$ CO_{2} $-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars (English)
- New search for: Yao, Tsung-Fu
- New search for: Yang, Sen-Yeu
- New search for: Yao, Tsung-Fu
- New search for: Yang, Sen-Yeu
In:
Microsystem Technologies
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19
, 2
; 151-157
;
2013
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ISSN:
- Article (Journal) / Print
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Title:$ CO_{2} $-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars
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Contributors:Yao, Tsung-Fu ( author ) / Yang, Sen-Yeu ( author )
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Published in:Microsystem Technologies ; 19, 2 ; 151-157
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Publisher:
- New search for: Springer-Verlag
- New search for: Springer
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Place of publication:Berlin
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Publication date:2013
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ISSN:
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ZDBID:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 50.94
- Further information on Basic classification
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Keywords:
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Classification:
BKL: 50.94 Mikrosystemtechnik, Nanotechnologie -
Source:
Table of contents – Volume 19, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 151
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CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillarsYao, Tsung-Fu / Yang, Sen-Yeu et al. | 2013
- 159
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Metal-ceramic-composite casting of complex micro componentsBuqezi-Ahmeti, D. / Maisenbacher, J. / Gibmeier, J. / Hanemann, T. et al. | 2012
- 167
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Improved micro fluxgate sensor with double-layer Fe-based amorphous coreLei, Chong / Lei, Jian / Yang, Zhen / Zhou, Yong et al. | 2012
- 173
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In-plane spectroscopy of microfluidic systems made in photosensitive glassTantawi, Khalid Hasan / Gaillard, William / Helton, Jake / Waddell, Emanuel / Mirov, Sergey / Fedorov, Vladimir / Williams, John D. et al. | 2012
- 179
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Ultra high aspect ratio penetrating metal microelectrodes for biomedical applicationsKamaraj, Abishek B. / Sundaram, Murali M. / Mathew, Ronnie et al. | 2012
- 187
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A novel high sensitive MEMS intraocular capacitive pressure sensorGanji, Bahram Azizollah / Shahiri-Tabarestani, M. et al. | 2012
- 195
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The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technologyCai, Chunhua / Qin, Ming et al. | 2012
- 203
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Silicon isotropic and anisotropic etching for MEMS applicationsNegi, S. / Bhandari, R. et al. | 2012
- 211
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Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) filmsLi, Junhong / Wang, Chenghao / Ma, Jun / Liu, Mengwei et al. | 2012
- 219
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Electromagnetically force balanced polymer accelerometerLi, Ji / Schomburg, Werner K. et al. | 2012
- 227
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Analysis and design process of a bi-membrane structure for micro-flow regulatorsPerdigones, Francisco / Luque, Antonio / Gañán-Calvo, Alfonso M. / Quero, José M. et al. | 2012
- 237
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A new design of multi-bit RF MEMS distributed phase shifters for phase error reductionDu, Y. J. / Bao, J. F. / Jiang, J. W. et al. | 2012
- 245
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Light-actuated water droplet motions on ZnO nanorodsLiu, Chien-Wei / Hsu, Chen-Pin / Yeh, J. Andrew / Sun, Yuh-Chang / Huang, Yu-Fen / Chu, Byung Hwan / Ren, Fan / Wang, Yu-Lin et al. | 2012
- 253
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Silver (Ag) as a novel masking material in glass etching for microfluidics applicationsLee, Hing Wah / Bien, Daniel C. S. / Badaruddin, Siti Aishah Mohamad / Teh, Aun Shih et al. | 2012
- 261
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A micro gearing system based on a ratchet mechanism and electrostatic actuationPham, Phuc Hong / Dao, Dzung Viet et al. | 2012
- 269
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A MEMS-based pyramid micro-needle electrode for long-term EEG measurementWang, Long-Fei / Liu, Jing-Quan / Yan, Xiao-Xiao / Yang, Bin / Yang, Chun-Sheng et al. | 2012
- 277
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A new inertial piezoelectric rotary actuator based on changing the normal pressureWen, Jianming / Ma, Jijie / Zeng, Ping / Cheng, Guangming / Zhang, Zhonghua et al. | 2012
- 285
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Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applicationsLi, Jia-dong / Xie, Jie / Xue, Wei / Wu, Dong-min et al. | 2012
- 291
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Experimental study of lubricant depletion in heat assisted magnetic recording: effects of laser heating duration and temperatureMa, Yansheng / Chen, Xiuying / Liu, Bo et al. | 2012