Semiconductor Devices, Materials, and Processing - Improved Morphological Stability of CoSi2 Layer by In Situ Growth on Polycrystalline Silicon Using Reactive Chemical Vapor Deposition (English)
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In:
Journal of the Electrochemical Society
;
149
, 1
; G16
;
2002
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ISSN:
- Article (Journal) / Print
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Title:Semiconductor Devices, Materials, and Processing - Improved Morphological Stability of CoSi2 Layer by In Situ Growth on Polycrystalline Silicon Using Reactive Chemical Vapor Deposition
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Contributors:
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Published in:Journal of the Electrochemical Society ; 149, 1 ; G16
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Publisher:
- New search for: Electrochemical Society
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Place of publication:Pennington, NJ
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Publication date:2002
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ISSN:
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ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Table of contents – Volume 149, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- A1
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Lithium intercalation into mechanically milled natural graphite: electrochemical and kinetic characterizationOng, T.S. / Yang, H. et al. | 2002
- A19
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ESD fabricated thin films of spinel LiMn2O4 for lithium microbatteries: I. Effects of thicknessMohamedi, M. / Takahashi, D. / Itoh, T. / Umeda, M. / Uchida, I. et al. | 2002
- C50
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Stable blue photoluminescence from porous siliconKim, Y.S. / Suh, K.Y. / Yoon, Hyunsik / Lee, H.H. et al. | 2002
- F1
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Electrical characteristics of high-k metal oxide/SiO2 stack gate dielectric prepared by reaction of metal with SiO2Shin, J. / Jeon, Sanghun / Hwang, Hyunsang et al. | 2002
- F4
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Spontaneously polarized Sr1-xBi2+yTa2O9 thin films prepared by metallorganic decompositionTejedor, P. / Ocal, C. / Barrena, E. / Jimenez, R. / Alemany, C. / Mendiola, J. et al. | 2002
- G1
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Enhancement of TiSi2 formation during rapid thermal annealing in N2 by the presence of native oxideLee, Wan-Gyu / Lee, Jeong-Gun et al. | 2002
- G77
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Microroughness and composition of cyanide-treated CuInS2Weber, M. / Scheer, R. / Lewerenz, H.J. / Jungblut, H. / Storkel, U. et al. | 2002
- G95
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Initial oxidation processes on hydrogenated silicon surfaces studied by in situ Raman spectroscopyLiu, Feng-Ming / Ren, B. / Yan, Jia-Wei / Mao, Bing-Wei / Tian, Zhong-Qun et al. | 2002
- H6
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Water dispersible silanes for wettability modification of polysiliconAlmanza-Workman, A.M. / Raghavan, S. / Deymier, P. / Monk, D.J. / Ray Roop et al. | 2002
- H19
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Role of grain boundaries in exceptionally H2 sensitive highly oriented laser ablated thin films of SnO2Gnanasekar, K.I. / Rambabu, B. / Langry, K.C. et al. | 2002
- H28
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Electrochemical sensor for dissolved carbon dioxide measurementSheng Yao / Min Wang et al. | 2002
- H33
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Transient quartz crystal microbalance behaviors comparedGeelhood, S.J. / Frank, C.W. / Kanazawa, K. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Evolution of Copper-Oxide Damascene Structures in Chemical Mechanical Polishing - II. Copper Dishing and Oxide ErosionLai, J.-Y. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Nitrogen Implantation and In Situ HF Vapor Clean for Deep Submicrometer n-MOSFETsChen, J.H. et al. | 2002
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Sensors and Displays: Principles, Materials, and Processing - Porous Al2O3 Nanogeometry Sensor Films - Growth and AnalysisYelton, W.G. et al. | 2002
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Batteries and Energy Conversion - Electrochemistry and Mass Transport in Polymer Electrolyte Membrane Fuel Cells I. ModelMurgia, G. et al. | 2002
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Batteries and Energy Conversion - Lithium Intercalation into Mechanically Milled Natural Graphite - Electrochemical and Kinetic CharacterizationOng, T.S. et al. | 2002
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Batteries and Energy Conversion - Vanadium oxide-Carbon Nanotube Composite Electrodes for Use in Secondary lithium BatteriesSakamoto, J.S. et al. | 2002
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Batteries and Energy Conversion - Investigation of Structural Fatigue in Spinel Electrodes Using In Situ Laser Probe Beam Deflection TechniqueChung, K.Y. et al. | 2002
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Corrosion, Passivation, and Anodic Films - The Influence of Water Vapor on the Oxidation of Copper at Intermediate TemperaturesHaugsrud, R. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Chemical Bath Deposition of Indium Oxyhydroxysulfide Thin Films - Effect of the Bath on Film CompositionKaufmann, C. et al. | 2002
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Electrochemical Synthesis and Engineering - A Highly Conductive Room Temperature Molten Fluoride: EMIF . 2.3HFHagiwara, R. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Initial Oxidation Processes on Hydrogenated Silicon Surfaces Studied by In Situ Raman SpectroscopyLiu, F.-M. et al. | 2002
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Batteries and Energy Conversion - Electrochemical Li Insertion in B-Doped Multiwall Carbon NanotubesMukhopadhyay, I. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Improved Morphological Stability of CoSi2 Layer by In Situ Growth on Polycrystalline Silicon Using Reactive Chemical Vapor DepositionLee, H.S. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Stable Blue Photoluminescence from Porous SiliconKim, Y.S. et al. | 2002
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Sensors and Displays: Principles, Materials, and Processing - Role of Grain Boundaries in Exceptionally H2 Sensitive Highly Oriented Laser Ablated Thin Films of SnO2Gnanasekar, K.I. et al. | 2002
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Dielectric Science and Materials - Electrical Characteristics of High-k Metal Oxide-SiO2 Stack Gate Dielectric Prepared by Reaction of Metal with SiO2Sbin, J. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Physics of Copper in SiliconIstratov, A.A. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Effect of Mass Transport on Si Electrodissolution in Aqueous HydrazineCattarin, S. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Precursors for Deposition of Strontium Bismuth Tantalate Films by Direct Liquid Injection-Metallorganic Chemical Vapor DepositionKang, S.-W. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Roles of Hydrogen on the Composition and Bonding of Atoms in Hydrogenated Aluminum Nitride Films Prepared by RF Reactive SputteringKang, Y.-S. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Random and Ordered Macropore Formation in p-Type SiliconVyatkin, A. et al. | 2002
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Sensors and Displays: Principles, Materials, and Processing - Electrochemical Sensor for Dissolved Carbon Dioxide MeasurementYao, S. et al. | 2002
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Solid-State Topics: General - Electric Fields Produced by High-Temperature Metal OxidationNersesyan, M.D. et al. | 2002
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Dielectric Science and Materials - Spontaneously Polarized Sr1-xBi2+yTa2O9 Thin Films Prepared by Metallorganic DecompositionTejedor, P. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Microroughness and Composition of Cyanide-Treated CuInS2Weber, M. et al. | 2002
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Electrochemical Synthesis and Engineering - Electrochemical Vat Dyeing - Combination of an Electrolyzer with a Dyeing ApparatusBechtold, T. et al. | 2002
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Batteries and Energy Conversion - Laminated Thin L1-Ion Batteries Using a liquid ElectrolyteTakami, N. et al. | 2002
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Batteries and Energy Conversion - Studies on Capacity Fade of Spinel-Based Li-Ion BatteriesPremanand, R. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin FilmsPark, J.-S. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Metallorganic Chemical Vapor Deposited TiN Barrier Enhancement with SiH4 TreatmentMarcadal, C. et al. | 2002
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Electrochemical Synthesis and Engineering - Sodium Salt-Splitting Performance of a Novel Ceramic-Polymer Composite Cation-Selective MembraneCormier, L.M. et al. | 2002
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Sensors and Displays: Principles, Materials, and Processing - Transient Quartz Crystal Microbalance Behaviors ComparedGeelhood, S.J. et al. | 2002
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Solid-State Topics: General - Electrical Properties of Yttrium-Doped Strontium Titanate under Reducing ConditionsHui, S. et al. | 2002
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Physical and Analytical Electrochemistry - Electron-Transfer Stopped-Flow Method - Its Validity for Spectrochemical Analysis of Electrogenerated Cation RadicalsOyama, M. et al. | 2002
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Batteries and Energy Conversion - ESD Fabricated Thin Films of Spinel LiMn2O4 for Lithium Microbatteries - I. Effects of ThicknessMohamedi, M. et al. | 2002
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Corrosion, Passivation, and Anodic Films - Evaluation of the Extent of Carbon Steel Surface Damage by Calcium Carbonate ScaleMarin-Cruz, I. et al. | 2002
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Semiconductor Devices, Materials, and Processing - A Global Growth Rate Model for Aluminum Nitride SublimationLiu, L. et al. | 2002
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Semiconductor Devices, Materials, and Processing - The Analysis of Oxygen Plasma Pretreatment for Improving Anodic BondingChoi, S.-W. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Direct Liquid Injection Metallorganic Chemical Vapor Deposition of ZrO2 Thin Films Using Zr (dmae)4 as a Novel PrecursorNa, J.S. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Microstructure of Copper Films Deposited on TiN Substrate by Metallorganic Chemical Vapor DepositionKang, S.-W. et al. | 2002
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Semiconductor Devices, Materials, and Processing - The Inverted p-Diamond-n-CdTe Heterojunction Solar CellHuth, P.von et al. | 2002
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Batteries and Energy Conversion - Electrochemical and Thermal Characterization of Battery Modules Commensurate with Electric Vehicle IntegrationVerhrugge, M.W. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Enhancement of TiSi2 Formation during Rapid Thermal Annealing in N2 by the Presence of Native OxideLee, W.G. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Evolution of Copper-Oxide Damascene Structures in Chemical Mechanical Polishing - I. Contact Mechanics ModelingLai, J.-Y. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Palladium Activation on TaNx Barrier Films for Autocatalytic Electroless Copper DepositionHong, S.W. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Photoluminescence and Photocapacitance of Se Vapor-Pressure-Dependent Deep Levels in Ga-Diffused Layers Formed in p-Type ZnSe SubstratesSakurai, F. et al. | 2002
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Batteries and Energy Conversion - Impedance Studies of the Thin Film LiMn2O4-Electrolyte InterfaceStriebel, K.A. et al. | 2002
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Batteries and Energy Conversion - Surface Analysis of LiMn2O4 Electrodes in Carbonate-Based ElectrolytesEriksson, T. et al. | 2002
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Physical and Analytical Electrochemistry - Limiting Current of Tungsten Electrochemical Dissolution under Conditions of Natural Convection - Vertical Plane ElectrodeDavydov, A.D. et al. | 2002
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Physical and Analytical Electrochemistry - The Effects of Nitrogen and Plasma Power on Electrochemical Properties of Boron-Doped Diamond Electrodes Grown by MPCVDYagi, I. et al. | 2002
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Sensors and Displays: Principles, Materials, and Processing - Water Dispersible Silanes for Wettability Modification of PolysiliconAlmanza-Workman, A.M. et al. | 2002
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Batteries and Energy Conversion - High Performance Electrode for Medium-Temperature Solid Oxide Fuel Cells - Control of Microstructure of La(Sr)CoO3 Cathodes with Highly Dispersed Pt ElectrocatalystsUchida, H. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Growth Mechanism of CBD-In(OH)xSy Thin FilmsBayon, R. et al. | 2002
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Electrochemical Synthesis and Engineering - Electrochemical Oxidation of Transition Metal-Based Mediators for Pulp DelignificationRochefort, D. et al. | 2002
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Sensors and Displays: Principles, Materials, and Processing - Optimization of Gd2O3-Based Red Phosphors Using Combinatorial Chemistry MethodSeo, S.Y. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Electroless Plating of Copper on Poly(tetrafluoroethylene) Films Modified by Surface Graft Copolymerization and QuaternizationYu, Z.J. et al. | 2002
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Corrosion, Passivation, and Anodic Films - Formation of Anodic Film on Magnesium Alloys in an Alkaline Phosphate ElectrolyteBonilla, F.A. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Composition, Structure, Stress, and Coercivity of Electrodeposited Soft Magnetic CoNiFe Films - Thickness and Substrate DependenceTabakovic, I. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Anomalous Electroless Polyol Deposition of FeNi Powders and FilmsYin, H. et al. | 2002
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Electrochemical-Chemical Deposition and Etching - Feature Superfilling in Copper Electrochemical DepositionSoukane, S. et al. | 2002
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Semiconductor Devices, Materials, and Processing - Chemical Vapor Deposition of HfO2 Thin Films Using a Novel Carbon-Free Precursor Characterization of the Interface with the Silicon SubstratePark, J. et al. | 2002