Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy (English)
- New search for: Dobrosz, P.
- New search for: Prof.Bull, S. J.
- New search for: Olsen, S. H.
- New search for: O’Neill, A. G.
- New search for: Dobrosz, P.
- New search for: Prof.Bull, S. J.
- New search for: Olsen, S. H.
- New search for: O’Neill, A. G.
In:
International Journal of Materials Research
;
95
, 5
;
340-344
;
2022
- Article (Journal) / Electronic Resource
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Title:Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
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Contributors:Dobrosz, P. ( author ) / Prof.Bull, S. J. ( author ) / Olsen, S. H. ( author ) / O’Neill, A. G. ( author )
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Published in:International Journal of Materials Research ; 95, 5 ; 340-344
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Publisher:
- New search for: De Gruyter
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Publication date:2022-02-01
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Size:5 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 95, Issue 5
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 285
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Frontmatter| 2022
- 286
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Editorial| 2022
- 287
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Challenges and interesting observations associated with feedback-controlled nanoindentationDr.Warren, Oden L. / Downs, Seth A. / Wyrobek, Thomas J. et al. | 2022
- 297
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Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacementProf. Dr.Kaupp, G. / Naimi-Jamal, M. R. et al. | 2022
- 306
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Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformationDr.Küster, Rolf L. A. / Schiffmann, Kirsten I. et al. | 2022
- 311
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Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentationSchiffmann, Kirsten I. / Küster, Rolf L. A. et al. | 2022
- 317
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Nanomechanical characterization of Ti-base nanostructure-dendrite compositeDr.Alcalá, G. / Mato, S. / Woodcock, T. G. / Eckert, J. / Gebert, A. / Schultz, L. / Hangen, U. et al. | 2022
- 320
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Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on siliconWyrobek, J. T. / Malyska, K. / Wrzesinska, H. / Prof.Rymuza, Z. et al. | 2022
- 326
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Viscosity of glass at high contact pressure during indentation experimentsMeinhard, Holger / Prof. Dr.Grau, Peter et al. | 2022
- 335
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Dynamic indentation measurements on amorphous materialsPalacio, J. F. / Bull, S. J. et al. | 2022
- 340
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Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopyDobrosz, P. / Prof.Bull, S. J. / Olsen, S. H. / O’Neill, A. G. et al. | 2022
- 345
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Partial atomic volumes of early transition metals in A10 metal-based solid solutionsDr.Ellner, M. et al. | 2022
- 352
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Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111Prof.Conrad, Hans / Jung, Kang et al. | 2022
- 356
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Fatigue crack propagation in pseudoelastic TiNi smart microcomponentsDr.Filip, Peter / Paliwal, Manish / Mazanec, Karel et al. | 2022
- 362
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Microstructure evolution in immiscible alloys during rapid directional solidificationProf. Dr.Zhao, J.Z. / He, J. / Hu, Z.Q. / Ratke, L. et al. | 2022
- 369
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The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°CBell, A. / Srivastava, V. / Greenwood, G. W. / Prof.Jones, H. et al. | 2022
- 372
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Punch-shear tests and size effects for evaluating the shear strength of machinable ceramicsProf.Bao, Yiwang / Zhang, Haibin / Zhou, Yanchun et al. | 2022
- 377
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Study of Ti–Si in situ composite processing by multi-stage eutectic solidificationMazur, Alexander V. / Gasik, Michael M. / Mazur, Vladislav I. et al. | 2022
- 381
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Twin-roll cast Al–Mg –Si sheet for automotive applicationsDr.Birol, Yücel et al. | 2022
- 387
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Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloysAkinlade, O. / Boyo, A. O. et al. | 2022
- 396
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Personal/ Personelles| 2022
- 397
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Books/Bücher| 2022
- 397
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Press/ Presse| 2022
- 400
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Conferences / Konferenzen| 2022