticles by gas condensation processMaicu, Marina / Schmittgens, Ralph / Hecker, Dominic / Glöß, Daniel / Frach, Peter / Gerlach, Gerald et al. | 2014
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Antibacterial properties and cytocompatibility of tantalum oxide coatings with different silver contentHuang, Heng-Li / Chang, Yin-Yu / Chen, Hung-Jui / Chou, Yu-Kai / Lai, Chih-Ho / Chen, Michael Y. C. et al. | 2014
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Oxygen plasma immersion ion implantation treatment to enhance data retention of tungsten nanocrystal nonvolatile memoryWang, Jer-Chyi / Chang, Wei-Cheng / Lai, Chao-Sung / Chang, Li-Chun / Ai, Chi-Fong / Tsai, Wen-Fa et al. | 2014
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Structural, optical, and electrical properties of NiO-In composite films deposited by radio frequency cosputteringChen, Sheng-Chi / Kuo, Tsung-Yen / Lin, Hsin-Chih / Wen, Chao-Kuang / Lin, Yu-Chin / Chen, Cong-Da et al. | 2014
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Defects in nonpolar (1340) ZnO epitaxial film grown on (114) LaAIO3 substrateYen, Tzu-Chun et al. | 2014
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Effect of plasma treatment of resistive layer on a Cu/SiOx/Pt memory deviceLiu, Chih-Yi / Tsai, Yueh-Ying / Lai, Chun-Hung et al. | 2014
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