Improved Poly Gate Engineering for 65 nm Low Power CMOS Technology (English)
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In:
Journal of the Electrochemical Society
;
157
, 1
; H38
;
2010
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ISSN:
- Article (Journal) / Print
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Title:Improved Poly Gate Engineering for 65 nm Low Power CMOS Technology
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Contributors:
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Published in:Journal of the Electrochemical Society ; 157, 1 ; H38
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Publisher:
- New search for: Electrochemical Society
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Place of publication:Pennington, NJ
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Publication date:2010
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Table of contents – Volume 157, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Modeling the Current Distribution in Thin Electrolyte Films with Applications to Crevice CorrosionBahlawane, N et al. | 2010
- A1
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Study of Capacity Fade of Lithium-Ion Polymer Rechargeable Batteries with Continuous CyclingMoss, P.L. / Au, G. / Plichta, E.J. / Zheng, J.P. et al. | 2010
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Semiempirical Analysis of Time-Dependent Elementary Polarizations in Electrochemical CellsWu, H et al. | 2010
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Oxidation Resistance of Bare and Pt-Coated Electrically Conducting Diamond Powder as Assessed by Thermogravimetric AnalysisKawaguchi, M et al. | 2010
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Kinetics of Electrochemical Insertion and Extraction of Lithium Ion at SiOXu, W et al. | 2010
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Positive Effects of E-Beam Irradiation in Inorganic Particle Based Separators for Lithium-Ion BatteryPark, C-M et al. | 2010
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Preparation and Capacitive Properties of a Carbonaceous Material Containing NitrogenKumar, B et al. | 2010
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Composite Silicon Nanowire Anodes for Secondary Lithium-Ion CellsTang, X et al. | 2010
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Electrochemical Characteristics of TiSb2 and Sb/TiC/C Nanocomposites as Anodes for Rechargeable Li-Ion BatteriesKomaba, S et al. | 2010
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A Solid-State, Rechargeable, Long Cycle Life Lithium-Air BatteryBhatt, A I et al. | 2010
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Enhancing Lithium Storage Capacity of ZnO Anodes Through Ni3ZnC0.7 IncorporationJung, Y S et al. | 2010
- A60
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Electrochemical Insertion of Li and Na Ions into Nanocrystalline Fe~3O~4 and alpha -Fe~2O~3 for Rechargeable BatteriesKomaba, S. / Mikumo, T. / Yabuuchi, N. / Ogata, A. / Yoshida, H. / Yamada, Y. et al. | 2010
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Application of the N-propyl-N-methyl-pyrrolidinium Bis(fluorosulfonyl)imide RTIL Containing Lithium Bis(fluorosulfonyl)imide in Ionic Liquid Based Lithium BatteriesChen, S et al. | 2010
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Enhanced Stability of LiCoO2 Cathodes in Lithium-Ion Batteries Using Surface Modification by Atomic Layer DepositionBoovaragavan, V et al. | 2010
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Platinum-Alloy Cathode Catalyst Degradation in Proton Exchange Membrane Fuel Cells: Nanometer-Scale Compositional and Morphological ChangesKim, J H et al. | 2010
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Continuum Representation for Simulating Discrete Events of Battery OperationGasda, M D et al. | 2010
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Multiwalled Carbon Nanotube Electrodes for Electrical Double Layer Capacitors with Ionic Liquid Based Gel Polymer ElectrolytesYamada, Y et al. | 2010
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Investigation of Lithium Tetrafluorooxalatophosphate [LiPF4(C2O4)] as a Lithium-Ion Battery Electrolyte for Elevated Temperature PerformanceKim, M et al. | 2010
- B1
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Modeling of PEMFC Transients with Finite-Rate Phase-Transfer ProcessesWu, H. / Berg, P. / Li, X. et al. | 2010
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Zinc Anode for Direct Borohydride Fuel CellsIshihara, T et al. | 2010
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The Multiprocess Degradation of PEMFC Performance Due to Sulfur Dioxide Contamination and Its RecoveryHsieh, Y-F et al. | 2010
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Mediation at High Potentials for the Reduction of Oxygen to Water by Cobalt Porphyrin-Quinone Systems in Porous Aerogel Carbon ElectrodesSur, R et al. | 2010
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Observations of Transient Flooding in a Proton Exchange Membrane Fuel Cell Using Time-Resolved Neutron RadiographyOlson, T S et al. | 2010
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Pulse Electrodepositions of PtRu on Large-Area Carbon Nanotubes for Enhancement of Methanol Electro-OxidationHolme, T P et al. | 2010
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In Situ Measurements of Water Vapor Partial Pressure and Temperature Dynamics in a PEM Fuel CellGasda, M D et al. | 2010
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Bifunctional Oxygen Reduction Reaction Mechanism on Non-Platinum Catalysts Derived from Pyrolyzed PorphyrinsSwamy, T et al. | 2010
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Interpretation of Low Temperature Solid Oxide Fuel Cell Electrochemical Impedance SpectraApblett, C A et al. | 2010
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Sputter-Deposited Pt/CrN Nanoparticle PEM Fuel Cell Cathodes: Limited Proton Conductivity Through Electrode DewettingWang, X et al. | 2010
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Characterization of Interfacial Structure in PEFCs: Water Storage and Contact Resistance ModelIkeda, S et al. | 2010
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Direct Glucose Fuel Cell: Noble Metal Catalyst Anode Polymer Electrolyte Membrane Fuel Cell with Glucose FuelRodríguez, M A et al. | 2010
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Kinetic Monte Carlo Simulation of AC Impedance on the Cathode Side of a Solid Oxide Fuel CellBerger, S et al. | 2010
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Electrochemical Synthesis of CuIn(Se,S)2 Layer for Thin-Film Solar Cell with a Superstrate ConfigurationMistkawi, N G et al. | 2010
- B104
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Effects of cathode inlet relative humidity on PEMFC durability during startup-shutdown cyclingKim, Jae-Hong / Cho, Eun-Ae / Jang, Jong-Hyun / Kim, Hyoung-Juhn / Lim, Tae-Hoon / Oh, In-Hwan / Ko, Jae-Jun / Oh, Seung-Chan et al. | 2010
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Effects of Cathode Inlet Relative Humidity on PEMFC Durability during Startup-Shutdown Cycling - I Electrochemical StudyOishi, N et al. | 2010
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Pore Formation by In Situ Etching of Nanorod PEM Fuel Cell ElectrodesSantos, D M F et al. | 2010
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Development of a Durable PEMFC Start-Up Process by Applying a Dummy Load - II Diagnostic StudyJin, Y et al. | 2010
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Evaluation of Metal Supported Ceria Based Solid Oxide Fuel Cell Fabricated by Wet Powder Spray and SinteringTakeuchi, N et al. | 2010
- B130
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Suppressed Carbon Deposition Behavior in Nickel/Yittria-Stablized Zirconia Anode with SrZr~0~.~9~5Y~0~.~0~5O~3~-~ ~a~l~p~h~a~ in Dry Methane FuelJin, Y. / Yasutake, H. / Yamahara, K. / Ihara, M. et al. | 2010
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Modeling and Investigation of Carbon Loss on the Cathode Electrode during PEMFC OperationKim, M S et al. | 2010
- B141
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Mixed Oxide Ion and Hole Conductivity in Pr~2~-~ ~a~l~p~h~a~ Ni~0~.~7~6~-~xCu~0~.~2~4Ga~xO~4~+~ ~d~e~l~t~a~ MembraneIshihara, T. / Sirikanda, N. / Nakashima, K. / Miyoshi, S. / Matsumoto, H. et al. | 2010
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Photocatalytically Generated Bimetallic (Pt-Au/C-TiO2) Electrocatalysts for Polymer Electrolyte Fuel Cell ApplicationsCrabb, K M et al. | 2010
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Grain Growth Enhancement and Ga Distribution of Cu(In0.7Ga0.3)Se2 Film Using Cu2Se Layer on Cu-In-Ga Metal PrecursorKurak, K A et al. | 2010
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Crystal Structure, Oxygen Nonstoichiometry, and Conductivity of Mixed Ionic-Electronic Conducting Perovskite Composites with CeO2Brosha, E L et al. | 2010
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Effects of Ion Irradiation on the Performance of Solid Oxide Fuel CellsZhai, Y et al. | 2010
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Selenium: A Nonprecious Metal Cathode Catalyst for Oxygen ReductionElbaz, L et al. | 2010
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Measurement of H2S Crossover Rates in Polymer Fuel Cell Membranes Using an Ion-Probe TechniqueHickner, M A et al. | 2010
- C1
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Passivation and Depassivation of Alloy 22 in Acidic Chloride SolutionsRodriguez, M.A. / Carranza, R.M. / Rebak, R.B. et al. | 2010
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Influence of Water Content on the Growth of Anodic TiO2 Nanotubes in Fluoride-Containing Ethylene Glycol ElectrolytesCong, H et al. | 2010
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Corrosion Behavior of Copper Thin Films in Organic HF-Containing Cleaning Solution for Semiconductor ApplicationsAgarwal, A S et al. | 2010
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Corrosion of Cu under Highly Corrosive EnvironmentsLi, X et al. | 2010
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Use of Coupled Multielectrode Arrays to Elucidate the pH Dependence of Copper Pitting in Potable WaterLee, H-B-R et al. | 2010
- D1
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Triangular GaAs Microcones and Sharp Tips Prepared by Combining Electroless and Electrochemical EtchingLi, X. / Um, H.-D. / Jung, J.-Y. / Seo, H.-S. / Lee, J.-H. et al. | 2010
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Electrochemical Fabrication of TiO2-Au NanocompositesHan, S-C et al. | 2010
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High Quality Area-Selective Atomic Layer Deposition Co Using Ammonia Gas as a ReactantHenderson, L B et al. | 2010
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Structure, Electrical Properties, and Surface Reactivity of CVD-Made Functional Complex OxidesKukli, K et al. | 2010
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Infinite Etch Selectivity during Etching of SiON with an Extreme Ultraviolet Resist Pattern in Dual-Frequency Capacitively Coupled PlasmasOzaydin-Ince, G et al. | 2010
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Effect of Phosphorus and Carbon Incorporation in Amorphous Cobalt Films Prepared by Chemical Vapor DepositionKo, J W et al. | 2010
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High Temperature Atomic Layer Deposition of Ruthenium from N,N-Dimethyl-1-ruthenocenylethylamineElhajj, J et al. | 2010
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Thermal Stability of Acrylic/Methacrylic Sacrificial Copolymers Fabricated by Initiated Chemical Vapor DepositionSuzuki, Y et al. | 2010
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Electroless Gold Plating on Aluminum Patterned Chips for CMOS-Based Sensor ApplicationsOkayama, H et al. | 2010
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Electrodeposition of Ni-P Alloy-Multiwalled Carbon Nanotube Composite FilmsYokoshima, T et al. | 2010
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Ordering and Disordering of Macropores Formed in Prepatterned p-Type SiliconArmini, S et al. | 2010
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Formation of Hexagonal Pyramids and Pits on V-/VI-Polar and III-/II-Polar GaN/ZnO Surfaces by Wet EtchingLedesma-Garcia, J et al. | 2010
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Anisotropic Deposition of Localized Electroless Nickel for Preferential Bridge ConnectionToh, S L et al. | 2010
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Materials Engineering for Future Interconnects: "Catalyst-Free" Electroless Cu Deposition on Self-Assembled Monolayer Alternative BarriersPeng, J et al. | 2010
- E1
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Electrochemical Synthesis of Pt Nanoparticles Inside of PAMAM Dendrimers for Oxygen ReductionLedesma-Garcia, J. / Arriaga, L.G. / Chapman, T.W. / Velazquez-Castillo, R. / Godinez, L.A. et al. | 2010
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Optimization of AC Electrochemical Etching for Fabricating Tungsten Nanotips with Controlled Tip ProfileSantos, D M F et al. | 2010
- F1
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Cyclic Voltammetry of ZrO~2 Powder in the Metallic Cavity Electrode in Molten CaCl~2Peng, J. / Li, G. / Chen, H. / Wang, D. / Jin, X. / Chen, G.Z. et al. | 2010
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DME Dissociation Reaction on Platinum Electrode Surface: A Quantitative Kinetic Analysis by In Situ IR SpectroscopyHardy, A et al. | 2010
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Chronopotentiometric Investigation of Borohydride Oxidation at a Gold ElectrodeClima, S et al. | 2010
- G1
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Atomic Layer Deposition of Strontium Titanate Films Using Sr(^tBu~3Cp)~2 and Ti(OMe)~4Popovici, M. / Van Elshocht, S. / Menou, N. / Swerts, J. / Pierreux, D. / Delabie, A. / Brijs, B. / Conard, T. / Opsomer, K. / Maes, J.W. et al. | 2010
- G7
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Study of the Surface Reactions in ALD Hafnium AluminatesNyns, L. / Delabie, A. / Pourtois, G. / Van Elshocht, S. / Vinckier, C. / De Gendt, S. et al. | 2010
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Properties of Ultrathin High Permittivity (Nb1-xTax)2O5 Films Prepared by Aqueous Chemical Solution DepositionNyns, L et al. | 2010
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Dielectric Response of Ta2O5, Nb2O5, and NbTaO5 from First-Principles InvestigationsJung, J H et al. | 2010
- G26
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Impact of Precursor Chemistry and Process Conditions on the Scalability of ALD HfO~2 Gate DielectricsSwerts, J. / Peys, N. / Nyns, L. / Delabie, A. / Franquet, A. / Maes, J.W. / Van Elshocht, S. / De Gendt, S. et al. | 2010
- H1
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Fabrication of a Uniform Low Temperature Poly-Si TFT Array by Optimized Field Aided Lateral CrystallizationJung, J.H. / Lee, K.J. / Choi, D.K. / Shin, J.H. / You, J.S. / Kim, Y.B. et al. | 2010
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Effects of Postdeposition Annealing in Argon Ambient on Metallorganic Decomposed CeO2 Gate Spin Coated on SiliconMadhava Rao, M V et al. | 2010
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High Quality Ge Virtual Substrates on Si Wafers with Standard STI PatterningLuo, G-L et al. | 2010
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Asymmetric Negative Bias Temperature Instability Degradation of Poly-Si TFTs under Static StressHu, C-Y et al. | 2010
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Ge Epitaxial Growth on GaAs Substrates for Application to Ge-Source/Drain GaAs MOSFETsXu, Y K et al. | 2010
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A Numerical Study of Thermal and Electrical Effects in a Vertical LED ChipLiu, L et al. | 2010
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Improved Poly Gate Engineering for 65 nm Low Power CMOS TechnologyVerde, M et al. | 2010
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Photoluminescence Properties of Anodic Si Layers Formed in HF/Oxidant ElectrolytesQuah, H J et al. | 2010
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Optical Properties of Blue-Emitting CexSi6-zAlz-xOz+1.5xN8-z-x for White Light-Emitting DiodesRemashan, K et al. | 2010
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Electrophoretic Deposition of Flake-Shaped ZnO NanoparticlesKawakita, M et al. | 2010
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Enhanced Performance of MOCVD ZnO TFTs on Glass Substrates with Nitrogen-Rich Silicon Nitride Gate DielectricKim, Y-H et al. | 2010
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Orientation Dependence of Semiconductor Properties in Anatase TiO2 Polycrystalline AggregatesRyan, E T et al. | 2010
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Fullerene and Pentacene as a Pure Organic Connecting Layer in Tandem Organic Light Emitting DevicesWei, X et al. | 2010
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Increase in the Adsorption Density of Anionic Molecules on Ceria for Defect-Free STI CMPCho, C-Y et al. | 2010
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Silane Decomposition on Cu Interconnects Inhibited by AmmoniaNam, S et al. | 2010
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Investigation on Silicon on Insulator Fabricated by Separation by Implanted Oxygen Layer TransferLee, D et al. | 2010
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Green Light-Emitting Diodes on Semipolar {1122} Microfacets Grown by Selective Area EpitaxyZukalová, M et al. | 2010
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Effects of Poor Solvent for Solution-Processing Passivation of Organic Field Effect TransistorsShea-Rohwer, L E et al. | 2010
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Characterization of Nanometer-Scale Gap FormationLai, C-S et al. | 2010
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Organized Mesoporous TiO2 Films Stabilized by Phosphorus: Application for Dye-Sensitized Solar CellsChang, S J et al. | 2010
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Strain Stability and Carrier Mobility Enhancement in Strained Si on Relaxed SiGe-on-InsulatorAndersen, P J et al. | 2010
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Effect of Free Radical Activation for Low Temperature Si to Si Wafer BondingDong, G et al. | 2010
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The Characteristics of n- and p-Channel Poly-Si Thin-Film Transistors with Fully Ni-Salicided S/D and Gate StructureLoo, R et al. | 2010
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Microstructural Effects during Chemical Mechanical Planarization of CopperLee, W-H et al. | 2010
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Co-doping Effect of Ca and N on the Structure and Properties of CuAlO2 Thin FilmWeng, C-F et al. | 2010
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Bis-(3-sodiumsulfopropyl disulfide) Decomposition with Cathodic Current Flowing in a Copper-Electroplating BathHwu, F-S et al. | 2010
- J1
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Increasing the Luminescent Quantum Yield of CdS Nanoparticles Having Broadband EmissionShea-Rohwer, L.E. / Martin, J.E. / Kelley, D.F. et al. | 2010
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Fluorine Incorporation and Thermal Treatment on Single and Stacked Si3N4 Membranes for ISFET/REFET ApplicationLin, Y-W et al. | 2010
- K1
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Growth of ZnSe~1~-~xTe~x Nanotips and the Fabrication of ZnSe~1~-~xTe~x Nanotip-Based PhotodetectorChang, S.J. / Hsiao, C.H. / Hung, S.C. / Chih, S.H. / Lan, B.W. / Wang, S.B. / Chang, S.P. / Cheng, Y.C. / Li, T.C. / Huang, B.R. et al. | 2010
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Phytic Acid-Based Layer-by-Layer Assembly for Fabrication of Mesoporous Gold Film and Its Biosensor ApplicationBoise, Craig M et al. | 2010
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Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation LayerJung, Y R et al. | 2010
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Preparation and Electrochemical Performance of Externally Doped Sulfonated Polyaniline/Multiwalled Carbon Nanotube CompositesNewton, Michael A et al. | 2010
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Electrochemical Synthesis and Engineering - Electrochemical Synthesis of Pt Nanoparticles Inside of PAMAM Dendrimers for Oxygen ReductionZhang, Y et al. | 2010
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Physical and Analytical Electrochemistry - Cyclic Voltammetry of ZrO2 Powder in the Metallic Cavity Electrode in Molten CaCl2Popovici, M et al. | 2010
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Publisher's Note: (Y,Gd)BO3:Eu3+ and Y(V,P)O4:Eu3+ Thin-Film Phosphors for Use in Transparent Plasma Display Panels [J. Electrochem. Soc., 156, J321 (2009)]Valdespino, Edward et al. | 2010
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Semiconductor Devices, Materials, and Processing - Fabrication of a Uniform Low Temperature Poly-Si TFT Array by Optimized Field Aided Lateral CrystallizationKuo, P-Y et al. | 2010
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Sensors and Displays: Principles, Materials, and Processing - Increasing the Luminescent Quantum Yield of CdS Nanoparticles Having Broadband EmissionFärm, E et al. | 2010
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Nanostructured Materials, Carbon Nanotubes, and Fullerenes - Growth of ZnSe1-xTex Nanotips and the Fabrication of ZnSe1-xTex Nanotip-Based PhotodetectorWang, Y et al. | 2010
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Mixed Oxide Ion and Hole Conductivity in Pr2-αNi0.76-xCu0.24GaxO4+δ MembraneKonysheva, E et al. | 2010
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Batteries and Energy Storage - Study of Capacity Fade of Lithium-Ion Polymer Rechargeable Batteries with Continuous CyclingGuo, L et al. | 2010
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Electrochemical/Chemical Deposition and Etching - Triangular GaAs Microcones and Sharp Tips Prepared by Combining Electroless and Electrochemical EtchingKwon, B S et al. | 2010
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Dielectric Science and Materials - Atomic Layer Deposition of Strontium Titanate Films Using Sr(tBu3Cp)2 and Ti(OMe)4Swerts, J et al. | 2010
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Impact of Precursor Chemistry and Process Conditions on the Scalability of ALD HfO, Gate DielectricsMa, X et al. | 2010
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Electrochemical Insertion of Li and Na Ions into Nanocrystalline Fe3O4 and α-Fe2O3 for Rechargeable BatteriesCho, H-M et al. | 2010
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Corrosion, Passivation, and Anodic Films - Passivation and Depassivation of Alloy 22 in Acidic Chloride SolutionsDemirkan, K et al. | 2010
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Fuel Cells and Energy Conversion - Modeling of PEMFC Transients with Finite-Rate Phase-Transfer ProcessesKim, J H et al. | 2010
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Suppressed Carbon Deposition Behavior in Nickel/Yittria-Stablized Zirconia Anode with SrZr0.95Y0.05O3-α in Dry Methane Fuelde Tacconi, N R et al. | 2010
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Study of the Surface Reactions in AID Hafnium AluminatesByun, K Y et al. | 2010