Effects of nitrogen content on microstructure and oxidation behaviors of Ti–B–N nanocomposite thin films (English)
- New search for: Lu, Y. H.
- New search for: Shen, Y. G.
- New search for: Zhou, Z. F.
- New search for: Li, K. Y.
- New search for: Lu, Y. H.
- New search for: Shen, Y. G.
- New search for: Zhou, Z. F.
- New search for: Li, K. Y.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
24
, 2
;
340-349
;
2006
- Article (Journal) / Electronic Resource
-
Title:Effects of nitrogen content on microstructure and oxidation behaviors of Ti–B–N nanocomposite thin films
-
Additional title:Effects of nitrogen content on microstructure and oxidation behaviors
-
Contributors:
-
Published in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films ; 24, 2 ; 340-349
-
Publisher:
- New search for: American Vacuum Society
-
Publication date:2006-03-01
-
Size:10 pages
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:English
-
Keywords:
-
Source:
Table of contents – Volume 24, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 179
-
Raman spectroscopy study of the influence of processing conditions on the structure of polycrystalline diamond filmsRamamurti, R. / Shanov, V. / Singh, R. N. / Mamedov, S. / Boolchand, P. et al. | 2006
- 190
-
Phase transformations of sputtered films after annealing and hydrogenationShi, L. Q. / Xu, S. L. et al. | 2006
- 195
-
Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometriesZhao, Z. B. / Yalisove, S. M. / Bilello, J. C. et al. | 2006
- 202
-
Optical emission from the aggregated state in poly (2-methoxy-S-(2'-ethyl-hexyloxy)-p-phenylene vlnylene)Kong, F. et al. | 2006
- 202
-
Optical emission from the aggregated state in poly [2-methoxy-5-(-ethyl-hexyloxy)--phenylene vinylene]Kong, F. / Wu, X. L. / Yuan, R. K. / Yang, C. Z. / Siu, G. G. / Chu, Paul K. et al. | 2006
- 206
-
Structural and optical characteristics of tantalum oxide grown by pulsed Nd:YAG laser oxidationAtanassova, E. / Aygun, G. / Turan, R. / Babeva, Tz. et al. | 2006
- 212
-
Experimental and numerical evaluations of adhesion strength and stress in TiN films deposited on ti-implanted aluminumXu, Ming / Liu, Youming / Li, Liuhe / Cai, Xun / Chen, Qiulong / Chu, Paul K. et al. | 2006
- 218
-
-axis inclined ZnO films for shear-wave transducers deposited by reactive sputtering using an additional blindLink, M. / Schreiter, M. / Weber, J. / Gabl, R. / Pitzer, D. / Primig, R. / Wersing, W. / Assouar, M. B. / Elmazria, O. et al. | 2006
- 223
-
Effects of deposition conditions on gas-barrier performance of thin films formed via ion-beam-assisted vapor depositionKobayashi, T. / Nakano, Y. / Ogawa, M. / Hashimoto, R. / Kamikawa, S. / Itoh, Y. et al. | 2006
- 229
-
Speed-controlled particle injection into a low-pressure systemKim, Jung Hyeun / Fissan, Heinz / Asbach, Christof / Yook, Se-Jin / Pui, David Y. H. et al. | 2006
- 235
-
Texture of Ru columns grown by oblique angle sputter depositionMorrow, P. / Tang, F. / Karabacak, T. / Wang, P.-I. / Ye, D.-X / Wang, G.-C. / Lu, T.-M. et al. | 2006
- 246
-
Investigation of hexagonal microtube on silicon by capacitance-voltage measurementsSun, Yongsheng / Liu, Nuo / Zhou, Xi / Deng, Hong / Gao, Hui / Wu, Haijun / Li, Yanrong et al. | 2006
- 250
-
Quantitative analysis of multilayers and their thermal stability by Auger electron spectroscopy and Rutherford backscattering spectrometry depth profilesPrieto, P. / Morant, C. / Climent-Font, A. / Muñoz, A. / Elizalde, E. / Sanz, J. M. et al. | 2006
- 261
-
Laser deposition and dielectric properties of cubic pyrochlore bismuth zinc niobate thin filmsJiang, S. W. / Jiang, B. / Liu, X. Z. / Li, Y. R. et al. | 2006
- 264
-
Structural defects in an epitaxial -plane sapphire studied by high-resolution electron microscopy and computer simulationLim, Sung-Hwan et al. | 2006
- 269
-
Inert, pulsed, ultrahigh-vacuum-compatible doser for study of hydrazine decomposition on a model catalystFan, Chaoyang / Wu, Tianpin / Anderson, Scott L. et al. | 2006
- 275
-
High-precision determination of lattice constants and structural characterization of InN thin filmsWu, M. F. / Zhou, S. Q. / Vantomme, A. / Huang, Y. / Wang, H. / Yang, H. et al. | 2006
- 280
-
Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistorsMaiolo, L. / Pecora, A. / Fortunato, G. / Young, N. D. et al. | 2006
- 286
-
Structure of surface reaction layer of poly-Si etched by fluorocarbon plasmaKurihara, Kazuaki / Egami, Akihiko / Nakamura, Moritaka et al. | 2006
- 291
-
Plasma enhanced chemical vapor deposition of silicon oxide films with divinyldimethylsilane and tetravinylslianePark, Sung-Gyu et al. | 2006
- 291
-
Plasma enhanced chemical vapor deposition of silicon oxide films with divinyldimethylsilane and tetravinylsilanePark, Sung-Gyu / Rhee, Shi-Woo et al. | 2006
- 296
-
Attenuated total reflection infrared spectroscopy for studying adsorbates on planar model catalysts: CO adsorption on silica supported Rh nanoparticlesLeewis, C. M. / Kessels, W. M. M. / van de Sanden, M. C. M. / Niemantsverdriet, J. W. et al. | 2006
- 305
-
Magnetic anisotropy of (Ga,Mn)As films grown on Si (001) substratesSato, Shin’ya / Jinbo, Yoshio / Uchitomi, Naotaka et al. | 2006
- 309
-
Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite thin filmsTrinh, D. H. / Högberg, H. / Andersson, J. M. / Collin, M. / Reineck, I. / Helmersson, U. / Hultman, L. et al. | 2006
- 317
-
Crystallization and (Al,Ti)-oxide growth in annealed multilayersOmari, M. A. / Sorbello, R. S. / Aita, C. R. et al. | 2006
- 324
-
Stress-induced wrinkling of sputtered films on polymethylmethacrylateSerrano, Justin R. / Xu, Qinqin / Cahill, David G. et al. | 2006
- 328
-
Influence of process parameters on the properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputteringBanakh, O. / Heulin, T. / Schmid, P. E. / Le Dréo, H. / Tkalcec, I. / Lévy, F. / Steinmann, P.-A. et al. | 2006
- 334
-
Improved durability of dielectric coatings for large-area applications on glass via ion beam pretreatment of the substrateWest, G. T. / Kelly, P. J. et al. | 2006
- 340
-
Effects of nitrogen content on microstructure and oxidation behaviors of Ti–B–N nanocomposite thin filmsLu, Y. H. / Shen, Y. G. / Zhou, Z. F. / Li, K. Y. et al. | 2006
- 350
-
Feature scale model of Si etching in plasma and comparison with experimentsBelen, Rodolfo Jun / Gomez, Sergi / Kiehlbauch, Mark / Aydil, Eray S. et al. | 2006
- 362
-
Secondary ion mass spectrometry depth profiling of amorphous polymer multilayers using O+ and Cs+ ion bombardment with a magnetic sector instrumentHarton, S.E. et al. | 2006
- 362
-
Secondary ion mass spectrometry depth profiling of amorphous polymer multilayers using and ion bombardment with a magnetic sector instrumentHarton, S. E. / Stevie, F. A. / Ade, H. et al. | 2006
- 369
-
Electrical and physical properties of room temperature deposited, mixed TiO2-SiO2 oxidesBusani, T. et al. | 2006
- 369
-
Electrical and physical properties of room temperature deposited, mixed oxidesa)Busani, T. / Devine, R. A. B. / Yu, Xiangkun / Seo, Hye-Won et al. | 2006
- 375
-
Systematic studies of islands nucleated via separate in situ or ex situ focused ion beam-guided growth techniquesVandervelde, Thomas E. / Atha, Surajit / Hull, Robert / Pernell, Timothy L. / Bean, John C. et al. | 2006
- 382
-
CUMULATIVE AUTHOR INDEX| 2006
- L1
-
Co-ITO granular magnetoresistance films fabricated by precipitation of magnetic nanoparticles from amorphous oxideEkawati, Wanti / Shi, Ji / Nakamura, Yoshio / Nittono, Osamu et al. | 2006
- L4
-
Transparent conductive thin films with perovskite structureTetsuka, Hiroyuki / Shan, Yue Jin / Tezuka, Keitaro / Imoto, Hideo / Wasa, Kiyotaka et al. | 2006
-
Letters - Transparent conductive Cd3TeO6 thin films with perovskite structureTetsuka, Hiroyuki et al. | 2006
-
Letters - Co-ITO granular magnetoresistance films fabricated byprecipitation of magnetic nanoparticles from amorphous oxideEkawati, Wanti et al. | 2006