Ion beam composition in ion source based on magnetron sputtering discharge at extremely low working pressure (English)
- New search for: Vizir, A. V.
- New search for: Bugaev, A. S.
- New search for: Frolova, V. P.
- New search for: Gushenets, V. I.
- New search for: Nikolaev, A. G.
- New search for: Oks, E. M.
- New search for: Yushkov, G. Yu.
- New search for: Vizir, A. V.
- New search for: Bugaev, A. S.
- New search for: Frolova, V. P.
- New search for: Gushenets, V. I.
- New search for: Nikolaev, A. G.
- New search for: Oks, E. M.
- New search for: Yushkov, G. Yu.
In:
Review of Scientific Instruments
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93
, 4
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4
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2022
- Article (Journal) / Electronic Resource
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Title:Ion beam composition in ion source based on magnetron sputtering discharge at extremely low working pressure
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Additional title:Vizir et al.
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Contributors:Vizir, A. V. ( author ) / Bugaev, A. S. ( author ) / Frolova, V. P. ( author ) / Gushenets, V. I. ( author ) / Nikolaev, A. G. ( author ) / Oks, E. M. ( author ) / Yushkov, G. Yu. ( author )
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Published in:Review of Scientific Instruments ; 93, 4 ; 4
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Publisher:
- New search for: AIP Publishing LLC
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Publication date:2022-04-01
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Size:4 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 93, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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