Ion energy distributions on surfaces exposed to plasmas: An experimental and theoretical investigation (English)
National licence
- New search for: Heim, D.
- New search for: Sto¨ri, H.
- New search for: Heim, D.
- New search for: Sto¨ri, H.
In:
Journal of Applied Physics
;
72
, 8
;
3330-3340
;
1992
- Article (Journal) / Electronic Resource
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Title:Ion energy distributions on surfaces exposed to plasmas: An experimental and theoretical investigation
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Contributors:Heim, D. ( author ) / Sto¨ri, H. ( author )
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Published in:Journal of Applied Physics ; 72, 8 ; 3330-3340
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Publisher:
- New search for: American Institute of Physics
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Publication date:1992-10-15
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ISSN:
-
DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 72, Issue 8
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3237
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A new approach for laser particle acceleration in vacuumSteinhauer, Loren C. / Kimura, Wayne D. et al. | 1992
- 3246
-
The effect of the laser mode structure on the sideband spectrum of stored ionsLakkaraju, H. S. / Walian, P. J. / Schuessler, H. A. et al. | 1992
- 3250
-
Optical damage resistance and crystal quality of LiNbO3 single crystals with various [Li]/[Nb] ratiosFurukawa, Yasunori / Sato, Masayoshi / Kitamura, Kenji / Yajima, Yoshiyuki / Minakata, Makoto et al. | 1992
- 3255
-
Analysis of a nonlinear Schroedinger equation with numerical techniquesEguchi, M. / Hayata, K. / Koshiba, M. et al. | 1992
- 3255
-
Analysis of a nonlinear Schro¨dinger equation with numerical techniquesEguchi, Masashi / Hayata, Kazuya / Koshiba, Masanori et al. | 1992
- 3258
-
Vacuum ultraviolet generation by anti‐Stokes Raman scattering of KrF laser radiation in H2Huo, Yunsheng / Shimizu, Kouki / Yagi, Takashi et al. | 1992
- 3264
-
Ultrasonic inspection of very thin adhesive layersFraisse, P. / Schmit, F. / Zarembowitch, A. et al. | 1992
- 3272
-
Surface‐acoustic‐wave devices with low sensitivity to mechanical and thermoelastic stresses.Ballandras, S. / Bigler, E. et al. | 1992
- 3282
-
A generalized model of heat effects in surface reactions. I. Model developmentMartz, Joseph C. / Hess, Dennis W. / Petersen, Eugene E. et al. | 1992
- 3289
-
A generalized model of heat effects in surface reactions. II. Application to plasma etching reactionsMartz, Joseph C. / Hess, Dennis W. / Petersen, Eugene E. et al. | 1992
- 3294
-
A fracture model for a weak interface in a viscoelastic material (small scale yielding analysis)Hui, Chung‐Yuen / Xu, Da‐Ben / Kramer, Edward J. et al. | 1992
- 3305
-
Interface fracture and viscoelastic deformation in finite size specimensXu, Da‐Ben / Hui, Chung‐Yuen / Kramer, Edward J. et al. | 1992
- 3317
-
Liquid metal expulsion during laser irradiationBasu, S. / DebRoy, T. et al. | 1992
- 3323
-
Modeling of physical etching based on the two‐dimensional velocity distributions of ions and fast neutrals using the Boltzmann equationTokonami, Tadashi / Makabe, Toshiaki et al. | 1992
- 3330
-
Ion energy distributions on surfaces exposed to plasmas: An experimental and theoretical investigationHeim, D. / Sto¨ri, H. et al. | 1992
- 3341
-
Stark broadening of the 690.7 nm mercury line in high‐pressure mercury dischargesAsselman, A. / Aube`s, M. / Couris, S. / Salon, J. et al. | 1992
- 3344
-
Study of the decomposition of SF6 under dc negative polarity corona discharges (point‐to‐plane geometry): Influence of the metal constituting the plane electrodeCasanovas, A. M. / Casanovas, J. / Lagarde, F. / Belarbi, A. et al. | 1992
- 3355
-
Line x‐ray emissions from highly ionized plasmas of various species irradiated by compact solid‐state lasersZeng, G. M. / Daido, H. / Murai, K. / Kato, Y. / Nakatsuka, M. / Nakai, S. et al. | 1992
- 3363
-
A theory on the x‐ray sensitivity of a silicon surface‐barrier detector including a thermal charge‐diffusion effectCho, T. / Hirata, M. / Takahashi, E. / Teraji, T. / Yamaguchi, N. / Matsuda, K. / Takeuchi, A. / Kohagura, J. / Ogura, K. / Kondoh, T. et al. | 1992
- 3374
-
Cathode heating mechanisms in pseudospark plasma switchesSommerer, Timothy J. / Pak, Hoyoung / Kushner, Mark J. et al. | 1992
- 3384
-
Metastable chlorine ion transport in a diverging field electron cyclotron resonance plasmaNakano, Toshiki / Sadeghi, Nader / Trevor, Dennis J. / Gottscho, Richard A. / Boswell, R. W. et al. | 1992
- 3394
-
Evidence for the recombination‐enhanced dissociation of a hydrogen‐carbon complex in siliconKamiura, Yoichi / Yoneta, Minoru / Nishiyama, Yoshihide / Hashimoto, Fumio et al. | 1992
- 3398
-
Threading dislocations in InxGa1−xAs/GaAs heterostructuresTamura, M. / Hashimoto, A. / Nakatsugawa, Y. et al. | 1992
- 3406
-
Electronic properties in Ga‐doped CdTe layers grown by metalorganic vapor phase epitaxyEkawa, Mitsuru / Yasuda, Kazuhito / Ferid, Touati / Saji, Manabu / Tanaka, Akikazu et al. | 1992
- 3410
-
Low‐frequency ac conduction and dielectric relaxation in vinyl chloride:vinyl acetate copolymersSingh, Ramadhar / Panwar, V. S. / Tandon, R. P. / Gupta, N. P. / Chandra, Subhas et al. | 1992
- 3417
-
The influence of neutron irradiation on the soft magnetic and mechanical properties of amorphous and nanocrystalline Fe73.5Cu1Nb3Si13.5B9 alloysS˘korva´nek, I. / Gerling, R. et al. | 1992
- 3423
-
Crystallization of amorphous Co‐Si alloysHong, Q. Z. / Barmak, K. / Clevenger, L. A. et al. | 1992
- 3431
-
Point defect based modeling of low dose silicon implant damage and oxidation effects on phosphorus and boron diffusion in siliconPark, Heemyong / Law, Mark E. et al. | 1992
- 3440
-
Evaluation of crystal diffractor parameters for curved diffractorsWittry, D. B. / Chang, W. Z. et al. | 1992
- 3447
-
Internal friction and modulus of nano‐ZrO2 solidsXie, Cunyi / Zhang, Lide / Mo, Chimei / Zhu, Zhengang / Chen, Zuyao / Qian, Yitai / Li, Yian et al. | 1992
- 3447
-
Internal friction and modules of nano-ZrO~2 solidsXie, C. / Zhang, L. / Mo, C. / Zhu, Z. et al. | 1992
- 3451
-
Performance of the star‐shaped flyer in the study of brittle materials: Three dimensional computer simulations and experimental observationsEspinosa, H. D. / Raiser, G. / Clifton, R. J. / Ortiz, M. et al. | 1992
- 3458
-
Elastic and viscoelastic analysis of stress in thin filmsLiu, H. C. / Murarka, S. P. et al. | 1992
- 3464
-
Thermal and electrical properties of the novel organic nonlinear crystal L‐arginine phosphate monohydrateDhanaraj, G. / Srinivasan, M. R. / Bhat, H. L. / Jayanna, H. S. / Subramanyam, S. V. et al. | 1992
- 3468
-
Composition dependence of lithium diffusivity in lithium niobate at high temperatureJundt, D. H. / Fejer, M. M. / Norwood, R. G. / Bordui, P. F. et al. | 1992
- 3474
-
X‐ray diffraction analysis of Si1−xGex/Si superlatticesMai, Z. H. / Ouyang, J. T. / Cui, S. F. / Li, J. H. / Wang, C. Y. / Li, C. R. et al. | 1992
- 3480
-
Laser chemical vapor deposition of cobalt thin filmsSchulmeister, K. / Lunney, J. G. / Buckley, B. et al. | 1992
- 3485
-
Analysis of C films formed on single‐crystal Cu by ion implantation and laser annealingWithrow, S. P. / White, C. W. / Zuhr, R. A. / McCamy, J. W. / Pennycook, S. J. / Hembree, D. M. et al. | 1992
- 3492
-
Growth mechanisms of CdTe during molecular beam epitaxyLitz, Th. / Behr, Th. / Hommel, D. / Waag, A. / Landwehr, G. et al. | 1992
- 3497
-
Magnetism and magnetoresistance in epitaxial Fe/Cr(001) superlatticesKamijo, Atsushi / Igarashi, Hitoshi et al. | 1992
- 3504
-
Brillouin scattering study of surface acoustic waves in crystalline GaPZuk, J. / Kiefte, H. / Clouter, M. J. et al. | 1992
- 3504
-
Brillouin Scattering study of surface acoustic waves in crystallineZuk, J. / Kiefte, H. / Clouter, M. et al. | 1992
- 3509
-
Arsenic cluster dynamics in doped GaAsMelloch, M. R. / Otsuka, N. / Mahalingam, K. / Chang, C. L. / Woodall, J. M. / Pettit, G. D. / Kirchner, P. D. / Cardone, F. / Warren, A. C. / Nolte, D. D. et al. | 1992
- 3514
-
Defect‐induced redistribution of Fe‐ or Ti‐implanted and annealed GaAs, InAs, GaP, and InPUllrich, H. / Knecht, A. / Bimberg, D. / Kra¨utle, H. / Schlaak, W. et al. | 1992
- 3522
-
Tight‐binding calculations on the electronic structure of neutral divacancies in the Ga‐related III‐V compound semiconductorsXu, Hongqi et al. | 1992
- 3530
-
Defect characterization in GaAlInAs alloysNubile, P. / Zazoui, M. / Bourgoin, J. C. / Grey, R. / Powell, A. L. / Claxton, P. A. / Rockett, P. I. et al. | 1992
- 3530
-
Defect characterization in GaAllnAs alloysNubile, P. / Zazoui, M. / Bourgoin, J. C. / Grey, R. et al. | 1992
- 3535
-
Use of low‐frequency capacitance in deep level transient spectroscopy measurements to reduce series resistance effectsAnand, S. / Subramanian, S. / Arora, B. M. et al. | 1992
- 3535
-
Use of low-frequency capacitance in deep level transient spectroscopy measurments to reduce series resistance effectsAnand, S. / Subramanian, S. / Arora, B.M. et al. | 1992
- 3539
-
A novel approach to a transport model for ultra‐small‐scale compound semiconductor devicesCheng, Ming‐C. / Huang, Lin et al. | 1992
- 3550
-
Application of photothermal ionization spectroscopy to the study of epitaxially grown germanium on siliconNavarro, H. / Timusk, T. / Datars, W. R. / Houghton, D. C. et al. | 1992
- 3554
-
Thresholds of impact ionization in semiconductorsBude, J. / Hess, K. et al. | 1992
- 3562
-
Direct and exchange‐correlation carrier interaction effects in a resonant tunnel diodeGawlinski, E. / Dzurak, T. / Tahir‐Kheli, R. A. et al. | 1992
- 3570
-
Highly stable sputtered NiInW refractory ohmic contact to n‐type GaAsHugon, M. C. / Agius, B. / Varniere, F. / Froment, M. / Pillier, F. et al. | 1992
- 3578
-
Photovoltage and photocurrent spectroscopy of p+‐i‐n+ GaAs/AlGaAs quantum well heterostructuresTarricone, L. / Arena, C. / Parisini, A. / Genova, F. et al. | 1992
- 3584
-
Effect of inelastic scattering on resonant tunneling studied by the optical potential and path integralsZohta, Yasuhito / Ezawa, Hiroshi et al. | 1992
- 3589
-
Interface states generated by heat treatment in Au/InGaP Schottky diodesChae, H. J. / Kim, C. H. / Kwon, S. D. / Lee, J. B. / Choe, B. D. / Lim, H. / Lee, Hyung Jae et al. | 1992
- 3593
-
Response of a semiconductor tunneling structure to a time‐dependent perturbationFu, Y. / Willander, M. et al. | 1992
- 3598
-
Resonant tunneling through low dimensional quantum structuresSa’ar, A. / Feng, J. / Grave´, I. / Yariv, A. et al. | 1992
- 3602
-
Electrical transport between delta layers in siliconKiunke, W. / Hammerl, E. / Eisele, I. / Schulze, D. / Gobsch, G. et al. | 1992
- 3606
-
Metal‐oxide‐semiconductor field‐effect transistor characteristics as influenced by carrier mobility variation along the channelPellegrini, Gianfranco / Anderson, Richard L. et al. | 1992
- 3610
-
The effect of bonded interface on electrical properties of bonded silicon‐on‐insulator wafersLing, L. / Radzimski, Z. J. / Abe, T. / Shimura, F. et al. | 1992
- 3617
-
Electrical characteristics of excimer laser ablated bismuth titanate films on siliconMaffei, N. / Krupanidhi, S. B. et al. | 1992
- 3622
-
Residual hydrogen gas induced defects in heteroepitaxial Y~1Ba~2Cu~3O~7 filmsKamei, M. / Yoshida, I. / Takahashi, H. / Itti, R. et al. | 1992
- 3622
-
Residual hydrogen gas induced defects in heteroepitaxial Y1Ba2Cu3O7−x filmsKamei, Masayuki / Yoshida, Isao / Takahashi, Hiromi / Itti, Rittaporn / Morishita, Tadataka et al. | 1992
- 3626
-
Barkhausen noise in ferromagnetic metallic glass Fe40Ni38Mo4B18Kim, H. C. / Lee, K. H. / Kim, C. G. / Hwang, D. G. et al. | 1992
- 3626
-
Barkhausen noise in ferromagnetic metallic glass Fe~4~0Ni~3~8Mo~4B~1~6Kim, H. C. / Lee, K. H. / Kim, C. G. / Hwang, D. G. et al. | 1992
- 3634
-
Comparative study of radiation‐induced electrical and spin active defects in buried SiO2 layersHerve´, D. / Leray, J. L. / Devine, R. A. B. et al. | 1992
- 3641
-
Raman scattering in polycrystalline silicon doped with boronNakano, Noboru / Marville, Louis / Reif, Rafael et al. | 1992
- 3648
-
Comparative study of thin poly‐Si films grown by ion implantation and annealing with spectroscopic ellipsometry, Raman spectroscopy, and electron microscopyBoultadakis, S. / Logothetidis, S. / Ves, S. et al. | 1992
- 3659
-
Optical properties of H2S‐annealed CuInSe2 filmsAren, G. / Vankar, V. D. / Agnihotri, O. P. / Singh, Chatar et al. | 1992
- 3664
-
Mapping of the localized interface and surface states of InGaAs lattice matched to Fe‐doped InP by infrared spectroscopyPeng, L. H. / Broekaert, T. P. E. / Choi, W. Y. / Bennett, B. R. / Smet, J. H. / Diadiuk, V. / Groves, S. H. / Palmateer, S. C. / Pan, N. / Fonstad, C. G. et al. | 1992
- 3670
-
Quantitative characterization of residual strains in gallium phosphide (100) wafersYamada, Masayoshi et al. | 1992
- 3674
-
Photoluminescence characterization of Nd‐doped GaP grown by metalorganic chemical vapor depositionTakahei, Kenichiro / Nakagome, Hiroshi et al. | 1992
- 3681
-
Orientation dependence of intersubband absorption in AlAs/Ga1−xAlxAs X valley superlatticesXie, H. / Katz, J. / Wang, W. I. et al. | 1992
- 3686
-
Laser drilling with focused Gaussian beamsOlson, Radley W. / Swope, William C. et al. | 1992
- 3697
-
Photoluminescence characteristics of CuAlxIn1−xSe2 solid solutions grown by iodine transport techniqueMiyake, Hideto / Sugiyama, Koichi et al. | 1992
- 3702
-
Dispersion of the linear electro‐optic coefficients in GaAsAdachi, Sadao et al. | 1992
- 3702
-
Dispersion of the linear elektro-optic coefficients in GaAsAdachi, Sadao et al. | 1992
- 3705
-
Pressure dependence of optical absorption in PbTiO3 to 35 GPa: Observation of the tetragonal‐to‐cubic phase transitionZha, C. S. / Kalinichev, A. G. / Bass, J. D. / Suchicital, C. T. A. / Payne, D. A. et al. | 1992
- 3708
-
Hall effect and infrared absorption measurements on nitrogen donors in 6H‐silicon carbideSuttrop, W. / Pensl, G. / Choyke, W. J. / Stein, R. / Leibenzeder, S. et al. | 1992
- 3714
-
Temperature distributions induced by multibeam laser irradiationLu, Yong‐Feng et al. | 1992
- 3718
-
X‐ray photoemission analysis and electrical contact properties of NF3 plasma cleaned Si surfacesDelfino, M. / Chung, B.‐C. / Tsai, W. / Salimian, S. / Favreau, D. P. / Merchant, S. M. et al. | 1992
- 3726
-
Ion implantation in PbTiO3 filmsWang, Yuguo / Qu, Baodong / Zhong, Weilie / Zhang, Peilin / Wang, Keming et al. | 1992
- 3730
-
Characterization of hot wall epitaxy grown ZnTe layersLink, P. / Schmidt, Th. / Bauer, S. / Wagner, H. P. / Leiderer, H. / Gebhardt, W. et al. | 1992
- 3735
-
Study of epitaxial platinum thin films grown by metalorganic chemical vapor depositionKwak, B. S. / First, P. N. / Erbil, A. / Wilkens, B. J. / Budai, J. D. / Chisholm, M. F. / Boatner, L. A. et al. | 1992
- 3741
-
Numerical simulations of inductive‐heated float‐zone growthChan, Y. T. / Choi, S. K. et al. | 1992
- 3750
-
Radiative heat transfer in hot‐filament chemical vapor deposition diamond reactorsWolden, C. / Mitra, S. / Gleason, K. K. et al. | 1992
- 3759
-
Definition, resolution, and contrast in photothermal imagingFriedrich, K. / Haupt, K. / Seidel, U. / Walther, H. G. et al. | 1992
- 3765
-
Deposition of copper oxide thin films on different substrates by pulsed excimer laser ablationOgale, S. B. / Bilurkar, P. G. / Mate, Nitant / Kanetkar, S. M. / Parikh, Nalin / Patnaik, Bijoy et al. | 1992
- 3770
-
Rheomagnetic measurements on suspensions of magnetic recording particlesKwon, T. M. / Jhon, M. S. / Karis, T. E. et al. | 1992
- 3778
-
Optimization of a solar‐driven heat engineChen, Jincan et al. | 1992
- 3781
-
p‐i‐n like behavior in three‐layered organic solar cells having a co‐deposited interlayer of pigmentsHiramoto, Masahiro / Fujiwara, Hiroshi / Yokoyama, Masaaki et al. | 1992
- 3788
-
Effects of rapid thermal annealing on lasing properties of InGaAs/GaAs/GaInP quantum well lasersZhang, G. / Na¨ppi, J. / Ovtchinnikov, A. / Asonen, H. / Pessa, M. et al. | 1992
- 3792
-
In situ scanning electron microscopy observation of the dynamic behavior of electromigration voids in passivated aluminum linesBesser, Paul R. / Madden, Michael C. / Flinn, Paul A. et al. | 1992
- 3798
-
Rapid thermal annealing characteristics of bulk AlInAs/InP and AlInAs/GaInAs/InP high electron mobility transistor structures with planar silicon dopingKizilog¯lu, Ku¨rs¸ad / Hashemi, Majid M. / Yin, Lie‐Wei / Li, Yuan Jing / Petroff, Pierre M. / Mishra, Umesh K. / Brown, April S. et al. | 1992
- 3798
-
Rapid thermal annealing characteristics of bulk AllnAs/InP and AlInAs/GaInAs/InP high electron mobility transistor structures with planar silicon dopingKiziloglu, K. / Hashemi, M. M. / Yin, L.-W. / Yuan Jing Li et al. | 1992
- 3803
-
Current transport in Pd/n‐InP diodes formed at room and low temperatureShi, Z. Q. / Anderson, W. A. et al. | 1992
- 3808
-
Study of Ni as a barrier metal in AuSn soldering application for laser chip/submount assemblyLee, C. H. / Wong, Y. M. / Doherty, C. / Tai, K. L. / Lane, E. / Bacon, D. D. / Baiocchi, F. / Katz, A. et al. | 1992
- 3816
-
The photoluminescence spectra of porous silicon boiled in waterLi, K.‐H. / Tsai, C. / Shih, S. / Hsu, T. / Kwong, D. L. / Campbell, J. C. et al. | 1992
- 3818
-
Sequential light irradiation and two‐stage photoquenching in GaAs:EL2Pandian, V. / Kumar, V. et al. | 1992
- 3821
-
Regrowth rates and dopant activation of Sb+‐implanted Si‐Ge alloysHong, Stella Q. / Hong, Q. Z. / Mayer, James W. et al. | 1992
- 3824
-
Comment on ‘‘Depth profiling of nonuniform optical absorption in thin films: Application to hydrogenated amorphous silicon’’ [J. Appl. Phys. 70, 5025 (1991)]Grillo, G. / De Angelis, L. et al. | 1992
- 3826
-
Photoreflectance spectroscopy of semi‐insulating GaAsWang, Ruozhen / Jiang, Desheng et al. | 1992
- 3829
-
Fundamental and harmonic mixing at 500 GHz using a superconductor‐insulator‐normal metal junctionChernin, L. M. / Blundell, R. / Tong, C. Y.‐E. / Miller, R. E. et al. | 1992
- 3832
-
Iron nanoparticles in copper matrix prepared by sol‐gel routeChatterjee, A. / Datta, A. / Giri, Anit K. / Das, D. / Chakravorty, D. et al. | 1992
- 3835
-
Negative nonlinear absorption effects in erbium‐yttrium aluminum garnetsMaeda, Yoshinobu et al. | 1992
- 3838
-
Numerical evaluation of the stopping power for a proton in a strongly coupled electron gasMa, Teng‐Cai / Wang, You‐Nian / Cui, Tao et al. | 1992
- 3841
-
Laser induced oxygen adsorption and intensity degradation of porous SiZheng, X. L. / Chen, H. C. / Wang, W. et al. | 1992