Electrochemical-Chemical Deposition and Etching - Selective Deposition of Cu Interconnects by Prepatterned Ta Film (English)
- New search for: Yang, C.-H.
- New search for: Yang, C.-H.
- New search for: Yang, W.-L.
- New search for: Chang, W.
- New search for: Tseng, W.-W.
In:
Journal of the Electrochemical Society
;
153
, 5
; C301
;
2006
-
ISSN:
- Article (Journal) / Print
-
Title:Electrochemical-Chemical Deposition and Etching - Selective Deposition of Cu Interconnects by Prepatterned Ta Film
-
Contributors:
-
Published in:Journal of the Electrochemical Society ; 153, 5 ; C301
-
Publisher:
- New search for: Electrochemical Society
-
Place of publication:Pennington, NJ
-
Publication date:2006
-
ISSN:
-
ZDBID:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
- New search for: 35.00 / 53.00 / 58.00
- Further information on Basic classification
-
Keywords:
-
Classification:
-
Source:
Table of contents – Volume 153, Issue 5
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- A809
-
Improvements of Dispersion Homogeneity and Cell Performance of Aqueous-Processed LiCoO~2 Cathodes by Using Dispersant of PAA-NH~4Li, C.-C. / Lee, J.-T. / Peng, X.-W. et al. | 2006
- A816
-
Polarization Behavior of SDC Cathode with Highly Dispersed Ni Catalysts for Solid Oxide Electrolysis CellsOsada, N. / Uchida, H. / Watanabe, M. et al. | 2006
- A821
-
Charge-Transfer Reaction at the Lithium Phosphorus Oxynitride Glass Electrolyte/Lithium Manganese Oxide Thin-Film Interface and Its Stability on CyclingIriyama, Y. / Nishimoto, K. / Yada, C. / Abe, T. / Ogumi, Z. / Kikuchi, K. et al. | 2006
- A826
-
Dye-Sensitized Solar Cells Fabricated by Electrospray Coating Using TiO~2 Nanocrystal Dispersion SolutionFujimoto, M. / Kado, T. / Takashima, W. / Kaneto, K. / Hayase, S. et al. | 2006
- A830
-
Measurement of LiClO~4 Diffusion Coefficient in Propylene Carbonate by Moire PatternNishikawa, K. / Fukunaka, Y. / Sakka, T. / Ogata, Y. H. / Selman, J. R. et al. | 2006
- A835
-
Effect of Electrode Parameters on LiFePO~4 CathodesYu, D. Y. W. / Donoue, K. / Inoue, T. / Fujimoto, M. / Fujitani, S. et al. | 2006
- A840
-
Stochastic Microstructure Reconstruction and Direct Numerical Simulation of the PEFC Catalyst LayerMukherjee, P. P. / Wang, C.-Y. et al. | 2006
- A850
-
GDC-Impregnated (La~0~.~7~5Sr~0~.~2~5)(Cr~0~.~5Mn~0~.~5)O~3 Anodes for Direct Utilization of Methane in Solid Oxide Fuel CellsJiang, S. P. / Chen, X. J. / Chan, S. H. / Kwok, J. T. et al. | 2006
- A857
-
Detection of Membrane Drying, Fuel Cell Flooding, and Anode Catalyst Poisoning on PEMFC Stacks by Electrochemical Impedance SpectroscopyLe Canut, J.-M. / Abouatallah, R. M. / Harrington, D. A. et al. | 2006
- A865
-
Chemical Stability of LiNaSO~4 Electrolyte during Operation in a H~2-O~2 Fuel CellFeng, Y. / Luo, J. / Chuang, K. T. et al. | 2006
- A869
-
Oxygen Reduction Reaction on Ruthenium and Rhodium Nanoparticles Modified with Selenium and SulfurCao, D. / Wieckowski, A. / Inukai, J. / Alonso-Vante, N. et al. | 2006
- A875
-
Characterization of Amorphous LiNiVO~4 Thin-Film Anode Grown by Pulsed Laser DepositionTang, S. B. / Xia, H. / Lai, M. O. / Lu, L. et al. | 2006
- A880
-
Effects of Chrome Contamination on the Performance of La~0~.~6Sr~0~.~4Co~0~.~2Fe~0~.~8O~3 Cathode Used in Solid Oxide Fuel CellsKim, J. Y. / Sprenkle, V. L. / Canfield, N. L. / Meinhardt, K. D. / Chick, L. A. et al. | 2006
- A887
-
Using Multi-Pseudocriteria and Fuzzy Outranking Relation Analysis for Material Selection of Bipolar Plates for PEFCsShanian, A. / Savadogo, O. et al. | 2006
- A897
-
Performance of an Intermediate-Temperature Fuel Cell Using a Proton-Conducting Sn~0~.~9In~0~.~1P~2O~7 ElectrolyteHeo, P. / Shibata, H. / Nagao, M. / Hibino, T. / Sano, M. et al. | 2006
- A902
-
Real-Time Imaging of Liquid Water in an Operating Proton Exchange Membrane Fuel CellHickner, M. A. / Siegel, N. P. / Chen, K. S. / McBrayer, D. N. / Hussey, D. S. / Jacobson, D. L. / Arif, M. et al. | 2006
- A909
-
In-Plane Effects in Large-Scale PEFCs II. The Influence of Cooling Strategy on Cell PerformanceFreunberger, S. A. / Wokaun, A. / Buchi, F. N. et al. | 2006
- A909
-
In-plane effects in large-scale PEFCsFreunberger, S.A. / Wokaun, A. / Buchi, F.N. et al. | 2006
- A914
-
Structure Characterization and Lithiation Mechanism of Nongraphitized Carbon for Lithium Secondary BatteriesNagao, M. / Pitteloud, C. / Kamiyama, T. / Otomo, T. / Itoh, K. / Fukunaga, T. / Tatsumi, K. / Kanno, R. et al. | 2006
- A920
-
Anode-Shielded, Sputter-Deposited Nanocrystalline Sn Thin-Film Anodes for Lithium-Ion BatteriesChiu, K.-F. / Lin, H. C. / Lin, K. M. / Lin, T. Y. / Shieh, D. T. et al. | 2006
- A925
-
Improvement of SOFC Performance Using a Microtubular, Anode-Supported SOFCSuzuki, T. / Yamaguchi, T. / Fujishiro, Y. / Awano, M. et al. | 2006
- A929
-
Studies on Iron (Fe^3^+/Fe^2^+)-Complex/Bromine (Br~2/Br^-) Redox Flow Cell in Sodium Acetate SolutionWen, Y. H. / Zhang, H. M. / Qian, P. / Zhou, H. T. / Zhao, P. / Yi, B. L. / Yang, Y. S. et al. | 2006
- A935
-
Water Adsorption and Storage Characteristics of Optimized LiCoO~2 and LiNi~1~/~3Co~1~/~3Mn~1~/~3O~2 Composite Cathode Material for Li-Ion CellsMijung, N. / Lee, Y. / Cho, J. et al. | 2006
- A941
-
Carbonaceous Materials as Proton Conductors I. Fullerenes and Polyaromatic HydrocarbonsTasaki, K. et al. | 2006
- B145
-
Electrochemical Behavior of Hot-Rolled 304 Stainless Steel during Chemical Pickling in HCl-Based ElectrolytesLi, L.-F. / Daerden, M. / Caenen, P. / Celis, J.-P. et al. | 2006
- B151
-
Dissolution Behavior of Al~2CuMg (S Phase) in Chloride and Chromate Conversion Coating SolutionsYoon, Y. / Buchheit, R. G. et al. | 2006
- B156
-
Inhibiting Effects of Nitrates on the Passive Film Breakdown of Alloy 22 in Chloride EnvironmentsGray, J. J. / Hayes, J. R. / Gdowski, G. E. / Orme, C. A. et al. | 2006
- B162
-
A Physical Model for Anticorrosion Behavior of Duplex CoatingsGourbeyre, Y. / Tribollet, B. / Dagbert, C. / Hyspecka, L. et al. | 2006
- B169
-
Oxidation Behavior of Tungsten in H~2O~2- and Fe(NO~3)~3-Base Aqueous SlurriesLim, G. / Lee, J.-H. / Son, J.-W. / Lee, H.-W. / Kim, J. et al. | 2006
- B173
-
Suppression of Field Crystallization of Anodic Niobia by OxygenHabazaki, H. / Ogasawara, T. / Konno, H. / Shimizu, K. / Nagata, S. / Asami, K. / Takayama, K. / Skeldon, P. / Thompson, G. E. et al. | 2006
- B178
-
Tunneling Relaxation of Photocurrent from Passive Films on Stainless SteelSudesh, T. L. / Wijesinghe, L. / Blackwood, D. J. et al. | 2006
- B181
-
Electrokinetic-Current Corrosion I. ValvesBeck, T. R. et al. | 2006
- B187
-
Electrokinetic-Current Corrosion II. Lubricated SystemsBeck, T. R. et al. | 2006
- C273
-
Electrodeposited Biaxially Textured Buffer Layer for YBa~2Cu~3O~7~-~d~e~l~t~a (YBCO) Superconductor Oxide FilmsBhattacharya, R. / Phok, S. / Spagnol, P. / Chaudhuri, T. et al. | 2006
- C277
-
Electrochemical Synthesis and Magnetic Properties of CoFe~2O~4 Nanowire ArraysCarlier, D. / Ansermet, J.-P. et al. | 2006
- C282
-
Ultraviolet Irradiation on Hydrogenated Amorphous Carbon Films Deposited by Atmospheric Dielectric Barrier DischargeKugimiya, T. / Kannaka, M. / Yokomizo, M. / Nakaue, A. / Takamatsu, H. et al. | 2006
- C289
-
Anodic and Electroless Etching of Germanium in Alkaline Hexacyanoferrate SolutionsHuygens, I. M. / Cobbaert, M. / Theuwis, A. / Strubbe, K. et al. | 2006
- C296
-
In Situ Real-Time Infrared Spectroscopy Study of Formation of Porous Anodic Alumina on SiKimura, Y. / Shiraki, H. / Ishibashi, K.-i. / Ishii, H. / Itaya, K. / Niwano, M. et al. | 2006
- C301
-
Selective Deposition of Cu Interconnects by Prepatterned Ta FilmYang, C.-H. / Yang, W.-L. / Chang, W. / Tseng, W.-W. et al. | 2006
- C305
-
Effect of Current Density on Microstructure and Properties of Bulk Nanocrystalline Ni-Co Alloys Prepared by JEDQiao, G. / Jing, T. / Wang, N. / Gao, Y. / Zhao, X. / Zhou, J. / Wang, W. et al. | 2006
- C309
-
Models for the Chemical Vapor Deposition of Tin Oxide from MonobutyltintrichlorideChae, Y. / Houf, W. G. / McDaniel, A. H. / Allendorf, M. D. et al. | 2006
- C318
-
Electrodeposition of Ni from Low-Temperature Sulfamate Electrolytes I. Electrochemistry and Film StressKelly, J. J. / Goods, S. H. / Talin, A. A. / Hachman, J. T. et al. | 2006
- C325
-
Electrodeposition of Ni from Low-Temperature Sulfamate Electrolytes II. Properties and Structure of ElectrodepositsGoods, S. H. / Kelly, J. J. / Talin, A. A. / Michael, J. R. / Watson, R. M. et al. | 2006
- C332
-
Electrodeposition of Gold on Silicon Nucleation and Growth PhenomenaHuang, Q. / Deligianni, H. / Romankiw, L. T. et al. | 2006
- C337
-
Effects of Lead on Tin Whisker Elimination Efforts toward Lead-Free and Whisker-Free Electrodeposition of TinZhang, W. / Schwager, F. et al. | 2006
- C337
-
Effects of lead on tin whisker eliminationZhang, Wan / Schwager, F. et al. | 2006
- C344
-
Electrochemical Etching Using Surface-Sulfonated Electrodes in Ultrapure WaterIchii, Y. / Mori, Y. / Hirose, K. / Endo, K. / Yamauchi, K. / Goto, H. et al. | 2006
- C349
-
Electrochemical Polymerization of Pyrrole into Nanostructured p-Type Porous SiliconHarraz, F. A. et al. | 2006
- C357
-
Effects of Deposition Conditions on the Morphology of Zinc Deposits from Alkaline Zincate SolutionsWang, R. Y. / Kirk, D. W. / Zhang, G. X. et al. | 2006
- C365
-
Electrochromic Nanostructured Tungsten Oxide Films by Sol-gel: Structure and Intercalation PropertiesDeepa, M. / Joshi, A. G. / Srivastava, A. K. / Shivaprasad, S. M. / Agnihotry, S. A. et al. | 2006
- D85
-
Model of Multiple Metal Electrodeposition in Porous ElectrodesPilone, D. / Kelsall, G. H. et al. | 2006
- D91
-
Characterization of Hybrid Poly(acriflavine)/FAD Films and Their Electrocatalytic Properties with NAD^+ and NADHLin, K.-C. / Chen, S.-M. et al. | 2006
- E79
-
Physical and Electrochemical Characterizations of PtRu/C Catalysts by Spray Pyrolysis for Electrocatalytic Oxidation of MethanolXue, X. / Liu, C. / Xing, W. / Lu, T. et al. | 2006
- E85
-
Electrochromic Devices Based on Copolymers of 2,5-Dimethoxyaniline-DiphenylamineYang, C.-H. / Yang, T.-C. / Chen, C.-H. / Tsai, M.-S. et al. | 2006
- E94
-
Evaluation of Different Voltammetric Techniques in the Determination of Amoxicillin Using a Carbon Paste Electrode Modified with [N,N'-ethylenebis(salicylideneaminato)] oxovanadium(IV)Bergamini, M. F. / Teixeira, M. F. S. / Dockal, E. R. / Bocchi, N. / Cavalheiro, T. G. et al. | 2006
- F69
-
Low Temperature (<100^oC) Deposition of Aluminum Oxide Thin Films by ALD with O~3 as OxidantKim, S. K. / Lee, S. W. / Hwang, C. S. / Min, Y.-S. / Won, J. Y. / Jeong, J. et al. | 2006
- F77
-
Electrical Characteristics of Liquid-Phase-Deposited TiO~2 Films on GaAs Substrate with (NH~4)~2S~x TreatmentLee, M.-K. / Yen, C.-F. / Huang, J.-J. et al. | 2006
- F81
-
Characterization of Pb~xPt~y Alloy Formation on a Pt Substrate during Liquid-Delivery MOCVD of Pb(Zr,Ti)O~3 Thin FilmsZhao, J. S. / Sim, J. S. / Lee, H. J. / Park, D.-Y. / Hwang, G. W. / Lee, K. / Hwang, C. S. et al. | 2006
- G363
-
Low-Temperature LPCVD of Polycrystalline Ge~xSi~1~-~x Films with High Germanium ContentKovalgin, A. / Holleman, J. et al. | 2006
- G372
-
Effects of Slurry Flow Rate and Pad Conditioning Temperature on Dishing, Erosion, and Metal Loss during Copper CMPMudhivarthi, S. / Gitis, N. / Kuiry, S. / Vinogradov, M. / Kumar, A. et al. | 2006
- G379
-
Analysis of the Leakage Current Origin in Thin Strain Relaxed Buffer SubstratesEneman, G. / Simoen, E. / Delhougne, R. / Verheyen, P. / Simons, V. / Loo, R. / Caymax, M. / Claeys, C. / Vandervorst, W. / De Meyer, K. et al. | 2006
- G385
-
Effects of Electrical Bias Stress on the Performance of ZnO-Based TFTs Fabricated by RF Magnetron SputteringNavamathavan, R. / Yang, E.-J. / Lim, J.-H. / Hwang, D.-K. / Oh, J.-Y. / Yang, J.-H. / Jang, J.-H. / Park, S.-J. et al. | 2006
- G389
-
Metal Wet Etch Issues and Effects in Dual Metal Gate Stack IntegrationHussain, M. M. / Moumen, N. / Zhang, Z. / Womack, B. F. et al. | 2006
- G394
-
Mechanism of Copper Removal from SiO~2 Surfaces by Hydrogen Cyanide Aqueous SolutionsFujiwara, N. / Liu, Y.-L. / Takahashi, M. / Kobayashi, H. et al. | 2006
- G399
-
Effects of Disk Design and Kinematics of Conditioners on Process Hydrodynamics during Copper CMPLi, Z. / Lee, H. / Borucki, L. / Rogers, C. / Kikuma, R. / Rikita, N. / Nagasawa, K. / Philipossian, A. et al. | 2006
- G405
-
Isolated Carbon Confinement Methodology for Ultrathin Boron Profiles in Strained Layers of Silicon GermaniumEnicks, D. / Oleszek, G. et al. | 2006
- G410
-
Hafnium-Doped Tantalum Oxide High-k Gate DielectricsLu, J. / Kuo, Y. / Tewg, J.-Y. et al. | 2006
- G417
-
Electrical and Physical Analysis of MoTa Alloy for Gate Electrode ApplicationsChen, B. / Biswas, N. / Misra, V. et al. | 2006
- G420
-
Effects of Plasma Treatments on Ultralow-k Dielectric Film and Ta Barrier Properties in Cu Damascene ProcessingKumar, R. / Wong, T. K. S. / Murthy, B. R. / Wang, Y. H. / Balasubramanian, N. et al. | 2006
- G428
-
Modeling Copper CMP Removal Rate Dependency on Wafer Pressure, Velocity, and Dissolved Oxygen ConcentrationDeNardis, D. / Doi, T. / Hiskey, B. / Ichikawa, K. / Ichikawa, D. / Philipossian, A. et al. | 2006
- G437
-
Evaluation of Atomic Layer Deposited NbN and NbSiN as Metal Gate MaterialsVan Hoornick, N. / De Witte, H. / Witters, T. / Zhao, C. / Conard, T. / Huotari, H. / Swerts, J. / Schram, T. / Maes, J. W. / De Gendt, S. et al. | 2006
- G443
-
Study of the Carry-over Layer and Its Importance for Wet Processing of Semiconductor SubstratesFyen, W. / Mertens, P. W. et al. | 2006
- G453
-
Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMPRemsen, E. E. / Anjur, S. / Boldridge, D. / Kamiti, M. / Li, S. / Johns, T. / Dowell, C. / Kasthurirangan, J. / Feeney, P. et al. | 2006
- G462
-
Ti/Au Ohmic Contacts to Al-Doped n-ZnO Grown by Pulsed Laser DepositionChen, J. J. / Anderson, T. J. / Jang, S. / Ren, F. / Li, Y. J. / Kim, H.-S. / Gila, B. P. / Norton, D. P. / Pearton, S. J. et al. | 2006
- G465
-
Area-Selective ALD of Titanium Dioxide Using Lithographically Defined Poly(methyl methacrylate) FilmsSinha, A. / Hess, D. W. / Henderson, C. L. et al. | 2006
- G470
-
Bias-Temperature Stability of Ti-Si-N-O FilmsEe, Y. C. / Juneja, J. S. / Wang, P.-I. / Lu, T.-M. / Bakhru, H. / Chan, L. / Law, S. B. / Yong, C. / Chen, Z. / Xu, S. et al. | 2006
- G475
-
The Influences of Contact Interfaces Between the Indium Tin Oxide-Based Contact Layer and GaN-Based LEDsHsu, C.-Y. / Lan, W.-H. / Wu, Y. S. et al. | 2006
- G479
-
Shallow and Thermally Stable Ohmic Contacts to p-InAspWang, S. H. / Lysczek, E. M. / Liu, B. / Robinson, J. A. / Mohney, S. E. et al. | 2006
- G483
-
Investigation of Wet Etching Properties and Annealing Effects of Hf-Based High-k MaterialsChen, J. / Yoo, W. J. / Chan, D. S. H. et al. | 2006
- G492
-
High-Reliability Ta~2O~5 Metal-Insulator-Metal Capacitors with Cu-Based ElectrodesTsai, K.-C. / Wu, W.-F. / Chao, C.-G. / Kuan, C.-P. et al. | 2006
- G498
-
Effect of Temperature on Novel InAlGaP/GaAs/InGaAs Camel-Gate Pseudomorphic High-Electron-Mobility TransistorsLin, Y.-S. / Hsieh, Y.-L. et al. | 2006
- G502
-
Estimating Temperature Dependence of Generation Lifetime Extracted from Drain Current Transients ModelMartino, J. A. / Galeti, M. / Rafi, J. M. / Mercha, A. / Simoen, E. / Claeys, C. et al. | 2006
- G506
-
Epitaxial Growth of CoSi~2 Layer on a Si(100) Substrate Using a CoN~x Interlayer Deposited by Reactive SputteringKim, S. I. / Lee, S. R. / Park, J. H. / Ahn, B. T. et al. | 2006
- G511
-
Interface Properties of Room-Temperature-Grown Oxides on Si~0~.~1~5Ge~0~.~8~5 LayersDas, R. / Bera, M. K. / Chakraborty, S. / Saha, A. R. / Maiti, C. K. et al. | 2006
- H89
-
Batch Fabrication and Characterization of Micro-Thin-Film Thermocouples Embedded in MetalDatta, A. / Choi, H. / Li, X. et al. | 2006
- H94
-
Properties of Selective Gas-Sensitive SnO~2/RuO~2/Pt Composition and Detection MechanismTeterycz, H. / Licznerski, B. W. et al. | 2006
- H105
-
Effect of pH and Lattice Distortion on the Luminescence of (Y,Gd)BO~3:Eu^3^+ Phosphor Prepared by the Coprecipitation MethodLee, G.-H. / Kang, S. et al. | 2006
-
The Role of Poly(N-vinyl-2-pyrrollidone) in Ag-Pd Nanoparticles Formation and Its Application to Electroless DepositionYang, C.-C. et al. | 2006
-
Electrochemical Quartz Crystal Microbalance Study of Copper Electrochemical Reaction in Acid Medium Containing ChloridesGiménez-Romero, D. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Models for the Chemical Vapor Deposition of Tin Oxide from MonobutyltintrichlorideChae, Y. et al. | 2006
-
Physical and Analytical Electrochemistry - Electrochromic Devices Based on Copolymers of 2,5-Dimethoxyaniline-DiphenylamineYang, C.-H. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Dissolution Behavior of Al2CuMg (S Phase) in Chloride and Chromate Conversion Coating SolutionsYoon, Y. et al. | 2006
-
Dielectric Science and Materials - Characterization of PbxPty Alloy Formation on a Pt Substrate during Liquid-Delivery MOCVD of Pb(Zr,Ti)O3 Thin FilmsZhao, J.S. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Analysis of the Leakage Current Origin in Thin Strain Relaxed Buffer SubstratesEneman, G. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Bias-Temperature Stability of Ti-Si-N-O FilmsEe, Y.C. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Characterization of Amorphous LiNiVO4 Thin-Film Anode Grown by Pulsed Laser DepositionTang, S.B. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrochemical Etching Using Surface-Sulfonated Electrodes in Ultrapure WaterIchii, Y. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrochromic Nanostructured Tungsten Oxide Films by Sol-gel: Structure and Intercalation PropertiesDeepa, M. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Electrochemical Behavior of Hot-Rolled 304 Stainless Steel during Chemical Pickling in HCl-Based ElectrolytesLi, L.-F. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Effects of Chrome Contamination on the Performance of La0.6Sr0.4Co0.2Fe0.8O3 Cathode Used in Solid Oxide Fuel CellsKim, J.Y. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Inhibiting Effects of Nitrates on the Passive Film Breakdown of Alloy 22 in Chloride EnvironmentsGray, J.J. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrodeposited Biaxially Textured Buffer layer for YBa2Cu3O7-d(YBCO) Superconductor Oxide FilmBhattacharya, R. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Isolated Carbon Confinement Methodology for Ultrathin Boron Profiles in Strained Layers of Silicon GermaniumEnicks, D. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrochemical Synthesis and Magnetic Properties of CoFe2O4 Nanowire ArraysCarlier, D. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Effects of Plasma Treatments on Ultralow-k Dielectric Film and Ta Barrier Properties in Cu Damascene ProcessingKumar, R. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Study of the Carry-over Layer and Its Importance for Wet Processing of Semiconductor SubstratesFyen, W. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Effect of Current Density on Microstructure and Properties of Bulk Nanocrystalline Ni-Co Alloys Prepared by JEDQiao, G. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Effect of Temperature on Novel InAlGaP-GaAs-InGaAs Camel-Gate Pseudomorphic High-Electron-Mobility TransistorsLin, Y.-S. et al. | 2006
-
Physical and Analytical Electrochemistry - Physical and Electrochemical Characterizations of PtRu-C Catalysts by Spray Pyrolysis for Electrocatalytic Oxidation of methanolXue, X. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Metal Wet Etch Issues and Effects in Dual Metal Gate Stack IntegrationHussain, M.M. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Evaluation of Atomic Layer Deposited NbN and NbSiN as Metal Gate MaterialsHoornick, N.Van et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Tunneling Relaxation of Photocurrent from Passive Films on Stainless SteelSudesh, T.L. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Electrokinctic-Current Corrosion - II Lubricated SystemsBeck, T.R. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Modeling Copper CMP Removal Rate Dependency on Wafer Pressure, Velocity, and Dissolved Oxygen ConcentrationDeNardis, D. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Improvements of Dispersion Homogeneity and Cell Performance of Aqueous-Processed LiCoO2 Cathodes by Using Dispersant of PAA-NH4Li, C.-C. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Charge-Transfer Reaction at the Lithium Phosphorus Oxynitride Glass Electrolyte-Lithium Manganese Oxide Thin-Film Interface and Its Stability on CyclingIriyama, Y. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Chemical Stability of LiNaSO4 Electrolyte during Operation in a H2-O2 Fuel CellFeng, Y. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Performance of an Intermediate-Temperature Fuel Cell Using a Proton-Conducting Sn0.9In0.1P2O7 ElectrolyteHeo, P. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - In-Plane Effects in Large-Scale PEFCs - II The Influence of Cooling Strategy on Cell PerformanceFreunberger, S.A. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Electrokinetic-Current Corrosion - I ValvesBeck, T.R. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Ti-Au Ohmic Contacts to Al-Doped n-ZnO Grown by Pulsed Laser DepositionChen, J.J. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Shallow and Thermally Stable Ohmic Contacts to p-InAsPWang, S.H. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrodeposition of Ni from Low-Temperature Sulfamate Electrolytes - II Properties and Structure of ElectrodepositsGoods, S.H. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrodeposition of Gold on Silicon Nucleation and Growth PhenomenaHuang, Q. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Effects of Deposition Conditions on the Morphology of Zinc Deposits from Alkaline Zincate SolutionsWang, R.Y. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Real-Time Imaging of Liquid Water in an Operating Proton Exchange Membrane Fuel CellHickner, M.A. et al. | 2006
-
Electrochemical Synthesis and Engineering - Characterization of Hybrid Poly(acriflavine)-FAD Films and Their Electrocatalytic Properties with NAD+ and NADHLin, K.-C. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Studies on Iron (Fe3+-Fe2+)-Complex-Bromine (Br2-Br-) Redox Flow Cell in Sodium Acetate SolutionWen, Y.H. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Effects of Electrical Bias Stress on the Performance of ZnO-Based TFTs Fabricated by RF Magnetron SputteringNavamathavan, R. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Mechanism of Copper Removal from SiO2 Surfaces by Hydrogen Cyanide Aqueous SolutionsFujiwara, N. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - High-Reliability Ta2O5 Metal-Insulator-Metal Capacitors with Cu-Based ElectrodesTsai, K.-C. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Interface Properties of Room-Temperature-Grown Oxides on Si0-15Ge0.85 LayersDas, R. et al. | 2006
-
Dielectric Science and Materials - Electrical Characteristics of Liquid-Phase-Deposited TiO2 Films on GaAs Substrate with (NH4)2Sx TreatmentLee, M.-K. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Low-Temperature LPCVD of Polycrystalline GexSi1-x Films with High Germanium ContentKovalgin, A. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Effects of Slurry Flow Rate and Pad Conditioning Temperature on Dishing, Erosion, and Metal Loss during Copper CMPMudhivarthi, S. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Oxidation Behavior of Tungsten in H2O2- and Fe(NO3)3-Base Aqueous SlurriesLim, G. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - In Situ Real-Time Infrared Spectroscopy Study of Formation of Porous Anodic Alumina on SiKimura, Y. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Using Multi-Pseudocriteria and Fuzzy Outranking Relation Analysis for Material Selection of Bipolar Plates for PEFCsShanian, A. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrochemical Polymerization of Pyrrole into Nanostructured p-Type Porous SiliconHarraz, F.A. et al. | 2006
-
Electrochemical Synthesis and Engineering - Model of Multiple Metal Electrodeposition in Porous ElectrodesPilone, D. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Structure Characterization and Lithiation Mechanism of Nongraphitized Carbon for Lithium Secondary BatteriesNagao, M. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Anode-Shielded, Sputter-Deposited Nanocrystalline Sn Thin-Film Anodes for Lithium-Ion BatteriesChiu, K.-F. et al. | 2006
-
Physical and Analytical Electrochemistry - Evaluation of Different Voltammetric Techniques in the Determination of Amoxicillin Using a Carbon Paste Electrode Modified with (N,N'-ethylenebis(salicylidencaminato)) oxovanadium(IV)Bergamini, M.F. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Stochastic Microstructure Reconstruction and Direct Numerical Simulation of the PEFC Catalyst LayerMukherjee, P.P. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Detection of Membrane Drying, Fuel Cell Flooding, and Anode Catalyst Poisoning on PEMFC Stacks by Electrochemical Impedance SpectroscopyCanut, J.-M.Le et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Oxygen Reduction Reaction on Ruthenium and Rhodium Nanoparticles Modified with Selenium and SulfurCao, D. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - A Physical Model for Anticorrosion Behavior of Duplex CoatingsGourbeyre, Y. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Effects of Disk Design and Kinematics of Conditioners on Process Hydrodynamics during Copper CMPLi, Z. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Area-Selective AID of Titanium Dioxide Using Lithographically Defined Poly(methyl methacrylate) FilmsSinha, A. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Analysis of )Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMPRemsen, E.E. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Dye-Sensitized Solar Cells Fabricated by Electrospray Coating Using TiO2 Nanocrystal Dispersion SolutionFujimoto, M. et al. | 2006
-
Sensors and Displays: Principles, Materials, and Processing - Properties of Selective Gas-Sensitive SnO2-RuO2-Pt Composition and Detection MechanismTeterycz, H. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Electrodeposition of Ni from Low-Temperature Sulfamate Electrolytes - I Electrochemistry and Film StressKelly, J.J. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Improvement of SOFC Performance Using a Microtubular, Anode-Supported SOFCSuzuki, T. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Hafnium-Doped Tantalum Oxide High-k Gate DielectricsLu, J. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Anodic and Electroless Etching of Germanium in Alkaline Hexacyanoferrate SolutionsHuygens, I.M. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Selective Deposition of Cu Interconnects by Prepatterned Ta FilmYang, C.-H. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - The influences of Contact Interfaces Between the Indium Tin Oxide-Based Contact Layer and GaN-Based LEDsHsu, C.-Y. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Polarization Behavior of SDC Cathode with Highly Dispersed Ni Catalysts for Solid Oxide Electrolysis CellsOsada, N. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Investigation of Wet Etching Properties and Annealing Effects of Hf-Based High-k MaterialsChen, J. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Measurement of LiClO4 Diffusion Coefficient in Propylene Carbonate by Moiré PatternNishikawa, K. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Effects of Lead on Tin Whisker Elimination - Efforts toward Lead-Free and Whisker-Free Electrodeposition of TinZhang, W. et al. | 2006
-
Dielectric Science and Materials - Low Temperature (< 100(degree)C) Deposition of Aluminum Oxide Thin Films by ALD with O3 as OxidantKim, S.K. et al. | 2006
-
Corrosion, Passivation, and Anodic Films - Suppression of Field Crystallization of Anodic Niobia by OxygenHabazaki, H. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Electrical and Physical Analysis of MoTa Alloy for Gate Electrode ApplicationsChen, B. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Estimating Temperature Dependence of Generation Lifetime Extracted from Drain Current Transients - ModelMartino, J.A. et al. | 2006
-
Sensors and Displays: Principles, Materials, and Processing - Effect of pH and lattice Distortion on the Luminescence of (Y,Gd)BO3:Eu3+ Phosphor Prepared by the Coprecipitation MethodLee, G.-H. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - GDC-Impregnated (La0.75Sr0.25)(Cr0.5 Mn0.5)O3 Anodes for Direct Utilization of Methane in Solid Oxide Fuel CellsJiang, S.P. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Water Adsorption and Storage Characteristics of Optimized LiCoO2 and LiNi1-3Co1-3Mn1-3O2 Composite Cathode Material for Li-Ion CellsMijung, N. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Carbonaceous Materials as Proton Conductors - I Fullerenes and Polyaromatic HydrocarbonsTasaki, K. et al. | 2006
-
Electrochemical-Chemical Deposition and Etching - Ultraviolet irradiation on Hydrogenated Amorphous Carbon Films Deposited by Atmospheric Dielectric Barrier DischargeKugimiya, T. et al. | 2006
-
Batteries, Fuel Cells, and Energy Conversion - Effect of Electrode Parameters on LiFePO4 CathodesYu, D.Y.W. et al. | 2006
-
Semiconductor Devices, Materials, and Processing - Epitaxial Growth of CoSi2 Layer on a Si(100) Substrate Using a CoNx Interlayer Deposited by Reactive SputteringKim, S.I. et al. | 2006
-
Sensors and Displays: Principles, Materials, and Processing - Batch Fabrication and Characterization of Micro-Thin-Film Thermocouples Embedded in MetalDatta, A. et al. | 2006