Simple and Rapid Fabrication Process of Porous Silicon Surface Using Inductively Coupled Plasma Reactive Ion Etching (English)
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- New search for: Yoon, D. H.
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- New search for: Yamazaki, H.
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- New search for: Sugaya, T.
- Further information on Sugaya, T.:
- https://orcid.org/0000-0001-5104-5469
- New search for: Yoon, D. H.
- Further information on Yoon, D. H.:
- https://orcid.org/0000-0001-7180-4370
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In:
Journal of Microelectromechanical Systems
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29
, 1
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62-67
;
2020
- Article (Journal) / Electronic Resource
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Title:Simple and Rapid Fabrication Process of Porous Silicon Surface Using Inductively Coupled Plasma Reactive Ion Etching
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Contributors:Sugaya, T. ( author ) / Yoon, D. H. ( author ) / Yamazaki, H. ( author ) / Nakanishi, K. ( author ) / Sekiguchi, T. ( author ) / Shoji, S. ( author )
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Published in:Journal of Microelectromechanical Systems ; 29, 1 ; 62-67
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Publisher:
- New search for: IEEE
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Publication date:2020-02-01
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Size:4041769 byte
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 29, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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EditorialPiazza, Gianluca et al. | 2020
- 2
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In Memoriam Harvey C. Nathanson 1936–2019Howe, Roger T. / Hornbeck, Larry J. / Fedder, Gary K. et al. | 2020
- 3
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A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode LocalizationPeng, Bo / Hu, Kai-Ming / Shao, Lei / Yan, Han / Li, Lei / Wei, Xueyong / Zhang, Wen-Ming et al. | 2020
- 14
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Investigating Cellular Response to Impact With a Microfluidic MEMS DevicePatterson, Luke H. C. / Walker, Jennifer L. / Rodriguez-Mesa, Evelyn / Shields, Kevin / Foster, John S. / Valentine, Megan T. / Doyle, Adele M. / Foster, Kimberly L. et al. | 2020
- 25
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Design Considerations for Micro-Glassblown Atomic Vapor CellsNoor, Radwan M. / Asadian, Mohammad H. / Shkel, Andrei M. et al. | 2020
- 36
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Micromachined Thermopile Based High Heat Flux SensorTian, Wei / Wang, Yi / Zhou, Hong / Wang, Yuelin / Li, Tie et al. | 2020
- 43
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SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout CircuitsMaroufi, Mohammad / Nikooienejad, Nastaran / Mahdavi, Mohammad / Moheimani, S. O. Reza et al. | 2020
- 54
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Scalable Superomniphobic SurfacesRontu, Ville / Jokinen, Ville / Franssila, Sami et al. | 2020
- 62
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Simple and Rapid Fabrication Process of Porous Silicon Surface Using Inductively Coupled Plasma Reactive Ion EtchingSugaya, T. / Yoon, D. H. / Yamazaki, H. / Nakanishi, K. / Sekiguchi, T. / Shoji, S. et al. | 2020
- 68
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Characterization of Constant Flow-Driven Microfluidic OscillatorLi, Zhenglin / Kim, Sung-Jin et al. | 2020
- 76
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Closed-Loop, Axial Temperature Control of Etched Silicon Microcolumn for Tunable Thermal Gradient Gas ChromatographySchnepf, Parker D. / Davis, Aaron / Iverson, Brian D. / Vanfleet, Richard / Davis, Robert C. / Jensen, Brian D. et al. | 2020
- 86
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On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump Integrated With High-Voltage GeneratorOkamoto, Yuki / Ryoson, Hiroyuki / Fujimoto, Koji / Ohba, Takayuki / Mita, Yoshio et al. | 2020
- 95
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Sealing of MEMS Atomic Vapor Cells Using Cu-Cu Thermocompression BondingKarlen, Sylvain / Haesler, Jacques / Overstolz, Thomas / Bergonzi, Giovanni / Lecomte, Steve et al. | 2020
- 100
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Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat SinksLai, Junhua / Kong, Yanmei / Jiao, Binbin / Ye, Yuxin / Yun, Shichang / Liu, Ruiwen / Ye, Mao / Zhang, Guohe et al. | 2020
- 109
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Zero-Level Packaged RF-MEMS Switched Capacitors on Glass SubstratesBelkadi, Nesrine / Nadaud, Kevin / Hallepee, Clement / Passerieux, Damien / Blondy, Pierre et al. | 2020
- 117
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Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS ResonatorsBelsito, Luca / Bosi, Matteo / Mancarella, Fulvio / Ferri, Matteo / Roncaglia, Alberto et al. | 2020
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Table of contents| 2020
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Journal of Microelectromechanical Systems| 2020
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IEEE Access| 2020