VORRICHTUNG ZUR OBERFLÄCHENBEHANDLUNG VON OBJEKTEN (German)
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- New search for: STARZMANN OLIVER
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2018
- Patent / Electronic Resource
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Title:VORRICHTUNG ZUR OBERFLÄCHENBEHANDLUNG VON OBJEKTEN
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Additional title:DEVICE FOR TREATING THE SURFACE OF OBJECTS
DISPOSITIF DE TRAITEMENT DE SURFACE D'OBJETS -
Patent number:WO2018189164
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Patent applicant:
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Patent family:
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Contributors:STARZMANN OLIVER ( author ) / SCHIETTINGER THOMAS ( author ) / JAHN-QUADER UWE ( author ) / SCHMITT PETER ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2018-10-18
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Type of media:Patent
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Type of material:Electronic Resource
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Language:German
- New search for: G03F / B08B / H01L
- Further information on International Patent Classification
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Classification:
IPC: G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen, PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES / B08B Reinigen allgemein, CLEANING IN GENERAL / H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
Source: