Tilted ion implantation as a cost-efficient sublithographic patterning technique (English)
- New search for: Kim, Sang Wan
- New search for: Zheng, Peng
- New search for: Kato, Kimihiko
- New search for: Rubin, Leonard
- New search for: King Liu, Tsu-Jae
- New search for: Kim, Sang Wan
- New search for: Zheng, Peng
- New search for: Kato, Kimihiko
- New search for: Rubin, Leonard
- New search for: King Liu, Tsu-Jae
In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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34
, 4
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5
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2016
- Article (Journal) / Electronic Resource
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Title:Tilted ion implantation as a cost-efficient sublithographic patterning technique
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Additional title:TII as a cost-efficient sublithographic patterning technique
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Contributors:Kim, Sang Wan ( author ) / Zheng, Peng ( author ) / Kato, Kimihiko ( author ) / Rubin, Leonard ( author ) / King Liu, Tsu-Jae ( author )
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Published in:
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Publisher:
- New search for: American Vacuum Society
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Publication date:2016-07-01
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Size:5 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 34, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Thickness characterization of atomically thin WSe2 on epitaxial graphene by low-energy electron reflectivity oscillationsde la Barrera, Sergio C. / Lin, Yu-Chuan / Eichfeld, Sarah M. / Robinson, Joshua A. / Gao, Qin / Widom, Michael / Feenstra, Randall M. et al. | 2016
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Surface structure of in situ cleaved single crystal Bi2Se3 measured by low energy ion scatteringZhou, Weimin / Zhu, Haoshan / Yarmoff, Jory A. et al. | 2016
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Nanoscale Schottky barrier mapping of thermally evaporated and sputter deposited W/Si(001) diodes using ballistic electron emission microscopyNolting, Westly / Durcan, Chris / Narasimham, Avyaya J. / LaBella, Vincent P. et al. | 2016
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Reduced efficiency droop of nonpolar a-plane (11-20) GaN-based light-emitting diodes by vertical injection geometryPark, Min Joo / Oh, Seung Kyu / Jeong, Tak / Jung, Sukkoo / Kwak, Joon Seop et al. | 2016
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Core–shell carrier and exciton transfer in GaAs/GaNAs coaxial nanowiresChen, Shula / Jansson, Mattias / Filippov, Stanislav / Ishikawa, Fumitaro / Chen, Weimin M. / Buyanova, Irina A. et al. | 2016
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Correlation between structural order parameter of epitaxial Fe/Pt multilayer and corresponding perpendicular magnetic anisotropy and orbital magnetic moment upon annealingChen, Yu-Sheng / Lee, Chih-Hao / Lin, Hong-Ji et al. | 2016
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Semitransparent ZnO-based UV-active solar cells: Analysis of electrical loss mechanismsKarsthof, Robert / von Wenckstern, Holger / Grundmann, Marius et al. | 2016
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Study of copper diffusion in RF magnetron sputtered boron carbon nitride thin filmsPrakash, Adithya / Sundaram, Kalpathy B. et al. | 2016
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Resonant cavity germanium photodetector via stacked single-crystalline nanomembranesCho, Minkyu / Seo, Jung-Hun / Kim, Munho / Lee, Jaeseong / Liu, Dong / Zhou, Weidong / Yu, Zongfu / Ma, Zhenqiang et al. | 2016
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Tilted ion implantation as a cost-efficient sublithographic patterning techniqueKim, Sang Wan / Zheng, Peng / Kato, Kimihiko / Rubin, Leonard / King Liu, Tsu-Jae et al. | 2016
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Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicityHung, Yung-Jr / Chang, Ping-Chien / Lin, Yu-Nung / Lin, Jia-Jin et al. | 2016
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Classical momentum gap for electron transport in vacuum and consequences for space charge in thermionic converters with a grid electrodeKhoshaman, Amir H. / Nojeh, Alireza et al. | 2016
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Elevated temperature performance of Si-implanted solar-blind β-Ga2O3 photodetectorsAhn, Shihyun / Ren, Fan / Oh, Sooyeoun / Jung, Younghun / Kim, Jihyun / Mastro, Michael A. / Hite, Jennifer K. / Eddy, Charles R. / Pearton, S. J. et al. | 2016
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Bipolar resistive switching characteristics of cobalt-doped HfO2-based memory filmsGuo, Tingting / Tan, Tingting / Liu, Zhengtang et al. | 2016
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Control of bulk and edge screening effects in two-dimensional arrays of ungated field emittersHarris, John R. / Jensen, Kevin L. / Tang, Wilkin / Shiffler, Donald A. et al. | 2016
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Deep traps and instabilities in AlGaN/GaN high electron mobility transistors on Si substratesPolyakov, Alexander Y. / Smirnov, N. B. / Turutin, A. V. / Shemerov, I. S. / Ren, Fan / Pearton, S. J. / Johnson, J. Wayne et al. | 2016
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Gold-free contacts on AlxGa1-xN/GaN high electron mobility transistor structure grown on a 200-mm diameter Si(111) substrateTham, Wai Hoe / Ang, Diing Shenp / Bera, Lakshmi Kanta / Dolmanan, Surani Bin / Bhat, Thirumaleshwara N. / Kajen, Rasanayagam S. / Tan, Hui Ru / Teo, Siew Lang / Tripathy, Sudhiranjan et al. | 2016
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Influence of ZnSe capping of CdSe layers in the growth mode of ZnCdMgSe/CdSe/ZnCdMgSe heterostructuresAlfaro-Martínez, Adrián Darío / Hernández-Calderón, Isaac / Tamargo, Maria C. et al. | 2016
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Bulk crystal growth and surface preparation of NiSb, MnSb, and NiMnSbMaskery, Ian / Burrows, Christopher W. / Walker, Marc / Singh, Ravi P. / Balakrishnan, Geetha / Duffy, Jon A. / Bell, Gavin R. et al. | 2016
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Integration and fabrication of high-performance Sb-based heterostructure backward diodes with submicron-scale airbridges for terahertz detectionRahman, Syed M. / Jiang, Zhenguo / Fay, Patrick / Liu, Lei et al. | 2016
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Surface analysis and cathodoluminescence degradation of undoped ZnO and ZnO:Zn phosphorsHasabeldaim, Emad / Ntwaeaborwa, Odireleng M. / Kroon, Robin E. / Swart, Hendrik C. et al. | 2016
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On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribingKang, Ji Hye / Krüger, Olaf / Spengler, Uwe / Zeimer, Ute / Einfeldt, Sven / Kneissl, Michael et al. | 2016
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Effects of thickness and V/III ratio of low temperature capping layer growth to the optical properties of InAs quantum dotsWeir, Nicholas / Yao, Ruizhe / Lee, Chi-Sen / Guo, Wei et al. | 2016
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High aspect ratio and large area metallic nanogrids as transparent electrodes on optoelectronic devicesPérez de San Román, Etor / Prieto, Iván / Chaudhuri, Anabil / Neumann, Alexander / Brueck, Steven R. J. / Ripalda, Jose M. et al. | 2016
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Auger electron spectroscopy study of semiconductor surfaces: Effect of cleaning in inert atmosphereDebehets, Jolien / Miranda, Sérgio M. C. / Homm, Pía / Houssa, Michel / Seefeldt, Marc / Locquet, Jean-Pierre / Seo, Jin Won et al. | 2016
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Efficient and ultrafast optical modulation of on-chip thermionic emission using resonant cavity coupled electron emittersRezaeifar, Fatemeh / Kapadia, Rehan et al. | 2016
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Selective release of InP heterostructures from InP substratesChang, Tzu-Hsuan / Fan, Wenjuan / Liu, Dong / Xia, Zhenyang / Ma, Zhenqiang / Liu, Shihchia / Menon, Laxmy / Yang, Hongjun / Zhou, Weidong / Berggren, Jesper et al. | 2016
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Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growthMerrell, Andrew / Liu, Feng et al. | 2016
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Dielectric and piezoelectric properties of percolative three-phase piezoelectric polymer compositesSundar, Udhay / Cook-Chennault, Kimberly Ann / Banerjee, Sankha / Refour, Eric et al. | 2016
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Chemically amplified molecular resists based on noria derivatives containing adamantyl ester groups for electron beam lithographyYamamoto, Hiroki / Tagawa, Seiichi / Kozawa, Takahiro / Kudo, Hiroto / Okamoto, Kazumasa et al. | 2016
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Extreme-ultraviolet plasma source with full, infrared to vacuum ultraviolet spectral filtering, and with power recyclingJohnson, Kenneth C. et al. | 2016
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Development-less deep ultraviolet positive tone photolithography with polymethyl methacrylateCarbaugh, Daniel J. / Wright, Jason T. / Rajan, Parthiban / Kaya, Savas / Rahman, Faiz et al. | 2016
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Kinetic Monte Carlo simulation of GaAs(001) MBE growth considering the V/III flux ratio effectAgeev, Oleg A. / Solodovnik, Maxim S. / Balakirev, Sergey V. / Eremenko, Mikhail M. et al. | 2016
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Effect of vacuum thermal annealing to encapsulated graphene field effect transistorsAlexandrou, Konstantinos / Farmakis, Filippos / Arapis, Alexandros / Georgoulas, Nikolaos / Hao, Yufeng / Hone, James / Kymissis, Ioannis et al. | 2016
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Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulatorBarimar, Prabhava S. N. / Doyle, Catherine M. / Naydenov, Borislav / Boland, John J. et al. | 2016
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High emission current of 1000 μA at 4 × 10−10 Pa from W⟨310⟩ cold field emitter in electron gunKasuya, Keigo / Katagiri, Souichi / Ohshima, Takashi et al. | 2016
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Thermally stable device isolation by inert gas heavy ion implantation in AlGaN/GaN HEMTs on SiArulkumaran, Subramaniam / Ranjan, Kumud / Ng, Geok Ing / Kennedy, John / Murmu, Peter P. / Bhat, Thirumaleshwara N. / Tripathy, Sudhiranjan et al. | 2016
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SiO2 nanohole arrays with high aspect ratio for InGaN/GaN nanorod-based phosphor-free white light-emitting-diodesLim, Wantae / Kum, Hyun / Choi, Young-Jin / Sim, Sung-Hyun / Yeon, Ji-Hye / Kim, Jung-Sub / Seong, Han-Kyu / Cha, Nam-Goo / Kim, Yong-Il / Park, Young-Soo et al. | 2016
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Ballistic electron and photocurrent transport in Au/organic/Si(001) diodes with PDI8-CN2 interlayersBuzio, Renato / Gerbi, Andrea / Marré, Daniele / Barra, Mario / Cassinese, Antonio et al. | 2016
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Direct e-beam writing of colors on (AgI)x(AgPO3)1−x glassJacobs, Kyle E. / Ferreira, Placid M. et al. | 2016
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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approachPalov, Alexander P. / Voronina, Ekaterina N. / Rakhimova, Tatyana V. / Lopaev, Dmitri V. / Zyryanov, Sergey M. / Mankelevich, Yuri A. / Krishtab, Mikhail B. / Baklanov, Mikhail R. et al. | 2016
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He plasma pretreatment of organic masking materials for performance improvement during pattern transfer by plasma etchingMetzler, Dominik / Weilnboeck, Florian / Engelmann, Sebastian / Bruce, Robert L. / Oehrlein, Gottlieb S. et al. | 2016
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Magnetoreflection spectroscopy of monolayer transition-metal dichalcogenide semiconductors in pulsed magnetic fieldsStier, Andreas V. / McCreary, Kathleen M. / Jonker, Berend T. / Kono, Junichiro / Crooker, Scott A. et al. | 2016
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In situ monitoring of hydrogen desorption from silicon nanoparticles dispersed in a nonthermal plasmaLopez, Thomas / Mangolini, Lorenzo et al. | 2016
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Temperature dependence of the dielectric function and interband transitions of pseudomorphic GeSn alloysD'Costa, Vijay Richard / Schmidt, Daniel / Wang, Wei / Yeo, Yee-Chia et al. | 2016
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Design guidelines for nanoscale vacuum field emission transistorsKim, Jungsik / Kim, Jiwon / Oh, Hyeongwan / Meyyappan, M. / Han, Jin-Woo / Lee, Jeong-Soo et al. | 2016
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On the accurate determination of absorption coefficient from reflectanceand transmittance measurements: Application to Fe-doped GaNLook, David C. / Leach, Jacob H. et al. | 2016
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Dose performance characterization of extreme ultraviolet exposure system using enhanced energy sensitivity by resist contrast methodKim, Insung / Heo, JinSeok / Park, Changmin / Hwang, Myeongsu / Kim, Seong-Sue / Hahn, Jae W. et al. | 2016
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High-temperature Ta diffusion in the grain boundary of thin Cu filmsMardani, Shabnam / Norström, Hans / Smith, Ulf / Zhang, Shi-Li et al. | 2016
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Bioinspired broadband midwavelength infrared antireflection coatings on siliconKothary, Pratik / Phillips, Blayne M. / Leo, Sin-Yen / Jiang, Peng et al. | 2016
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Effects of proton irradiation and thermal annealing on off-state step-stressed AlGaN/GaN high electron mobility transistorsKim, Byung-Jae / Ahn, Shihyun / Ren, Fan / Pearton, Stephen J. / Yang, Gwangseok / Kim, Jihyun et al. | 2016
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Initiation strategies for simultaneous control of antiphase domains and stacking faults in GaAs solar cells on GeFaucher, Joseph / Masuda, Taizo / Lee, Minjoo Larry et al. | 2016
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Direct observation of x-ray radiation-induced damage to SiO2/Si interface using multiwavelength room temperature photoluminescenceKim, Jae Hyun / Park, Je Young / Lee, Chang Hwan / Yoon, Yeo Jin / Yoo, Jin San / Ishigaki, Toshikazu / Kang, Kitaek / Yoo, Woo Sik et al. | 2016
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Point spread function and total process function measured for a variable-shaped electron beam systemAsteiner, Michael / Schlemmer, Christian / Speckbacher, Peter / Hoffmann, Karl E. et al. | 2016
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Magnesium hydride film formation using subatmospheric pressure H2 plasma at low temperatureOhmi, Hiromasa / Kakiuchi, Hiroaki / Yasutake, Kiyoshi et al. | 2016
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Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivityFairley, Kurtis C. / Sharps, Meredith C. / Mitchson, Gavin / Ditto, Jeffrey / Johnson, Darren W. / Johnson, David C. et al. | 2016
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Nearly lattice-matched Zn1-zCdzSe/Zn1-xCdxSe/Zn1-yMgySe (z > x) quantum wells for yellow emissionVilla-Martínez, Gerardo / Banthí-Barcenas, Juan Carlos / Bahena, Daniel / Sutara, Frantisek / Hernández-Calderón, Isaac et al. | 2016
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Multiwalled carbon nanotube and graphene–polystyrene nanocomposites for bolometric detectionEl-chami, Ibrahim / Dixon-Luinenburg, Oberon / Bahreyni, Behraad et al. | 2016
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Comparative study of the differential resistance of GaAs- and GaN-based laser diodesLi, Xiang / Liu, Zongshun / Zhao, Degang / Jiang, Desheng / Chen, Ping / Zhu, Jianjun / Yang, Jing / Le, Lingcong / Liu, Wei / He, Xiaoguang et al. | 2016
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X-ray diffraction analysis for step and linearly graded InxGa1−xAs/GaAs (001) heterostructures using various hkl reflectionsAlthowibi, Fahad A. / Rago, Paul B. / Ayers, John E. et al. | 2016
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Real-time implementation of the “orthodoxy test” for conformity of current–voltage characteristics with classical field electron emission theoryKolosko, Anatoly G. / Filippov, Sergey V. / Romanov, Pavel A. / Popov, Eugeni O. / Forbes, Richard G. et al. | 2016
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Investigation of the interface between LPCVD-SiNx gate dielectric and III-nitride for AlGaN/GaN MIS-HEMTsLiu, Zhaoyang / Huang, Sen / Bao, Qilong / Wang, Xinhua / Wei, Ke / Jiang, Haojie / Cui, Hushan / Li, Junfeng / Zhao, Chao / Liu, Xinyu et al. | 2016
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Fabrication of GaN hexagonal cones by inductively coupled plasma reactive ion etchingLiu, Zhe / Wang, Yujin / Xia, Xiaoxiang / Yang, Haifang / Li, Junjie / Gu, Changzhi et al. | 2016
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V-band monolithic microwave integrated circuit with continuous wave output power of >23.5 dBm using conventional AlGaN/GaN-on-Si structureKim, Dong-Hwan / Eom, Su-Keun / Kang, Myoung-Jin / Jeong, Jun-Seok / Seo, Kwang-Seok / Cha, Ho-Young et al. | 2016
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Ballistic electron emission microscopy and spectroscopy: Recent results and related techniquesBell, L. Douglas et al. | 2016
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Exfoliated 2D black phosphorus nanosheets: Field emission studiesSuryawanshi, Sachin R. / More, Mahendra A. / Late, Dattatray J. et al. | 2016
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Modification of the electronic properties of magic In clusters on Si(111)7 × 7 by different environmentsFranz, Martin / Schmermbeck, Julia / Dähne, Mario et al. | 2016
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Magnesium-gold binary alloy for organic light-emitting diodes with high corrosion resistanceArai, Hiroya / Nakanotani, Hajime / Morimoto, Kei / Adachi, Chihaya et al. | 2016
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Nondestructive cleaning of the LaAlO3/SrTiO3 surface with ultraviolet light and ozoneAndersson, Eric / Aurino, Pier Paolo / Winkler, Dag / Kalabukhov, Alexei et al. | 2016
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Novel germanium surface modification for sub-10 nm patterning with electron beam lithography and hydrogen silsesquioxane resistGangnaik, Anushka S. / Georgiev, Yordan M. / Collins, Gillian / Holmes, Justin D. et al. | 2016
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Amorphous Si/SiO2 distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranesCho, Minkyu / Seo, Jung-Hun / Zhao, Deyin / Lee, Jaeseong / Xiong, Kanglin / Yin, Xin / Liu, Yonghao / Liu, Shih-Chia / Kim, Munho / Kim, Tong J. et al. | 2016
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Effect of 5 MeV proton irradiation damage on performance of β-Ga2O3 photodetectorsAhn, Shihyun / Lin, Yi-Hsuan / Ren, Fan / Oh, Sooyeoun / Jung, Younghun / Yang, Gwangseok / Kim, Jihyun / Mastro, Michael A. / Hite, Jennifer K. / Eddy, Charles R. et al. | 2016
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Toward synthesis of oxide films on graphene with sputtering based processesAhlberg, Patrik / Nyberg, Tomas / Zhang, Shi-Li / Zhang, Zhi-Bin / Jansson, Ulf et al. | 2016
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Temperature-dependent electrical instability of p-type SnO thin-film transistorsLee, Jeong-Hwan / Choi, Yong-Jin / Jeong, Chan-Yong / Lee, Chang-Woo / Kwon, Hyuck-In et al. | 2016
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Faraday cage angled-etching of nanostructures in bulk dielectricsLatawiec, Pawel / Burek, Michael J. / Sohn, Young-Ik / Lončar, Marko et al. | 2016