Design of MEMS based three-axis motion stage by incorporating a nested structure (English)
Papers
- New search for: Y-S Kim
- New search for: N G Dagalakis
- New search for: S K Gupta
- New search for: Y-S Kim
- New search for: N G Dagalakis
- New search for: S K Gupta
In:
Journal of Micromechanics and Microengineering
;
24
, 7
;
075009
;
2014
-
ISSN:
- Article (Journal) / Electronic Resource
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Title:Design of MEMS based three-axis motion stage by incorporating a nested structure
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Subtitle:Papers
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Additional title:Design of MEMS based three-axis motion stage by incorporating a nested structure
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Contributors:
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Published in:Journal of Micromechanics and Microengineering ; 24, 7 ; 075009
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Publisher:
- New search for: Institute of Physics
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Publication date:2014-07-11
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Size:11 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 24, Issue 7
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 075001
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Gas chemical sensitivity of a CMOS MEMS cantilever functionalized via evaporation driven assemblyK L Dorsey / S S Bedair / G K Fedder et al. | 2014
- 075002
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Viscosity and density decoupling method using a higher order Lamb wave sensorTao Wang / Xiaojing Mu / Piotr Kropelnicki / Andrew Benson Randles / Chengkuo Lee et al. | 2014
- 075003
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Clear evidence of mechanical deformation in RF-MEMS switches during prolonged actuationV Mulloni / G Resta / B Margesin et al. | 2014
- 075004
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Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variablesP Li / J Xie / J Cheng / K K Wu et al. | 2014
- 075005
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Multi-field x-ray microscope based on array of refractive lensesV Nazmov / J Mohr / H Vogt / R Simon / S Diabaté et al. | 2014
- 075006
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Faithful replication of grating patterns in polymer through electrohydrodynamic instabilitiesH Li / W Yu / T Wang / H Zhang / Y Cao / E Abraham / M P Y Desmulliez et al. | 2014
- 075007
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Continuous-flow dielectrophoretic trapping and patterning of colloidal particles in a ratchet microchannelA Kale / X Lu / S Patel / X Xuan et al. | 2014
- 075008
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A self-packaged two-dimensional thermal wind sensor based on thermopiles for low cost applicationsY-Q Zhu / B Chen / F Gu / M Qin / Q-A Huang et al. | 2014
- 075009
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Design of MEMS based three-axis motion stage by incorporating a nested structureY-S Kim / N G Dagalakis / S K Gupta et al. | 2014
- 075010
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Experimental study of PDMS bonding to various substrates for monolithic microfluidic applicationsR W R L Gajasinghe / S U Senveli / S Rawal / A Williams / A Zheng / R H Datar / R J Cote / O Tigli et al. | 2014
- 075011
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Microfabricated electrospray emitter arrays with integrated extractor and accelerator electrodes for the propulsion of small spacecraftS Dandavino / C Ataman / C N Ryan / S Chakraborty / D Courtney / J P W Stark / H Shea et al. | 2014
- 075012
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Development of a flexible three-axis tactile sensor based on screen-printed carbon nanotube-polymer compositeSoonjae Pyo / Jae-Ik Lee / Min-Ook Kim / Taeyoung Chung / Yongkeun Oh / Soo-Chul Lim / Joonah Park / Jongbaeg Kim et al. | 2014
- 075013
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A gyroscope fabrication method for high sensitivity and robustness to fabrication tolerancesJungwoo Sung / Jin Young Kim / Seyeong Seok / Hyuckjin J Kwon / Minseo Kim / Geonhwee Kim / Geunbae Lim et al. | 2014
- 075014
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A simple method for extracting material parameters of multilayered MEMS structures using resonance frequency measurementsChao Sun / Zai-Fa Zhou / Wei-Hua Li / Qing-An Huang et al. | 2014
- 075015
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Femtosecond laser processing of fiber Bragg gratings with photo-induced gradient-index assisted focusingWei Cui / Tao Chen / Jinhai Si / Feng Chen / Xun Hou et al. | 2014
- 075016
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An approach to implement virtual channels for flowing magnetic beadsShih-Hao Tang / Hung-Wei Chiang / Min-Chien Hsieh / Yen-Di Chang / Po-Fan Yeh / Wung-Yang Shieh / Jui-che Tsai et al. | 2014
- 075017
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A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacementJongsoo Choi / Zhen Qiu / Choong-Ho Rhee / Thomas Wang / Kenn Oldham et al. | 2014
- 075018
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Microelectrode array with integrated nanowire FET switches for high-resolution retinal prosthetic systemsSangmin Lee / Suk Won Jung / Jaehyun Ahn / Hyung Jung Yoo / Sung Jin Oh / Dong-Il ‘Dan’ Cho et al. | 2014
- 075019
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Injection moulding of ultra high aspect ratio nanostructures using coated polymer toolingJ M Stormonth-Darling / R H Pedersen / C How / N Gadegaard et al. | 2014
- 075020
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Polyurethane membranes for flexible centimeter-wave patch antennasSamuel Baron / Benoit Guiffard / Ala Sharaiha et al. | 2014
- 075021
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Alternated process for the deep etching of titaniumT Tillocher / P Lefaucheux / B Boutaud / R Dussart et al. | 2014
- 075022
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Design and characterization of a thermally actuated latching MEMS switch for telecommunication applicationsD Dellaert / J Doutreloigne et al. | 2014
- 075023
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Detection of prostate-specific antigen with biomolecule-gated AlGaN/GaN high electron mobility transistorsJia-dong Li / Jun-jie Cheng / Bin Miao / Xiao-wei Wei / Jie Xie / Jin-cheng Zhang / Zhi-qiang Zhang / Dong-min Wu et al. | 2014
- 077001
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Fabrication of a microfluidic channel with differently modified surfaces with a two component approachL Bogunovic / C Vosskötter / D Anselmetti et al. | 2014