Clustering phenomena in low-pressure reactive plasmas. Basis and applications (English)
- New search for: Watanabe, Y.
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In:
Pure and Applied Chemistry
;
74
, 3
;
483-487
;
2002
- Article (Journal) / Electronic Resource
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Title:Clustering phenomena in low-pressure reactive plasmas. Basis and applications
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Contributors:
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Published in:Pure and Applied Chemistry ; 74, 3 ; 483-487
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Publisher:
- New search for: De Gruyter
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Publication date:2002-01-01
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Size:5 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 74, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 317
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Energy transfers by long-lived species in glows and afterglowsDe Benedictis, Santolo / Dilecce, Giorgio et al. | 2002
- 317
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - Energy transfers by long-lived species in glows and afterglowsBenedictis, S.De et al. | 2002
- 327
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New approaches in thermal plasma technologyHeberlein, Joachim et al. | 2002
- 327
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - New approaches in thermal plasma technologyHeberlein, J. et al. | 2002
- 337
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressureKruger, C.H. et al. | 2002
- 337
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Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressureKruger, Charles H. / Laux, Christophe O. / Yu, Lan / Packan, Denis M. / Pierrot, Laurent et al. | 2002
- 349
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - Plasma sterilization. Methods and mechanismsMoisan, M. et al. | 2002
- 349
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Plasma sterilization. Methods and mechanismsMoisan, Michel / Barbeau, Jean / Crevier, Marie-Charlotte / Pelletier, Jacques / Philip, Nicolas / Saoudi, Bachir et al. | 2002
- 359
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Plasma production of nanocrystalline silicon particles and polymorphous silicon thin films for large-area electronic devicesi Cabarrocas, Pere Roca / i Morral, Anna Fontcuberta / Lebib, Sarra / Poissant, Yves et al. | 2002
- 359
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - Plasma production of nanocrystalline silicon particles and polymorphous silicon thin films for large-area electronic devicesRoca Cabarrocas, P. et al. | 2002
- 369
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - Plasma processing and chemistrySchram, D.C. et al. | 2002
- 369
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Plasma processing and chemistrySchram, Daniel C. et al. | 2002
- 381
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Plenary Lectures - Study for plasma etching of dielectric film in semiconductor device manufacturing. Review of ASET research projectSekine, M. et al. | 2002
- 381
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Study for plasma etching of dielectric film in semiconductor device manufacturing. Review of ASET research projectSekine, Makoto et al. | 2002
- 397
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Diagnostics of etching plasmasBooth, J.-P. et al. | 2002
- 397
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Diagnostics of etching plasmasBooth, Jean-Paul et al. | 2002
- 401
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Role of ions in SiO2 deposition with pulsed and continuous helicon plasmasCharles, Christine et al. | 2002
- 401
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Role of ions in SiO2 deposition with pulsed and continuous helicon plasmasCharles, C. et al. | 2002
- 407
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Diagnostics and insights on PECVD for gas-barrier coatingsCreatore, Mariadriana / Palumbo, Fabio / d'Agostino, Riccardo et al. | 2002
- 407
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Diagnostics and insights on PECVD for gas-barrier coatingsCreatore, M. et al. | 2002
- 413
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Plasma-assisted production of hydrogen from hydrocarbonsDeminsky, M. et al. | 2002
- 413
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Plasma-assisted production of hydrogen from hydrocarbonsDeminsky, Maxim / Jivotov, Victor / Potapkin, Boris / Rusanov, Vladimir et al. | 2002
- 419
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Ion-induced damage and annealing of silicon. Molecular dynamics simulationsHumbird, David / Graves, David B. et al. | 2002
- 419
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Ion-induced damage and annealing of silicon. Molecular dynamics simulationsHumbird, D. et al. | 2002
- 423
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Plasma treatment of textile fibersHöcker, Hartwig et al. | 2002
- 423
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Plasma treatment of textile fibersHöcker, H. et al. | 2002
- 429
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Generation of thermal plasmas in liquid-stabilized and hybrid dc-arc torchesHrabovský, Milan et al. | 2002
- 429
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Generation of thermal plasmas in liquid-stabilized and hybrid dc-arc torchesHrabovsky, M. et al. | 2002
- 435
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Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materialsIshigaki, T. / Okada, N. / Ohashi, N. / Haneda, H. / Sakuta, T. et al. | 2002
- 435
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materialsIshigaki, T. et al. | 2002
- 441
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Splat formation in plasma-spray coating processMostaghimi, Javad / Chandra, Sanjeev et al. | 2002
- 441
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Splat formation in plasma-spray coating processMostaghimi, J. et al. | 2002
- 447
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Ultrashort pulsed barrier discharges and applicationsOkazaki, Ken / Nozaki, Tomohiro et al. | 2002
- 447
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Ultrashort pulsed barrier discharges and applicationsOkazaki, K. et al. | 2002
- 453
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"Simple" diagnostics for characterization of low-pressure chemically active plasmasOtorbaev, D. K. et al. | 2002
- 453
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - "Simple" diagnostics for characterization of low-pressure chemically active plasmasOtorbaev, D.K. et al. | 2002
- 459
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Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIRPu, Yi-Kang / Guo, Zhi-Gang / Kang, Zheng-De / Ma, Jie / Guan, Zhi-Cheng / Zhang, Guang-Yu / Wang, En-Ge et al. | 2002
- 459
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIRPu, Y.-K. et al. | 2002
- 465
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Excilamps as efficient UV-VUV light sourcesTarasenko, V.F. et al. | 2002
- 465
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Excilamps as efficient UVVUV light sourcesTarasenko, Victor F. et al. | 2002
- 471
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Plasma synthesis of catalytic thin filmsThomann, A.-L. / Rozenbaum, J. P. / Brault, P. / Andreazza, C. / Andreazza, P. / Rousseau, B. / Estrade-Szwarckopf, H. / Berthet, A. / Bertolini, J. C. / Aires, F. J. Cadete Santos et al. | 2002
- 471
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Plasma synthesis of catalytic thin filmsThomann, A.-L. et al. | 2002
- 475
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Superhard nanocomposite coatings. From basic science toward industrializationVeprek, S. / Jilek, M. et al. | 2002
- 475
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Superhard nanocomposite coatings. From basic science toward industrializationVeprek, S. et al. | 2002
- 483
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - Clustering phenomena in low-pressure reactive plasmas. Basis and applicationsWatanabe, Y. et al. | 2002
- 483
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Clustering phenomena in low-pressure reactive plasmas. Basis and applicationsWatanabe, Y. / Shiratani, M. / Koga, K. et al. | 2002
- 489
-
How to exploit ion-induced stress relaxation to grow thick c-BN filmsZiemann, P. / Boyen, H.-G. / Deyneka, N. / Widmayer, P. / Banhart, F. et al. | 2002
- 489
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - Invited Topical Lectures - How to exploit ion-induced stress relaxation to grow thick c-BN filmsZiemann, P. et al. | 2002
- 493
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Definitions of basic terms relating to polymer liquid crystals (IUPAC Recommendations 2001)Barón, Máximo / Stepto, R. F. T. et al. | 2002
- 493
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IUPAC Recommendations and Technical Reports - Definitions of basic terms relating to polymer liquid crystals (IUPAC Recommendations 2001)Baron, M. et al. | 2002
- 511
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Provisional Nomenclature Recommendations| 2002
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Plenary and topical lectures presented at the 15th International Symposium on Plasma Chemistry, Orléans, France, 9-13 July 2001 - PrefaceBouchoule, A. et al. | 2002