Stable superhydrophobic surfaces induced by dual-scale topography on SU-8 (English)
- New search for: Marquez-Velasco, Jose
- New search for: Marquez-Velasco, Jose
- New search for: Vlachopoulou, Maria-Elena
- New search for: Tserepi, Angeliki
- New search for: Gogolides, Evangelos
In:
Microelectronic engineering
;
87
, 5
; 782-786
;
2010
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ISSN:
- Article (Journal) / Print
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Title:Stable superhydrophobic surfaces induced by dual-scale topography on SU-8
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Contributors:
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Published in:Microelectronic engineering ; 87, 5 ; 782-786
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Publisher:
- New search for: Elsevier
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Place of publication:Amsterdam [u.a.]
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Publication date:2010
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ISSN:
-
ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 535/5670
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Keywords:
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Classification:
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Source:
Table of contents – Volume 87, Issue 5
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 691
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PrefaceRonse, Kurt / Van Thourhout, Dries / De Gendt, Stefan / Lagae, Liesbet / Vandenberghe, Geert / Witvrouw, Ann et al. | 2010
- 693
-
Integration of organic semiconductor lasers and single-mode passive waveguides into a PMMA substrateVannahme, Christoph / Klinkhammer, Sönke / Kolew, Alexander / Jakobs, Peter-Jürgen / Guttmann, Markus / Dehm, Simone / Lemmer, Uli / Mappes, Timo et al. | 2009
- 696
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Micro-calorimetric sensor for vapor phase explosive detection with optimized heat profileGreve, A. / Olsen, J. / Privorotskaya, N. / Senesac, L. / Thundat, T. / King, W.P. / Boisen, A. et al. | 2009
- 699
-
Replication of cancer cells using soft lithography bioimprint techniqueSamsuri, Fahmi / Alkaisi, Maan M. / Mitchell, John S. / Evans, John J. et al. | 2009
- 704
-
Feasibility study on cellular network analysis with patterned cell culture microdeviceKawashima, Takahiro / Kimura, Tsuyoshi / Shibata, Takayuki / Kishida, Akio / Mineta, Takashi / Makino, Eiji et al. | 2009
- 708
-
Self-aligned cantilever positioning for on-substrate measurements using DVD pickup headBosco, F.G. / Hwu, E.-T. / Keller, S. / Greve, A. / Boisen, A. et al. | 2009
- 712
-
Monolithically integrated μ-capillary electrophoresis with organic light sources and tunable a-Si:H multispectral photodiodes for fluorescence detectionMerfort, Christian / Seibel, Konstantin / Watty, Krystian / Böhm, Markus et al. | 2009
- 712
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Monolithically integrated mu-capillary electrophoresis with organic light sources and tunable a-Si:H multispectral photodiodes for fluorescence detectionMerfort, Christian / Seibel, Konstantin / Watty, Krystian / Boehm, Markus et al. | 2010
- 712
-
Monolithically integrated m-capillary electrophoresis with organic light sources and tunable a-Si:H multispectral photodiodes for fluorescence detectionMerfort, C. / Seibel, K. / Watty, K. / Bohm, M. et al. | 2010
- 715
-
Bacterial adhesion to toroidal nano-structures from poly(styrene)-block-poly(tert-butyl acrylate) diblock copolymer thin filmsLi, Shuyan / Komaromy, Andras Z. / Nicolau, Dan V. / Boysen, Reinhard I. / Hearn, Milton T.W. et al. | 2009
- 719
-
Influence of the electrode radius on the impedance spectra of cell-covered disc electrodeCho, Sungbo / Thielecke, Hagen et al. | 2009
- 722
-
Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bondingLi, Xiaojun / Wang, Xudi / Jin, Jian / Tang, Qisheng / Tian, Yangchao / Fu, Shaojun / Cui, Z. et al. | 2009
- 726
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High resolution and hybrid patterning for single cell attachmentHu, J. / Shi, J. / Zhang, F. / Lei, L. / Li, X. / Wang, L. / Liu, L. / Chen, Y. et al. | 2009
- 730
-
Inverted tapered pillars for mass sensingMelli, Mauro / Pozzato, Alessandro / Lazzarino, Marco et al. | 2009
- 734
-
Plasma enhanced chemical vapor deposition grown carbon nanotubes from ferritin catalyst for neural stimulation microelectrodesHäffner, M. / Schneider, K. / Schuster, B.-E. / Stamm, B. / Latteyer, F. / Fleischer, M. / Burkhardt, C. / Chassé, T. / Stett, A. / Kern, D.P. et al. | 2009
- 738
-
Trapping of hyaluronic acid molecules on sharp nano-electrodes of various metalsTakeuchi, H. / Mineta, T. / Makino, E. et al. | 2009
- 742
-
A reconfigurable superparamagnetic bead filter for microfluidic detection of bio-materialMatteucci, M. / Homburg, F.G.A. / van Pelt, S. / Dietzel, A. et al. | 2009
- 747
-
Parallel and high sensitive photonic crystal cavity assisted read-out for DNA-chipsPisanello, Ferruccio / Martiradonna, Luigi / Pompa, Pier Paolo / Stomeo, Tiziana / Qualtieri, Antonio / Vecchio, Giuseppe / Sabella, Stefania / De Vittorio, Massimo et al. | 2009
- 750
-
Channel height dependent protein nucleation and crystal growth in microfluidic devicesLounaci, Malika / Chen, Yong / Rigolet, Pascal et al. | 2009
- 753
-
Fabrication of BioFET linear array for detection of protein interactionsWang, Ling / Estrela, Pedro / Huq, Ejaz / Li, Peng / Thomas, Stephen / Ferrigno, Paul Ko / Paul, Debjani / Adkin, Paul / Migliorato, Piero et al. | 2009
- 756
-
4-D dielectrophoretic handling of Janus particles in a microfluidic chipHonegger, T. / Lecarme, O. / Berton, K. / Peyrade, D. et al. | 2009
- 760
-
Microfabricated magnetic bead polydimethylsiloxane microarraysAveyard, Jenny / Hedegaard, Tobias / Bilenberg, Brian / Nicolau, Dan V. et al. | 2009
- 765
-
Flow rate based control of wavelength emission in a multicolor microfluidic dye laserAubry, G. / Méance, S. / Haghiri-Gosnet, A.-M. / Kou, Q. et al. | 2009
- 769
-
Novel lamination and interconnection technologies demonstrated in a flexible modular optical sensor array for wound monitoringvan den Brand, Jeroen / Saalmink, Milan / Barink, Marco / Dietzel, Andreas et al. | 2009
- 773
-
Focusing of biological cells utilizing negative dielectrophoretic force generated by insulating structuresJen, Chun-Ping / Huang, Ching-Te / Weng, Cheng-Hsin et al. | 2009
- 778
-
Experimental and simulation study of the effect of pipette roughness on giga-seal formation in patch clampingMalboubi, M. / Gu, Y. / Jiang, K. et al. | 2009
- 782
-
Stable superhydrophobic surfaces induced by dual-scale topography on SU-8Marquez-Velasco, Jose / Vlachopoulou, Maria-Elena / Tserepi, Angeliki / Gogolides, Evangelos et al. | 2009
- 786
-
Microfluidics structures for probing the dynamic behaviour of filamentous fungiHeld, Marie / Lee, Abraham P. / Edwards, Clive / Nicolau, Dan V. et al. | 2009
- 790
-
Sensitivity enhancement of SPR biosensor by improving surface quality of glass slidesChen, X. / Pan, M. / Jiang, K. et al. | 2009
- 793
-
Diffusion-based concentration control in microcavities during long time period by programmed syringe pumpsSi, Guangwei / Zhu, Xuejun / Kang, Yangsen / Luo, Chunxiong / Ouyang, Qi / Chen, Yong et al. | 2009
- 798
-
Ultra low concentrated molecular detection using super hydrophobic surface based biophotonic devicesGentile, F. / Das, G. / Coluccio, M.L. / Mecarini, F. / Accardo, A. / Tirinato, L. / Tallerico, R. / Cojoc, G. / Liberale, C. / Candeloro, P. et al. | 2009
- 802
-
Biomolecular layer thickness evaluation using White Light Reflectance SpectroscopyKitsara, M. / Petrou, P. / Kontziampasis, D. / Misiakos, K. / Makarona, E. / Raptis, I. / Beltsios, K. et al. | 2009
- 806
-
Fabrication of a microfluidic platform for investigating dynamic biochemical processes in living samples by FTIR microspectroscopyBirarda, Giovanni / Grenci, Gianluca / Businaro, Luca / Marmiroli, Benedetta / Pacor, Sabrina / Vaccari, Lisa et al. | 2009
- 810
-
Motility of bacteria in microfluidic structuresBinz, Marie / Lee, Abraham P. / Edwards, Clive / Nicolau, Dan V. et al. | 2009
- 814
-
Photolithographic patterning of polymer-encapsulated optical oxygen sensorsNock, Volker / Alkaisi, Maan / Blaikie, Richard J. et al. | 2009
- 817
-
Columnar shaped microresonators for mass detection and gas analysisKehrbusch, J. / Bozek, P. / Radzio, B. / Ilin, E.A. / Oesterschulze, E. et al. | 2009
- 821
-
Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applicationsHainberger, R. / Bruck, R. / Kataeva, N. / Heer, R. / Köck, A. / Czepl, P. / Kaiblinger, K. / Pipelka, F. / Bilenberg, B. et al. | 2009
- 824
-
Nanoimprint lithography for optic fluidics with phase gratings for environmental monitoring applicationYang, Rong / Lu, Bing-Rui / Xue, Jing / Shen, Zhen-Kui / Xu, Zhen-Cheng / Huq, Ejaz / Qu, Xin-Ping / Chen, Yifang / Liu, Ran et al. | 2009
- 827
-
Study of flow and pressure field in microchannels with various cross-section areasPetropoulos, Anastasios / Kaltsas, Grigoris / Randjelovic, Danijela / Gogolides, Evangelos et al. | 2009
- 830
-
Effects of substrate nanopatterning on human osteosarcoma cells (SaOs-2) behaviorBakeine, G.J. / Benedetti, L. / Galli, D. / Grenci, G. / Pozzato, A. / Prasciolu, M. / Tormen, M. / Cusella, G. et al. | 2009
- 835
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Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writingShiine, Y. / Nishikawa, H. / Furuta, Y. / Kanamitsu, K. / Satoh, T. / Ishii, Y. / Kamiya, T. / Nakao, R. / Uchida, S. et al. | 2009
- 839
-
Fabrication of a conductive nanoscale electrode for functional devices using nanoimprint lithography with printable metallic nanoinkKim, YoungJa / Kim, GeeHong / Lee, JaeJong et al. | 2009
- 843
-
Direct polymer-transfer lithography for high-throughput fabrication of Cu line patternsShibata, Takayuki / Kawashima, Takahiro / Kubota, Toshio / Mita, Mamoru et al. | 2009
- 848
-
Diffusion of thiols during microcontact printing with rigid stampsBergmair, Iris / Mühlberger, Michael / Lausecker, Elisabeth / Hingerl, Kurt / Schöftner, Rainer et al. | 2009
- 851
-
Potential and limitations of a T-NIL/UVL hybrid processScheer, H.-C. / Wissen, M. / Bogdanski, N. / Möllenbeck, S. / Mayer, A. et al. | 2009
- 854
-
Fabrication of Fresnel zone plates with 25nm zone width using extreme ultraviolet holographySarkar, Sankha S. / Solak, Harun H. / Raabe, Jörg / David, Christian / van der Veen, J. Friso et al. | 2009
- 859
-
Technique for transfer of high-density, high-aspect-ratio nanoscale patterns in UV nanoimprint lithography and measurement of the release forceTaniguchi, Jun / Kamiya, Yasuhiro / Ohsaki, Takeshi / Sakai, Nobuji et al. | 2009
- 864
-
Effects of mold shape and sidewall roughness on nanoimprint by molecular dynamics simulationYao, Chung Han / Chang, Chih Hang / Hsieh, Chih Wei / Sung, Cheng Kuo et al. | 2009
- 869
-
Influences of embossing technology on Pb(Zr0.3,Ti0.7)O3 ferroelectric thin filmShen, Zhen-Kui / Chen, Zhi-Hui / Qiu, Zhi-Jun / Lu, Bing-rui / Wan, Jing / Deng, Shao-Ren / Jiang, An-Quan / Qu, Xin-Ping / Liu, Ran / Chen, Yifang et al. | 2009
- 872
-
Fabricating metallic wire grating inside a polymeric substrate by insertion nanoimprintChen, Chia-Meng / Sung, Cheng-Kuo et al. | 2009
- 876
-
Optical micro-structures fabricated on top of optical fibers by means of two-photon photopolymerizationCojoc, G. / Liberale, C. / Candeloro, P. / Gentile, F. / Das, G. / De Angelis, F. / Di Fabrizio, E. et al. | 2009
- 880
-
Influence of the dose distribution on resist development propertiesKnyazev, M.A. / Svintsov, A.A. / Zaitsev, S.I. et al. | 2009
- 883
-
A study of virtual lithography process for polymer directed self-assemblyKim, Sang-Kon / Oh, Hye-Keun / Jung, Young-Dae / An, Ilsin et al. | 2009
- 887
-
Resonant surface roughness interactions in planar superlensesSchøler, Mikkel / Blaikie, Richard J. et al. | 2009
- 890
-
Influence of nano-embossing on properties of poly(VDF-TrFE)Fang, Jiang-Rong / Luo, Xiao-Ya / Ma, Zhen / Shen, Zhen-Kui / Lu, Qian / Lu, Bing-Rui / Zhu, Guo-Dong / Qu, Xin-Ping / Liu, Ran / Chen, Yi-Fang et al. | 2009
- 893
-
Inverse problem solving and optical index determination of resist films by ellipsometryTortai, J.H. / Akbalik Rapine, A. / Soulan, S. / Schiavone, P. et al. | 2009
- 899
-
A versatile pattern inversion process based on thermal and soft UV nanoimprint lithography techniquesChen, Jing / Shi, Jian / Cattoni, Andrea / Decanini, Dominique / Liu, Zhengtang / Chen, Yong / Haghiri-Gosnet, Anne-Marie et al. | 2009
- 904
-
Sub-micron imaging on high-topography wafers using spray coating and projection lithographyMaury, Pascale / Quemper, Jean-Marie / Pocas, Stephane / Vliet, Dick Van / Noordam, Nico / Berge, Peter ten / Best, Keith et al. | 2009
- 907
-
Pattern definition through guided self-assembly in thermal nanoimprintMayer, Andre / Bogdanski, Nicolas / Möllenbeck, Saskia / Scheer, Hella-Christin et al. | 2009
- 910
-
Fabrication for metal photomask pattern by using fountain-pen nanolithographyOnoue, Miki / Ushijima, Hirobumi et al. | 2009
- 914
-
Influence of process parameters on hydrogen silsesquioxane chemistry at low voltage electron beam exposuresRio, David / Siegert, Laurent / Derrough, Samir / Constancias, Christophe / Icard, Béatrice / Meynen, Herman / Pain, Laurent et al. | 2009
- 918
-
Evaluation of filling behavior on UV nanoimprint lithography using release coatingOsari, Kazutomo / Unno, Noriyuki / Taniguchi, Jun / Machinaga, Ken-ichi / Ohsaki, Takeshi / Sakai, Nobuji et al. | 2009
- 922
-
Guide structure with pole arrays imprinted on nylon fiberMekaru, Harutaka / Koizumi, Osamu / Ueno, Akihisa / Takahashi, Masaharu et al. | 2009
- 927
-
22nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etchingGao, Chen / Deng, Shao-Ren / Wan, Jing / Lu, Bing-Rui / Liu, Ran / Huq, Ejaz / Qu, Xin-Ping / Chen, Yifang et al. | 2009
- 931
-
Nanoelectrode lithography using a flat mold with a pattern defined by different conductivitiesYokoo, Atsushi / Namatsu, Hideo et al. | 2009
- 936
-
Contact and proximity lithography using 193nm Excimer laser in Mask AlignerPartel, S. / Zoppel, S. / Hudek, P. / Bich, A. / Vogler, U. / Hornung, M. / Voelkel, R. et al. | 2009
- 940
-
Third dimension of proximity effect correction (PEC)Unal, Nezih / Mahalu, Diana / Raslin, Olga / Ritter, Daniel / Sambale, Christoph / Hofmann, Ulrich et al. | 2009
- 943
-
Electron beam lithography on cylindrical rollerTseng, Shih Chun / Peng, Wen Yang / Hsieh, Yi Fan / Lee, Ping Jen / Lai, Wen Lang et al. | 2009
- 947
-
New hybrid organic–inorganic sol–gel positive resistBrigo, L. / Pistore, A. / Grenci, G. / Carpentiero, A. / Romanato, F. / Brusatin, G. et al. | 2009
- 951
-
Acid diffusion effects between resists in freezing processes used for contact hole patterningFuhrmann, Jürgen / Fiebach, André / Erdmann, Andreas / Trefonas, Peter et al. | 2009
- 955
-
Atomic precision patterning on Si: An opportunity for a digitized processRandall, J.N. / Ballard, J.B. / Lyding, J.W. / Schmucker, S. / Von Ehr, J.R. / Saini, R. / Xu, H. / Ding, Y. et al. | 2009
- 959
-
Fabrication of nano-scaled patterns on ceramic thin films and silicon substrates by soft ultraviolet nanoimprint lithographyJim, K.L. / Lee, F.K. / Xin, J.Z. / Leung, C.W. / Chan, H.L.W. / Chen, Y. et al. | 2009
- 963
-
UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturingJi, Ran / Hornung, Michael / Verschuuren, Marc A. / van de Laar, Robert / van Eekelen, Jan / Plachetka, Ulrich / Moeller, Michael / Moormann, Christian et al. | 2009
- 968
-
Fabrication of a 3D stamp with the micro- and nano-scale patterns through combined NIL and optical lithography processesPark, Sooyeon / Kim, Geehong / Choi, Keebong / Lee, Jaejong et al. | 2009
- 972
-
Morphological influence of the beam overlap in focused ion beam induced deposition using raster scanKim, Chung-Soo / Kim, Hyung-Jung / Ahn, Sung-Hoon / Jang, Dong-Young et al. | 2009
- 977
-
Projection lithography to print thick resist patterns with triangular and semi-circular cross-section profilesHoriuchi, Toshiyuki / Kashiwagi, Takashi et al. | 2009
- 982
-
Low energy Xe+ ion beam machining of ULE® substrates for EUVL projection optics – Evaluation of high-spatial frequency roughnessEndo, Hironori / Inaba, Takuro / Pahlovy, Shahjada A. / Miyamoto, Iwao et al. | 2009
- 985
-
Effective polarization control of metallic planar chiral metamaterials with complementary rosette pattern fabricated by nanoimprint lithographyDeng, Shao-Ren / Lu, Bing-Rui / Dong, Bi-Qing / Wan, Jing / Shu, Zhen / Xue, Jing / Chen, Yifang / Huq, Ejaz / Liu, Ran / Qu, Xin-Ping et al. | 2009
- 989
-
Detailed resist film modeling in stochastic lithography simulation for line-edge roughness quantificationPatsis, G.P. / Drygiannakis, D. / Raptis, I. et al. | 2009
- 993
-
Challenges in using optical lithography for the building of a 22nm node 6T-SRAM cellErcken, M. / Altamirano-Sanchez, E. / Baerts, C. / Brus, S. / De Backer, J. / Delvaux, C. / Demand, M. / Horiguchi, N. / Locorotondo, S. / Vandeweyer, T. et al. | 2009
- 997
-
Thermal characterization of materials for double patterningDerrough, S. / Pikon, A. / Sourd, C. / Guérin, I. / Simon, J. / Gaugiran, S. / Cardolaccia, T. / Liu, Y. / Trefonas, P. / Barclay, G. et al. | 2009
- 1001
-
Gold nanoparticles by soft UV nanoimprint lithography coupled to a lift-off process for plasmonic sensing of antibodiesBarbillon, G. / Hamouda, F. / Held, S. / Gogol, P. / Bartenlian, B. et al. | 2009
- 1005
-
Fabrication and characterization of high extinction ratio transmission polarizersXu, Zhen-Cheng / Xie, Shen-Qi / Shu, Zhen / Lu, Bing-Rui / Wan, Jing / Chen, Yifang / Huq, Ejaz / Qu, Xin-Ping / Liu, Ran et al. | 2009
- 1008
-
3D materials made of gold using Nanoimprint LithographyBergmair, Iris / Mühlberger, Michael / Hingerl, Kurt / Pshenay-Severin, Ekaterina / Pertsch, Thomas / Kley, Ernst Bernhard / Schmidt, Holger / Schöftner, Rainer et al. | 2009
- 1011
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Free-standing silicon-nitride zoneplates for neutral-helium microscopyReisinger, Thomas / Eder, Sabrina / Greve, Martin M. / Smith, Henry I. / Holst, Bodil et al. | 2009
- 1015
-
Soft UV-NIL at 20nm scale using flexible bi-layer stamp casted on HSQ master moldCattoni, Andrea / Cambril, E. / Decanini, D. / Faini, G. / Haghiri-Gosnet, A.M. et al. | 2009
- 1019
-
Two-tone metal pattern transfer technique using a single mold surfaceUnno, Noriyuki / Taniguchi, Jun et al. | 2009
- 1024
-
Study of the behaviour of monomers in thermal nanoimprint lithographyGourgon, C. / Béduer, A. / Landis, S. / Perret, C. / Chaix, N. / Gereige, I. et al. | 2009
- 1029
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Degradation and surfactant-aided regeneration of fluorinated anti-sticking mold treatments in UV nanoimprint lithographyZelsmann, M. / Alleaume, C. / Truffier-Boutry, D. / Francone, A. / Beaurain, A. / Pelissier, B. / Boussey, J. et al. | 2009
- 1033
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Fabrication of novel double microlens using two step soft lithographyKim, Han-Hyoung / O, Beom-Hoan / Lee, Seung-Gol / Park, Se-Geun et al. | 2009
- 1037
-
Fully automated hot embossing processes utilizing high resolution working stampsGlinsner, T. / Veres, T. / Kreindl, G. / Roy, E. / Morton, K. / Wieser, T. / Thanner, C. / Treiblmayr, D. / Miller, R. / Lindner, P. et al. | 2009
- 1041
-
Improved CD control and line edge roughness in E-beam lithography through combining proximity effect correction with gray scale techniquesBolten, Jens / Wahlbrink, Thorsten / Koo, Namil / Kurz, Heinrich / Stammberger, Stefan / Hofmann, Uli / Ünal, Nezih et al. | 2009
- 1044
-
The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor depositionKometani, Reo / Warisawa, Shin’ichi / Ishihara, Sunao et al. | 2009
- 1049
-
Lithography scaling issues associated with III–V MOSFETsIgnatova, O. / Thoms, S. / Jansen, W. / Macintyre, D.S. / Thayne, I. et al. | 2009
- 1052
-
Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive X-ray optics fabricationGorelick, Sergey / Vila-Comamala, Joan / Guzenko, Vitaliy / Mokso, Rajmund / Stampanoni, Marco / David, Christian et al. | 2009
- 1057
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Nanopatterned UV curable hydrogels for biomedical applicationsGaston, Ainhoa / Khokhar, Ali Z. / Bilbao, Leire / Sáez-Martínez, Virginia / Corres, Ana / Obieta, Isabel / Gadegaard, Nikolaj et al. | 2009
- 1062
-
Charged Particle Nanopatterning (CHARPAN) of 2D and 3D masters for flexible replication in Substrate Conformal Imprint Lithography (SCIL)van Delft, Falco / van de Laar, Robert / Verschuuren, Marc / Platzgummer, Elmar / Loeschner, Hans et al. | 2009
- 1066
-
Lithography on GaMnAs layer by AFM local anodic oxidation in the AC modeJanoušek, M. / Halada, J. / Voves, J. et al. | 2009
- 1070
-
Investigation on the critical velocity for liquid loss in immersion lithographyChen, Wenyu / Fu, Xin / Zou, Jun / Yang, Huayong / Ruan, Xiaodong / Gong, Guofang et al. | 2009
- 1074
-
Full wafer microlens replication by UV imprint lithographySchmitt, H. / Rommel, M. / Bauer, A.J. / Frey, L. / Bich, A. / Eisner, M. / Voelkel, R. / Hornung, M. et al. | 2009
- 1077
-
High resolution patterning – Preparation of VSB systems for 22nm node capabilityHahmann, Peter / Boettcher, Monika / Klein, Matthias W. / Stolberg, Ines A. / Weidenmueller, Ulf et al. | 2009
- 1082
-
Modeling fluid velocity response for wafer scanning in immersion lithographyChen, Hui / Fu, Xin / Zou, Jun / Yang, Huayong / Ruan, Xiaodong / Gong, Guofang et al. | 2009
- 1086
-
Replication of micro optical element with continuous relief profile in fused silica using UV-embossing and Reactive Ion EtchingJin, P. / Liu, N. / Liu, T.T. / Tan, J.B. et al. | 2009
- 1091
-
Extraction of the point-spread function in electron-beam lithography using a cross geometrySchefzyk, D. / Biesinger, D.E.F. / Wharam, D.A. et al. | 2009
- 1095
-
Electrostatic rotator for alignment purposes in multi electron beam systemsZonnevylle, A.C. / Heerkens, C.Th.H. / Kruit, P. / Wieland, M.L. / Postma, F.M. / Steenbrink, S.W.K.H. et al. | 2009
- 1100
-
Improving the imaging quality of MOEs in DMD-based maskless lithographyGuo, XiaoWei / Liu, Yongzhi et al. | 2009
- 1104
-
Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithographyMohammad, M.A. / Fito, T. / Chen, J. / Buswell, S. / Aktary, M. / Stepanova, M. / Dew, S.K. et al. | 2009
- 1108
-
Computer simulation of resist profiles at electron beam nanolithographyVutova, Katia / Koleva, Elena / Mladenov, Georgy / Kostic, Ivan / Tanaka, Takeshi et al. | 2009
- 1112
-
Electron beam lithography using plasma polymerized hexane as resistPedersen, R.H. / Hamzah, M. / Thoms, S. / Roach, P. / Alexander, M.R. / Gadegaard, N. et al. | 2009
- 1115
-
Integrated tool for the spreading, thermal treatment and in situ process monitoring of thick photoresist filmsGoustouridis, D. / Raptis, I. / Valamontes, E. / Chatzichrisitidi, M. et al. | 2009
- 1120
-
Graphene electrodes for n-type organic field-effect transistorsHenrichsen, Henrik H. / Bøggild, Peter et al. | 2009
- 1123
-
Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processingJambreck, J.D. / Schmitt, H. / Amon, B. / Rommel, M. / Bauer, A.J. / Frey, L. et al. | 2009
- 1127
-
Line Width Roughness mitigation in chemically amplified resist by post-litho processesVaglio Pret, Alessandro / Gronheid, Roel et al. | 2009
- 1131
-
Electron Beam Direct Writing technology for LSI prototyping businessMachida, Yasuhide / Maruyama, Takashi / Kojima, Yoshinori / Sugatani, Shinji / Tsuchikawa, Haruo / Ogino, Kozo / Hoshino, Hiromi et al. | 2009
- 1135
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Delta lithography method to increase CD uniformity and throughput of SLM-based maskless lithographySeo, Manseung / Kim, Haeryung et al. | 2009
- 1139
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Complex nanostructures in PMMA made by a single process step using e-beam lithographyGautsch, S. / Studer, M. / de Rooij, N.F. et al. | 2009
- 1143
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Microlens arrays on large area UV transparent hybrid sol–gel materials for optical toolsDal Zilio, Simone / Giustina, Gioia Della / Brusatin, Giovanna / Tormen, Massimo et al. | 2009
- 1147
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Resist-based silver nanocomposites synthesized by lithographic methodsMarques-Hueso, J. / Abargues, R. / Canet-Ferrer, J. / Valdes, J.L. / Martinez-Pastor, J. et al. | 2009
- 1150
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Formation of Cu electrical circuit by simplified damascene process based on UV-assisted thermal imprintingYoun, Sung-Won / Ueno, Akihisa / Takagi, Hideki / Takahashi, Masaharu / Maeda, Ryutaro et al. | 2009
- 1154
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Projection Mask-Less Lithography (PML2)Klein, Christof / Klikovits, Jan / Szikszai, Laszlo / Platzgummer, Elmar / Loeschner, Hans et al. | 2009
- 1159
-
Cross-sectional observation of nanoimprint resins filled in SiO2/Si mold pattern using scanning electron microscopyOkada, Makoto / Shibata, Mayuko / Haruyama, Yuichi / Kanda, Kazuhiro / Hirai, Yoshihiko / Matsui, Shinji et al. | 2009
- 1164
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Optimization of illumination pupils and mask structures for proximity printingMotzek, K. / Bich, A. / Erdmann, A. / Hornung, M. / Hennemeyer, M. / Meliorisz, B. / Hofmann, U. / Ünal, N. / Voelkel, R. / Partel, S. et al. | 2009
- 1168
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Approach of enhancing exposure depth for evanescent wave interference lithographyNiu, Xiaoyun / Qi, Yuming / Wang, Jingquan / Zhang, Zhiyou / Du, Jinglei / Guo, Yongkang / Shi, Ruiying / Gong, Min et al. | 2009
- 1173
-
Novel SU-8 based vacuum wafer-level packaging for MEMS devicesMurillo, Gonzalo / Davis, Zachary J. / Keller, Stephan / Abadal, Gabriel / Agusti, Jordi / Cagliani, Alberto / Noeth, Nadine / Boisen, Anja / Barniol, Nuria et al. | 2009
- 1177
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A cold micro plasma jet device suitable for bio-medical applicationsKim, Kangil / Kim, Geunyoung / Hong, Yong Cheol / Yang, Sang Sik et al. | 2009
- 1181
-
Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorptionDjurić, Zoran G. / Jokić, Ivana M. / Djukić, Maja M. / Frantlović, Miloš P. et al. | 2009
- 1185
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Micromachining of a newly designed AFM probe integrated with hollow microneedle for cellular function analysisKato, Norihisa / Kawashima, Takahiro / Shibata, Takayuki / Mineta, Takashi / Makino, Eiji et al. | 2009
- 1190
-
Laser-assisted structuring of metal–polymer bilayers for protein patterningDobroiu, Serban / Delft, Falco C.M.J.M. van / Thiel, Emile van / Hanson, Kristi L. / Nicolau, Dan V. et al. | 2009
- 1195
-
SiGe based grating light valves: A leap towards monolithic integration of MOEMSRudra, S. / Roels, J. / Bryce, G. / Haspeslagh, L. / Witvrouw, A. / Van Thourhout, D. et al. | 2009
- 1198
-
Ultra-high density MEMS probe memory deviceHeck, John / Adams, Donald / Belov, Nickolai / Chou, Tsung-Kuan A. / Kim, Byong / Kornelsen, Kevin / Ma, Qing / Rao, Valluri / Severi, Simone / Spicer, Dean et al. | 2009
- 1204
-
Enhanced particle focusing in microfluidic channels with standing surface acoustic wavesZeng, Q. / Chan, H.W.L. / Zhao, X.Z. / Chen, Y. et al. | 2009
- 1207
-
Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensorsAgustí, J. / Pellejero, I. / Abadal, G. / Murillo, G. / Urbiztondo, M.A. / Sesé, J. / Villarroya-Gaudó, M. / Pina, M. / Santamaría, J. / Barniol, N. et al. | 2009
- 1210
-
3D opto-electrical device stacking on CMOSDellmann, L. / Drechsler, U. / Morf, T. / Rothuizen, H. / Stutz, R. / Weiss, J. / Despont, M. et al. | 2009
- 1213
-
The creep behaviour of the microfabricated silicon diaphragms at 900°CRen, Juan / Kinnell, Peter / Geear, Martin / Ward, Mike / Craddock, Russell et al. | 2009
- 1213
-
The creep behaviour of the microfabricated silicon diaphragms at 900degreeCRen, J. / Kinnell, P. / Geear, M. / Ward, M. / Craddock, R. et al. | 2010
- 1217
-
Fully integrated three-axis Hall magnetic sensor based on micromachined structuresSileo, L. / Todaro, M.T. / Tasco, V. / De Vittorio, M. / Passaseo, A. et al. | 2009
- 1220
-
CMOS integrated radio frequency dome resonatorZhou, Wenzhe / Cross, Joshua D. / Zalalutdinov, Maxim / Ilic, Bojan / Baldwin, Jeffrey W. / Houston, Brain H. / Craighead, Harold G. / Parpia, Jeevak M. et al. | 2009
- 1223
-
Effect analysis of magnetic annealing below Curie-temperature on the magnetic properties of electrodeposited nickel–ironJordan, A. / Kirchhoff, M.R. / Büttgenbach, S. et al. | 2009
- 1226
-
Double layer resist process scheme for metal lift-off with application in inductive heating of microstructuresOuattara, L. / Knutzen, M. / Keller, S. / Hansen, M.F. / Boisen, A. et al. | 2009
- 1229
-
Batch fabrication of cantilever array aperture probes for scanning near-field optical microscopyZhang, Y. / Docherty, K.E. / Weaver, J.M.R. et al. | 2009
- 1233
-
Self-similar organization of arrays of individual carbon nanotubes and carbon nanotube micropillarsDe Volder, Michaël F.L. / Vidaud, Daniel O. / Meshot, Eric R. / Tawfick, Sameh / John Hart, A. et al. | 2009
- 1239
-
Fabrication of an all-polymer electrochemical sensor by using a one-step hot embossing procedureKafka, Jan / Larsen, Niels B. / Skaarup, Steen / Geschke, Oliver et al. | 2009
- 1242
-
Thermoelectric energy harvester fabricated by StepperSu, J. / Vullers, Ruud J.M. / Goedbloed, M. / van Andel, Y. / Leonov, V. / Wang, Z. et al. | 2009
- 1245
-
Silicon microcantilevers with MOSFET detectionTosolini, Giordano / Villanueva, Guillermo / Perez-Murano, Francesc / Bausells, Joan et al. | 2009
- 1248
-
Novel micromirror design with variable pull-in voltageBeernaert, Roel / Podprocky, Tomas / Coster, Jeroen De / Witvrouw, Ann / Haspeslagh, Luc / Avci, Aykut / Smet, Jelle De / Smet, Herbert De et al. | 2009
- 1253
-
NOA 63 as a UV-curable material for fabrication of microfluidic channels with native hydrophilicityDupont, Emile P. / Luisier, Raphaëlle / Gijs, Martin A.M. et al. | 2009
- 1256
-
Third-mode 48MHz free–free beam resonator used as a RF balunLópez, J.L. / Giner, J. / Murillo, G. / Torres, F. / Marigó, E. / Uranga, A. / Abadal, G. / Barniol, N. et al. | 2009
- 1259
-
Development of a low temperature amorphous Si/Ti for integrated MEMS/NEMSJiang, Liudi / Lewis, G. / Spearing, S.M. / Jennett, N.M. / Monclus, M. et al. | 2009
- 1263
-
An integrated field emission array for ion desorptionResnick, P.J. / Holland, C.E. / Schwoebel, P.R. / Hertz, K.L. / Chichester, D.L. et al. | 2009
- 1266
-
Micro-pressure sensor made of conductive PDMS for microfluidic applicationsLi, H. / Luo, C.X. / Ji, H. / Ouyang, Qi / Chen, Y. et al. | 2009
- 1270
-
Lithography guided horizontal growth of silicon nanowires for the fabrication of ultrasensitive piezoresistive strain gaugesFernández-Regúlez, Marta / Plaza, Jose A. / Lora-Tamayo, Emilio / Paulo, Alvaro San et al. | 2009
- 1274
-
Suspended membranes, cantilevers and beams using SU-8 foilsMelai, J. / Blanco Carballo, V.M. / Salm, C. / Schmitz, J. et al. | 2009
- 1278
-
Dynamic thermal mechanical characterization of Epoclad negative photoresist for micro mechanical structuresWouters, Kristof / De Doncker, Hendrik / Puers, Robert et al. | 2009
- 1281
-
Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devicesArun, A. / Acquaviva, D. / Fernández-Bolaños, M. / Salet, P. / Le-Poche, H. / Pantigny, P. / Idda, T. / Ionescu, A.M. et al. | 2009
- 1284
-
Hybrid circuit analysis of a suspended gate silicon nanodot memory (SGSNM) cellGarcia-Ramirez, M.A. / Tsuchiya, Yoshishige / Mizuta, Hiroshi et al. | 2009
- 1287
-
Determination of local electrostatic forces for EUVL mask chucksKalkowski, Gerhard / Peschel, Thomas / Risse, Stefan / Müller, Sandra / Engelstad, Roxann L. / Zeuske, Jacob R. / Vukkadala, Pradeep et al. | 2009
- 1290
-
Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applicationsFernández-Bolaños, M. / Vasylchenko, A. / Dainesi, P. / Brebels, S. / De Raedt, W. / Vandenbosch, G.A.E. / Ionescu, A.M. et al. | 2009
- 1294
-
Membrane-less in-plane bulk-micromachined thermopiles for energy harvestingvan Andel, Y. / Jambunathan, M. / Vullers, R.J.M. / Leonov, V. et al. | 2009
- 1297
-
Surface plasmon polariton coupling induced transmission of subwavelength metallic grating with waveguide layerXu, Zhen-Cheng / Dong, Biqin / Xue, Jing / Yang, Rong / Lu, Bing-Rui / Deng, Shaoren / Li, Zhi-Feng / Lu, Wei / Chen, Yifang / Huq, Ejaz et al. | 2009
- 1300
-
Direct FIB fabrication and integration of “single nanopore devices” for the manipulation of macromoleculesSchiedt, B. / Auvray, L. / Bacri, L. / Oukhaled, G. / Madouri, A. / Bourhis, E. / Patriarche, G. / Pelta, J. / Jede, R. / Gierak, J. et al. | 2009