Resolution and alignment accuracy of low-temperature in situ electron beam lithography for nanophotonic device fabrication (English)
- New search for: Gschrey, Manuel
- New search for: Schmidt, Ronny
- New search for: Schulze, Jan-Hindrik
- New search for: Strittmatter, André
- New search for: Rodt, Sven
- New search for: Reitzenstein, Stephan
- New search for: Gschrey, Manuel
- New search for: Schmidt, Ronny
- New search for: Schulze, Jan-Hindrik
- New search for: Strittmatter, André
- New search for: Rodt, Sven
- New search for: Reitzenstein, Stephan
In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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33
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4
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2015
- Article (Journal) / Electronic Resource
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Title:Resolution and alignment accuracy of low-temperature in situ electron beam lithography for nanophotonic device fabrication
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Additional title:Resolution and alignment accuracy
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Contributors:Gschrey, Manuel ( author ) / Schmidt, Ronny ( author ) / Schulze, Jan-Hindrik ( author ) / Strittmatter, André ( author ) / Rodt, Sven ( author ) / Reitzenstein, Stephan ( author )
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Published in:
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Publisher:
- New search for: American Vacuum Society
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Publication date:2015-03-01
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Size:4 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 33, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Ultrafast feedback-controlled electromigration using a field-programmable gate arrayKanamaru, Yuma / Ando, Masazumi / Shirakashi, Jun-ichi et al. | 2015
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Synthesis of PbS/Cu2S/ZnS nanoparticles and their optical propertiesSerrano, Thelma / Gómez, Idalia et al. | 2015
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Controlling the tunnel resistance of suspended Ni nanogaps using field-emission-induced electromigrationToyonaka, Takahiro / Morihara, Kohei / Takikawa, Kazuki / Ito, Mitsuki / Shirakashi, Jun-ichi et al. | 2015
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Morphological effect of light emission from gold nanoparticles on Si(111)Lim, Seong Joon / Jo, Sungwoo / Lee, Minjun / Kim, Seong Heon / Kuk, Young et al. | 2015
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Giant current density via indirect exciton orbit overlapping in polarized nanogranular materialsKoops, Hans W. P. / Fukuda, Hiroshi et al. | 2015
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Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductorsHagmann, Mark J. / Andrei, Petru / Pandey, Shashank / Nahata, Ajay et al. | 2015
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Electrodeposition of p-type cuprous oxide layers on n-type zinc oxide layers with different electrical resistivitiesBaek, Seung Ki / Shin, Jae Hui / Cho, Sung Woon / Cho, Hyung Koun et al. | 2015
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Inelastic effects in low-energy electron reflectivity of two-dimensional materialsGao, Qin / Mende, Patrick C. / Widom, Michael / Feenstra, Randall M. et al. | 2015
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Defect-mediated transport and electronic irradiation effect in individual domains of CVD-grown monolayer MoS2Durand, Corentin / Zhang, Xiaoguang / Fowlkes, Jason / Najmaei, Sina / Lou, Jun / Li, An-Ping et al. | 2015
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Nanochannel fabrication based on double patterning with hydrogen silsesquioxaneDiest, Kenneth / Goodman, Russell / Rothschild, Mordechai et al. | 2015
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Improvement of negative-bias-illumination-stress stability in all-transparent double-gate InGaZnO thin-film transistorsJeon, Da-Bin / Ryu, Min-Ki / Byun, Chun-Won / Yang, Jong-Heon / Hwang, Chi-Sun / Yoon, Sung-Min et al. | 2015
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Dependence of dielectric constant of SiOCH low-k films on porosity and pore sizePalov, Alexander / Rakhimova, Tatiana V. / Krishtab, Mikhail B. / Baklanov, Mikhail R. et al. | 2015
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Origin analysis of thermal neutron soft error rate at nanometer scaleYamazaki, Takashi / Kato, Takashi / Uemura, Taiki / Matsuyama, Hideya / Tada, Yoko / Yamazaki, Kazutoshi / Soeda, Takeshi / Miyajima, Toyoo / Kataoka, Yuji et al. | 2015
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Oscillation characteristics in terahertz transmission through a dipole-based metamaterialLuo, Jun / Bie, Yehua / Zhang, Xinyu / Sang, Hongshi / Ji, An / Xie, Changsheng et al. | 2015
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Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplersFong, Norman R. / Berini, Pierre / Tait, Niall et al. | 2015
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Development of seed layer for electrodeposition of copper on carbon nanotube bundlesJordan, Matthew B. / Feng, Ying / Burkett, Susan L. et al. | 2015
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Oxide structure-dependent interfacial layer defects of HfAlO/SiO2/Si stack analyzed by conductance methodDing, Yi Ming / Misra, Durgamadhab et al. | 2015
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Comparison of the phase-invariant and mosaic crystal models for dynamical x-ray diffraction from metamorphic InxGa1−xAs/GaAs (001) structuresRago, Paul B. / Ayers, John E. et al. | 2015
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Carrier transport analysis of n-ZnO:Al/p-GaN:Mg heterojunction light-emitting diodesJeong, Seonghoon / Kim, Hyunsoo et al. | 2015
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Comparison of thermal annealing effects on electrical activation of MBE grown and ion implant Si-doped In0.53Ga0.47AsLind, Aaron G. / Aldridge, Henry L. / Bomberger, Cory C. / Hatem, Christopher / Zide, Joshua M. O. / Jones, Kevin S. et al. | 2015
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Nanochannel diodes based on InAs/Al80Ga20Sb heterostructures: Fabrication and zero-bias detector propertiesWestlund, Andreas / Nilsson, Per-Åke / Sangaré, Paul / Ducournau, Guillaume / Gaquière, Christophe / Desplanque, Ludovic / Wallart, Xavier / Grahn, Jan et al. | 2015
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Precursors for carbon doping of GaN in chemical vapor depositionLi, Xun / Danielsson, Örjan / Pedersen, Henrik / Janzén, Erik / Forsberg, Urban et al. | 2015
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Surface treatments to reduce leakage current in In0.53Ga0.47As p-i-n diodesGaur, Abhinav / Manwaring, Ian / Filmer, Matthew J. / Thomas, Paul M. / Rommel, Sean L. / Bhatnagar, Kunal / Droopad, Ravi et al. | 2015
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Improved surge protection of flip-chip gallium nitride-based HEMTs by metal-semiconductor-metal two-dimensional electron gas varactorTien, Chu-Yeh / Kuei, Ping-Yu / Chang, Liann-Be et al. | 2015
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Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defectsUpadhyaya, Mihir / Basavalingappa, Adarsh / Herbol, Henry / Denbeaux, Gregory / Jindal, Vibhu / Harris-Jones, Jenah / Jang, Il-Yong / Goldberg, Kenneth A. / Mochi, Iacopo / Marokkey, Sajan et al. | 2015
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Resolution and alignment accuracy of low-temperature in situ electron beam lithography for nanophotonic device fabricationGschrey, Manuel / Schmidt, Ronny / Schulze, Jan-Hindrik / Strittmatter, André / Rodt, Sven / Reitzenstein, Stephan et al. | 2015
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Piezoelectric oscillation sensor based noncontact atomic force microscope for imaging in both ambient and liquid environmentsFroning, Jens P. / Xia, Dan / Zhang, Shuai / Lægsgaard, Erik / Besenbacher, Flemming / Dong, Mingdong et al. | 2015
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Promising method toward realization of ultra-low-cost silicon microrod array with nanotipYaghootkar, Bahareh / Kahrizi, Mojtaba et al. | 2015
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Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applicationsFrey, Brian J. / Kuang, Ping / Lin, Shawn-Yu / Jiang, Jian-Hua / John, Sajeev et al. | 2015
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Arc plasma synthesized Si nanotubes: A promising low turn on field emission sourceJoshi, Padmashree D. / Tank, Chiti M. / Kamble, Shalaka A. / Joag, Dilip S. / Bhoraskar, Sudha V. / Mathe, Vikas L. et al. | 2015
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Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transferRichardson, Mandek / Cheemalapati, Surya / Everly, Richard / Sankaranarayanan, Subramanian K. R. S. / Pyayt, Anna / Bhethanabotla, Venkat R. et al. | 2015
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Mechanical strain mediated carrier scattering and its role in charge and thermal transport in freestanding nanocrystalline aluminum thin filmsKumar, Sandeep / Garcia, Davil / Jin, Jiezhu / Haque, Aman et al. | 2015
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Inductively coupled reactive ion etching studies on sputtered yttria stabilized zirconia thin films in SF6, Cl2, and BCl3 chemistriesSubramaniam, Kiruba Mangalam / Rajeswara Rao, Langoju Lakshmi / Jampana, Nagaraju et al. | 2015
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Fabrication and electrical performance of through silicon via interconnects filled with a copper/carbon nanotube compositeFeng, Ying / Burkett, Susan L. et al. | 2015
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Channel-hot-carrier degradation of strained MOSFETs: A device level and nanoscale combined approachWu, Qian / Porti, Marc / Bayerl, Albin / Martin-Martínez, Javier / Rodriguez, Rosana / Nafria, Montserrat / Aymerich, Xavier / Simoen, Eddy et al. | 2015
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Carbon nanotubes field emission enhancement using a laser post treatmentUlisse, Giacomo / Brunetti, Francesca / Di Carlo, Aldo / Orlanducci, Silvia / Tamburri, Emanuela / Guglielmotti, Valeria / Marrani, Marco / Terranova, Maria Letizia et al. | 2015
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Fluorine interface treatments within the gate stack for defect passivation in 28 nm high-k metal gate technologyDrescher, Maximilian / Naumann, Andreas / Sundqvist, Jonas / Erben, Elke / Grass, Carsten / Trentzsch, Martin / Lazarevic, Florian / Leitsmann, Roman / Plaenitz, Philipp et al. | 2015
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Dependence of mode transition points and hysteresis upon plasma pressure in a re-entrant configuration of inductively coupled plasmaWang, Jian / Cao, Jin-xiang / Zhang, Xiao / Du, Yin-chang / Zheng, Zhe / Liu, Yu / Xu, Liang / Wang, Pi et al. | 2015
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Comment on “Mechanical properties of suspended graphene sheets” [J. Vac. Sci. Technol., B 25, 2558 (2007)]Virgin, Lawrence N. et al. | 2015
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Binary matrices of optimal autocorrelations as alignment marksSkirlo, Scott A. / Lu, Ling / Soljačić, Marin et al. | 2015
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Direction-identical scratching method for fabricating nanostructures using a modified AFM nanoscratching systemGeng, Yanquan / Yu, Bowen / Yan, Yongda / Hu, Zhenjiang / Zhao, Xuesen et al. | 2015
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Electrically stable nanocomposite thin films formed by oxidation of Pt-ZrB2 nanolaminate templatesSell, Julia C. / Stewart, David M. / Bernhardt, George P. / Frankel, David J. / Lad, Robert J. et al. | 2015
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Asymmetrical formation of etching residues and their roles in inner-gate-recessed-channel-array-transistorPark, Segeun / Son, Youngwoong / Han, Sangyeon / Kim, Ilgweon / Roh, Yonghan et al. | 2015
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Well-aligned NiSi/Si heterostructured nanowire arrays as field emittersLv, Shasha / Li, Zhengcao / Liao, Jiecui / Zhang, Zhengjun / Miao, Wei et al. | 2015
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Sub-20 nm silicon patterning and metal lift-off using thermal scanning probe lithographyWolf, Heiko / Rawlings, Colin / Mensch, Philipp / Hedrick, James L. / Coady, Daniel J. / Duerig, Urs / Knoll, Armin W. et al. | 2015
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Negative bias temperature instability threshold voltage shift turnaround in SiGe channel MOSFETsKambour, Kenneth E. / Kouhestani, Camron / McMarr, Patrick / Hughes, Harold L. / Steinke, Daniel R. / Devine, Roderick A. B. et al. | 2015
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Fabrication of pseudo-spin-valve giant magnetoresistance arrays for nanomagnet logic by liftoff and the snow-jet processLi, Peng / Sankar, Vijay / Shah, Faisal / Dey, Himadri / Csaba, Gyorgy / Porod, Wolfgang / Bernstein, Gary H. / Niemier, Michael / Hu, Xiaobo S. / Nahas, Joseph et al. | 2015