Evolution of epitaxial and films during thermal oxidation of epitaxial tantalum films on sapphire substrates (English)
- New search for: Gnanarajan, S.
- New search for: Lam, S. K. H.
- New search for: Gnanarajan, S.
- New search for: Lam, S. K. H.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
26
, 3
;
494-497
;
2008
- Article (Journal) / Electronic Resource
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Title:Evolution of epitaxial and films during thermal oxidation of epitaxial tantalum films on sapphire substrates
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Additional title:Evolution of epitaxial and films
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Contributors:Gnanarajan, S. ( author ) / Lam, S. K. H. ( author )
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Published in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films ; 26, 3 ; 494-497
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Publisher:
- New search for: American Vacuum Society
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Publication date:2008-05-01
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Size:4 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 26, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 313
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Role of oxygen impurities in etching of silicon by atomic hydrogenVeprek, Stan et al. | 2008
- 313
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Role of oxygen impurities in etching of silicon by atomic hydrogena)Veprek, Stan / Wang, Chunlin / Veprek-Heijman, Maritza G. J. et al. | 2008
- 321
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On the mechanism of tritium desorption from stainless steelAkaishi, K. / Torikai, Y. / Murata, D. / Penzhorn, R.-D. / Watanabe, K. / Matsuyama, M. et al. | 2008
- 328
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Influence of the microstructure on steel hardening in pulsed plasma nitridingOchoa, E. A. / Figueroa, C. A. et al. | 2008
- 333
-
Experimental study of multilayer mirrors for the nitrogen -emission lineHardouin, Aurélie / Delmotte, Franck / Ravet, Marie Françoise / Bridou, Françoise / Jerome, Arnaud / Varniere, Françoise / Montcalm, Claude / Hedacq, Sébastien / Gullikson, Eric / Aubert, Pascal et al. | 2008
- 333
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Experimental study of Cr/Sc multilayer mirrors for the nitrogen K~ ~a~l~p~h~a~ -emission lineHardouin, A. / Delmotte, F. / Ravet, M.F. / Bridou, F. / Jerome, A. / Varniere, F. / Montcalm, C. / Hedacq, S. / Gullikson, E. / Aubert, P. et al. | 2008
- 333
-
Experimental study of Cr-Sc multilayer mirrors for the nitrogen Ka-emission lineHardouin, Aurélie et al. | 2008
- 338
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Preparation of thin films on the inner surface of a quartz tube using atmospheric-pressure microplasmaYoshiki, Hiroyuki / Saito, Taku et al. | 2008
- 344
-
Effect of gas mixing ratio on etch behavior of thin films in inductively coupled plasmaKim, Mansu / Min, Nam-Ki / Yun, Sun Jin / Lee, Hyun Woo / Efremov, Alexander / Kwon, Kwang-Ho et al. | 2008
- 352
-
On the gas species dependence of Pirani vacuum gaugesJousten, Karl et al. | 2008
- 360
-
Study of tungsten oxidation in downstream plasmaXu, Songlin / Diao, Li et al. | 2008
- 365
-
Development of a compact vacuum- and hydrogen-annealing machine for surface transformation of silicon and its applications to micro-optical devicesKanamori, Yoshiaki / Douzono, Kenichi / Fujihira, Shinya / Hane, Kazuhiro et al. | 2008
- 370
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Oxidation of silicon nanowires for top-gated field effect transistorsLiu, Bangzhi / Wang, Yanfeng / Ho, Tsung-ta / Lew, Kok-Keong / Eichfeld, Sarah M. / Redwing, Joan M. / Mayer, Theresa S. / Mohney, Suzanne E. et al. | 2008
- 375
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Thermal conductivity of semi-insulating, -type, and -type GaN films on sapphireJagannadham, K. / Berkman, E. A. / Elmasry, N. et al. | 2008
- 380
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Preparation of alpha -Al~2O~3 thin films by electron cyclotron resonance plasma-assisted pulsed laser deposition and heat annealingYu, D. / Lu, Y.F. / Xu, N. / Sun, J. / Ying, Z.F. / Wu, J.D. et al. | 2008
- 380
-
Preparation of a-Al2O3 thin films by electron cyclotron resonance plasma-assisted pulsed laser deposition and heat annealingYu, D. et al. | 2008
- 380
-
Preparation of thin films by electron cyclotron resonance plasma-assisted pulsed laser deposition and heat annealingYu, D. / Lu, Y. F. / Xu, N. / Sun, J. / Ying, Z. F. / Wu, J. D. et al. | 2008
- 385
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Dry etching of SiGe alloys by xenon difluorideXuan, G. / Adam, T. N. / Lv, P.-C. / Sustersic, N. / Coppinger, M. J. / Kolodzey, J. / Suehle, J. / Fitzgerald, E. et al. | 2008
- 389
-
Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etchingShin, H. / Srivastava, S. N. / Ruzic, D. N. et al. | 2008
- 399
-
Characterization of high quality InN grown on production-style plasma assisted molecular beam epitaxy systemGherasoiu, I. / O’Steen, M. / Bird, T. / Gotthold, D. / Chandolu, A. / Song, D. Y. / Xu, S. X. / Holtz, M. / Nikishin, S. A. / Schaff, W. J. et al. | 2008
- 406
-
Experimental study of spatial nonuniformities in capacitively coupled plasma using optical probeVolynets, V. N. / Ushakov, A. G. / Sung, D. / Tolmachev, Y. N. / Pashkovsky, V. G. / Lee, J. B. / Kwon, T. Y. / Jeong, K. S. et al. | 2008
- 416
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Preparation and microstructural characterization of TiC and composite thin films obtained by activated reactive evaporationMontes de Oca, J. A. / LePetitcorps, Y. / Manaud, J.-P. / Vargas García, J. R. et al. | 2008
- 422
-
Sputtering rate of micromilling on water ice with focused ion beam in a cryogenic environmentFu, Jing / Joshi, Sanjay B. / Catchmark, Jeffrey M. et al. | 2008
- 430
-
Tungsten atomic layer deposition on cobalt nanoparticlesWilson, C. A. / Goldstein, D. N. / McCormick, J. A. / Weimer, A. W. / George, S. M. et al. | 2008
- 438
-
Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and depositionLi, Jing / Tian, Xiubo / Yang, Shiqin / Chu, Paul K. / Fu, Ricky K. Y. et al. | 2008
- 444
-
Multilayer transparent electrode consisting of silver alloy layer and metal oxide layers for organic luminescent electronic display deviceKoike, Katsuhiko / Fukuda, Shin et al. | 2008
- 455
-
Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled plasmasStafford, Luc / Guha, Joydeep / Donnelly, Vincent M. et al. | 2008
- 462
-
Operational regimes of the saddle field plasma enhanced chemical vapor deposition systemJohnson, Erik V. / Zukotynski, Stefan / Kherani, Nazir P. et al. | 2008
- 472
-
Plasma-assisted atomic layer deposition of from alkylamide precursor and remote plasmaHeil, S. B. S. / Roozeboom, F. / van de Sanden, M. C. M. / Kessels, W. M. M. et al. | 2008
- 481
-
Dielectric properties of high-density-plasma fluorinated-silicate glass by doping nitrogenWei, B. J. / Cheng, Y. L. / Wang, Y. L. / Lu, F. H. / Shih, H. C. et al. | 2008
- 485
-
Surface phase diagram and alloy formation for antimony on Au(110)Parihar, S. S. / Lyman, P. F. et al. | 2008
- 494
-
Evolution of epitaxial and films during thermal oxidation of epitaxial tantalum films on sapphire substratesGnanarajan, S. / Lam, S. K. H. et al. | 2008
- 498
-
Seasoning of plasma etching reactors: Ion energy distributions to walls and real-time and run-to-run control strategiesAgarwal, Ankur / Kushner, Mark J. et al. | 2008
- 513
-
Compositional analysis of lead telluride films deposited via pulsed electron-beam ablationSteigerwald, A. / Aga, R. / Collins, W. E. / Mu, R. / Hmelo, A. B. et al. | 2008
- 517
-
Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stressBelyansky, M. / Chace, M. / Gluschenkov, O. / Kempisty, J. / Klymko, N. / Madan, A. / Mallikarjunan, A. / Molis, S. / Ronsheim, P. / Wang, Y. et al. | 2008
- 522
-
Multiparameter investigation of the sputtering behavior of Alloys for low energy argon ion bombardmentPierson, K. W. / Hawes, C. D. / Kollwitz, J. T. / Padrón, A. S. et al. | 2008
- 537
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Finite element modeling and experimental validation of the sealing mechanism of the ConFlat(R) jointLutkiewicz, P. et al. | 2008
- 537
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Finite element modeling and experimental validation of the sealing mechanism of the ConFlat® jointLutkiewicz, P. / Rathjen, Ch. et al. | 2008
- 545
-
Role of chamber dimension in fluorocarbon based deposition and etching of and its effects on gas and surface-phase chemistryJoseph, E. A. / Zhou, B.-S. / Sant, S. P. / Overzet, L. J. / Goeckner, M. J. et al. | 2008
- 555
-
Thermal leakage characteristics of structuresSon, Junwoo / Stemmer, Susanne et al. | 2008
- 555
-
Brief Reports and Comments - Thermal leakage characteristics of Pt-SrTiO3-Pt structuresSon, Junwoo et al. | 2008
- 558
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CUMULATIVE AUTHOR INDEX| 2008