Method and system for cleaning polycrystalline silicon (Chinese)
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2023
- Patent / Electronic Resource
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Title:Method and system for cleaning polycrystalline silicon
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Additional title:一种用于对多晶硅进行清洗的方法和系统
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Patent number:CN116759309
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Patent applicant:
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Patent family:
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Contributors:PAN HAO ( author ) / JEON HYUN-KUK ( author )
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Publisher:
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Publication date:2023-09-15
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
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Classification:
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