Key process study in nanoimprint lithography (English)
National licence
- New search for: Wang Zhihao
- New search for: Liu Wen
- New search for: Wang Lei
- New search for: Zuo Qiang
- New search for: Zhao Yanli
- New search for: Wang Zhihao
- New search for: Liu Wen
- New search for: Wang Lei
- New search for: Zuo Qiang
- New search for: Zhao Yanli
In:
Journal of Semiconductors
;
33
, 10
;
106002
;
2012
-
ISSN:
- Article (Journal) / Electronic Resource
-
Title:Key process study in nanoimprint lithography
-
Contributors:Wang Zhihao ( author ) / Liu Wen ( author ) / Wang Lei ( author ) / Zuo Qiang ( author ) / Zhao Yanli ( author )
-
Published in:Journal of Semiconductors ; 33, 10 ; 106002
-
Publisher:
- New search for: Institute of Physics
-
Publication date:2012-10-01
-
Size:4 pages
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:English
-
Source:
Table of contents – Volume 33, Issue 10
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 102001
-
Radiation effect on the optical and electrical properties of CdSe(In)/p-Si heterojunction photovoltaic solar cellsM. Ashry / S. Fares et al. | 2012
- 102002
-
Protection effect of a SiO2 layer in Al0.85Ga0.15As wet oxidationZhou Wenfei / Ye Xiaoling / Xu Bo / Zhang Shizhu / Wang Zhanguo et al. | 2012
- 102003
-
Dry etching of new phase-change material Al1.3Sb3Te in CF4/Ar plasmaZhang Xu / Rao Feng / Liu Bo / Peng Cheng / Zhou Xilin / Yao Dongning / Guo Xiaohui / Song Sannian / Wang Liangyong / Cheng Yan et al. | 2012
- 102004
-
Fermi level depinning by a C-containing layer in a metal/Ge structure by using a chemical bathWang Wei / Wang Jing / Zhao Mei / Liang Renrong / Xu Jun et al. | 2012
- 103001
-
Effects of growth temperature on high-quality In0.2Ga0.8N layers by plasma-assisted molecular beam epitaxyZhang Dongyan / Zheng Xinhe / Li Xuefei / Wu Yuanyuan / Wang Jianfeng / Yang Hui et al. | 2012
- 103002
-
An aluminum nitride photoconductor for X-ray detectionWang Xinjian / Song Hang / Li Zhiming / Jiang Hong / Li Dabing / Miao Guoqing / Chen Yiren / Sun Xiaojuan et al. | 2012
- 104001
-
An InP-based heterodimensional Schottky diode for terahertz detectionWen Ruming / Sun Hao / Teng Teng / Li Lingyun / Sun Xiaowei et al. | 2012
- 104002
-
Improved ESD characteristic of GaN-based blue light-emitting diodes with a low temperature n-type GaN insertion layerLi Panpan / Li Hongjian / Zhang Yiyun / Li Zhicong / Liang Meng / Li Jing / Wang Guohong et al. | 2012
- 104003
-
High voltage SOI LDMOS with a compound buried layerLuo Xiaorong / Hu Gangyi / Zhou Kun / Jiang Yongheng / Wang Pei / Wang Qi / Luo Yinchun / Zhang Bo / Li Zhaoji et al. | 2012
- 104004
-
Simulation of cold plasma in a chamber under high- and low-frequency voltage conditions for a capacitively coupled plasmaHao Daoxin / Cheng Jia / Ji Linhong / Sun Yuchun et al. | 2012
- 104005
-
Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technologyDu Chunhui / He Changde / Yu Jiaqi / Ge Xiaoyang / Zhang Yongping / Zhang Wendong et al. | 2012
- 104006
-
Contact size scaling of a W-contact phase-change memory cell based on numerical simulationWei Yiqun / Lin Xinnan / Jia Yuchao / Cui Xiaole / Zhang Xing / Song Zhitang et al. | 2012
- 104007
-
Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonatorWang Yuhai / Qin Zhengkun / Wang Chunxu / Wang Lizhong et al. | 2012
- 105001
-
A low power 2.5-5 GHz low-noise amplifier using 0.5-μm GaAs pHEMT technologyPeng Yangyang / Lu Kejie / Sui Wenquan et al. | 2012
- 105002
-
A high linearity downconverter for SAW-less LTE receiversJiang Peichen / Guan Rui / Wang Wufeng / Chen Dongpo / Zhou Jianjun et al. | 2012
- 105003
-
A CMOS AC/DC charge pump for a wireless sensor networkZhang Qiang / Ni Weining / Shi Yin / Yu Yude et al. | 2012
- 105004
-
A 1.4-V 48-μW current-mode front-end circuit for analog hearing aids with frequency compensationWang Xiaoyu / Yang Haigang / Li Fanyang / Yin Tao / Liu Fei et al. | 2012
- 105005
-
Design of low power common-gate low noise amplifier for 2.4 GHz wireless sensor network applicationsZhang Meng / Li Zhiqun et al. | 2012
- 105006
-
A 7-27 GHz DSCL divide-by-2 frequency dividerGuo Ting / Li Zhiqun / Li Qin / Wang Zhigong et al. | 2012
- 105007
-
A single-event-hardened phase-locked loop using the radiation-hardened-by-design techniqueHan Benguang / Guo Zhongjie / Wu Longsheng / Liu Youbao et al. | 2012
- 105008
-
A wideband LC-VCO with small VCO gain variation and adaptive power controlLi Bin / Fan Xiangning / Wang Zhigong et al. | 2012
- 105009
-
Design and optimization of a 0.5 V CMOS LNA for 2.4-GHz WSN applicationChen Liang / Li Zhiqun et al. | 2012
- 105010
-
A 14-bit 200-MS/s time-interleaved ADC with sample-time error calibrationZhang Yiwen / Chen Chixiao / Yu Bei / Ye Fan / Ren Junyan et al. | 2012
- 105011
-
Design and implementation of a 3-A source and sink linear regulator for bus terminatorsLi Yanming / Mao Xiangyu / Wen Changbao / Wen Limin et al. | 2012
- 105012
-
Design and implementation of channel estimation for low-voltage power line communication systems based on OFDMZhao Huidong / Hei Yong / Qiao Shushan / Ye Tianchun et al. | 2012
- 106001
-
Spatial control based quantum well intermixing in InP/InGaAsP structures using ICPZhao Jianyi / Guo Jian / Huang Xiaodong / Zhou Ning / Liu Wen et al. | 2012
- 106002
-
Key process study in nanoimprint lithographyWang Zhihao / Liu Wen / Wang Lei / Zuo Qiang / Zhao Yanli et al. | 2012
- 106003
-
Material removal rate of 6H-SiC crystal substrate CMP using an alumina (Al2O3) abrasiveSu Jianxiu / Du Jiaxi / Ma Lijie / Zhang Zhuqing / Kang Renke et al. | 2012