Advanced CMOS device technologies for 45nm node and below (English)
- New search for: Veloso, A.
- New search for: Veloso, A.
- New search for: Hoffmann, T.
- New search for: Lauwers, A.
- New search for: Yu, H.
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- New search for: Augendre, E.
- New search for: Kubicek, S.
- New search for: Verheyen, P.
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In:
Science and technology of advanced materials
;
8
, 3
; 214-218
;
2007
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ISSN:
- Article (Journal) / Print
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Title:Advanced CMOS device technologies for 45nm node and below
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Contributors:Veloso, A. ( author ) / Hoffmann, T. / Lauwers, A. / Yu, H. / Severi, S. / Augendre, E. / Kubicek, S. / Verheyen, P. / Collaert, N. / Absil, P.
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Published in:Science and technology of advanced materials ; 8, 3 ; 214-218
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Publisher:
- New search for: Elsevier Science
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Place of publication:Oxford
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Publication date:2007
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ISSN:
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ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 51.00 / 51.00
- Further information on Basic classification
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Classification:
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Source:
Table of contents – Volume 8, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 135
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International 21st Century COE Symposium on “Atomistic Fabrication Technology”Katsuyoshi Endo et al. | 2007
- 137
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Formation of silicon dioxide layers at low temperatures (150–400 °C) by atmospheric pressure plasma oxidation of siliconH. Kakiuchi / H. Ohmi / M. Harada / H. Watanabe / K. Yasutake et al. | 2007
- 137
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Formation of silicon dioxide layers at low temperatures (150-400degreeC) by atmospheric pressure plasma oxidation of siliconKakiuchi, H. / Ohmi, H. / Harada, M. / Watanabe, H. / Yasutake, K. et al. | 2007
- 142
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Heavy arsenic doping of silicon grown by atmospheric pressure selective epitaxial chemical vapor depositionTetsuya Ikuta / Yuki Miyanami / Shigeru Fujita / Hayato Iwamoto / Shingo Kadomura / Takayoshi Shimura / Heiji Watanabe / Kiyoshi Yasutake et al. | 2007
- 146
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Uniaxial tensile and shear deformation tests of gold–tin eutectic solder filmTakahiro Namazu / Hideki Takemoto / Hiroshi Fujita / Shozo Inoue et al. | 2007
- 153
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Manipulating mechanics and chemistry in precision optics finishingStephen D. Jacobs et al. | 2007
- 158
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Development of numerically controlled local wet etchingKazuya Yamamura et al. | 2007
- 162
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Catalyst-referred etching of siliconHideyuki Hara / Yasuhisa Sano / Kenta Arima / Keita Yagi / Junji Murata / Akihisa Kubota / Hidekazu Mimura / Kazuto Yamauchi et al. | 2007
- 166
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Fabrication of damascene Cu wirings using solid acidic catalystKeita Yagi / Junji Murata / Hideyuki Hara / Yasuhisa Sano / Kazuto Yamauchi / Hidekazu Goto et al. | 2007
- 170
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Removal properties of low-thermal-expansion materials with rotating-sphere elastic emission machiningMasahiko Kanaoka / Hideo Takino / Kazushi Nomura / Yuzo Mori / Hidekazu Mimura / Kazuto Yamauchi et al. | 2007
- 173
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Precision grinding of microarray lens molding die with 4-axes controlled microwheelYuji Yamamoto / Hirofumi Suzuki / Takashi Onishi / Tadashi Okino / Toshimichi Moriwaki et al. | 2007
- 177
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Surface gradient integrated profiler for X-ray and EUV opticsYasuo Higashi / Yuichi Takaie / Katsuyoshi Endo / Tatsuya Kume / Kazuhiro Enami / Kazuto Yamauchi / Kazuya Yamamura / Yasuhisa Sano / Kenji Ueno / Yuzo Mori et al. | 2007
- 181
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Observation of nanostructure by scanning near-field optical microscope with small sphere probeYasushi Oshikane / Toshihiko Kataoka / Mitsuru Okuda / Seiji Hara / Haruyuki Inoue / Motohiro Nakano et al. | 2007
- 186
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Ab initio simulations of the mechanics and electrical transport of Pt nanowiresJose A. Torres et al. | 2007
- 191
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First-principles molecular dynamics study of Formula Not Shown interfacesTakeuchi, K. / Yanagisawa, S. / Morikawa, Y. et al. | 2007
- 191
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First-principles molecular dynamics study of Al/Alq3 interfacesKousuke Takeuchi / Susumu Yanagisawa / Yoshitada Morikawa et al. | 2007
- 191
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First-principles molecular dynamics study of interfacesTakeuchi, Kousuke et al. | 2007
- 196
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Electronic structures of peanut-shaped fullerene tubesHiroyuki Nakayama / Tomoya Ono / Hidekazu Goto / Kikuji Hirose et al. | 2007
- 200
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First-principles study of electronic structure of deformed carbon nanotubesKazuchika Iwami / Hidekazu Goto / Kikuji Hirose / Tomoya Ono et al. | 2007
- 204
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First-principles study on electronic structure of Si/SiO2 interface—Effect of interface defects on local charge densityKatsuhiro Kutsuki / Tomoya Ono / Kikuji Hirose et al. | 2007
- 208
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Nanohot embossing using curved stage to replicate antireflection nanostructures onto light guideAkihiro Funamoto / Sangyoru Lee / Yasuhiro Kawabata / Makoto Ohira / Daido Uchida / Shigeru Aoyama / Mizuho Morita et al. | 2007
- 214
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Advanced CMOS device technologies for 45 nm node and belowA. Veloso / T. Hoffmann / A. Lauwers / H. Yu / S. Severi / E. Augendre / S. Kubicek / P. Verheyen / N. Collaert / P. Absil et al. | 2007
- 219
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Interface reactions at TiN/HfSiON gate stacks: Dependence on the electrode structure and deposition methodShiniti Yoshida / Yasumasa Watanabe / Yuuki Kita / Takayoshi Shimura / Heiji Watanabe / Kiyoshi Yasutake / Yasushi Akasaka / Yasuo Nara / Keisaku Yamada et al. | 2007
- 225
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Degradation of magnetic tunnel junctions with thin barrierMihara, Tadashi et al. | 2007
- 225
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Degradation of magnetic tunnel junctions with thin Formula Not Shown barrierMihara, T. / Kamakura, Y. / Morifuji, M. / Taniguchi, K. et al. | 2007
- 225
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Degradation of magnetic tunnel junctions with thin AlOx barrierTadashi Mihara / Yoshinari Kamakura / Masato Morifuji / Kenji Taniguchi et al. | 2007