In-plane rotary comb-drive actuator for a variable optical attenuator (Unknown)
- New search for: Hou, Max Ti-Kuang
- New search for: Huang, Jing-Yi
- New search for: Jiang, Shiue-Shr
- New search for: Yeh, J. Andrew
- New search for: Hou, Max Ti-Kuang
- New search for: Huang, Jing-Yi
- New search for: Jiang, Shiue-Shr
- New search for: Yeh, J. Andrew
In:
Journal of Micro/Nanolithography, MEMS and MOEMS
;
7
, 4
;
043015
;
2008
- Article (Journal) / Electronic Resource
-
Title:In-plane rotary comb-drive actuator for a variable optical attenuator
-
Additional title:J. Micro/Nanolith. MEMS MOEMS
-
Contributors:Hou, Max Ti-Kuang ( author ) / Huang, Jing-Yi ( author ) / Jiang, Shiue-Shr ( author ) / Yeh, J. Andrew ( author )
-
Published in:Journal of Micro/Nanolithography, MEMS and MOEMS ; 7, 4 ; 043015
-
Publisher:
-
Publication date:2008-11-06
-
ISSN:
-
Coden:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:Unknown
-
Keywords:
-
Source:
Table of contents – Volume 7, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 040101
-
Successors of ArF Water-Immersion Lithography: EUV Lithography, Multi-e-beam Maskless Lithography, or Nanoimprint?Lin, Burn J. et al. | 2008
- 043001
-
Ultralowk 1oxide contact hole formation and metal filling using resist contact hole pattern by double line and space formation methodNakamura, Hiroko / Omura, Mitsuhiro / Yamashita, Souichi / Taniguchi, Yasuyuki / Abe, Junko / Tanaka, Satoshi / Inoue, Soichi et al. | 2008
- 043002
-
Modeling of temperature-dependent diffusion and polymerization kinetics and their effects on two-photon polymerization dynamicsUppal, Nitin / Shiakolas, Panos S. et al. | 2008
- 043003
-
Slow scanning electromagnetic scanner for laser displayJeong, Hee-Moon / Park, Yong-Hwa / Cho, Yong-Chul / Hwang, Junsik / Chang, Seok-Mo / Kang, Seok-Jin / Jeong, Hyun-Ku / Kim, Jun O / Lee, Jin-Ho et al. | 2008
- 043004
-
Source for extreme ultraviolet lithography by the tabletop storage ring MIRRORCLEYamada, Hironari / Minkov, Dorian / Toyosugi, Norio / Morita, Masaki / Hasegawa, Daisuke / Moon, Ahsa / Okoye, Ejike Kenneth et al. | 2008
- 043005
-
Advanced ultraviolet cross-link process and materials for global planarizationTakei, Satoshi / Horiguchi, Yusuke / Ohashi, Tomoya / Mano, Yuichi / Muramatsu, Makoto / Iwashita, Mitsuaki / Tsuchiya, Katsuhiro / Samura, Akira et al. | 2008
- 043006
-
Isopropanol/water as a developer for poly(dimethylglutarimide)Johnstone, Robert W. / Foulds, Ian G. / Pallapa, Manu V. / Parameswaran, Ash M. et al. | 2008
- 043007
-
Low-temperature wet-release process for low stiffness structuresSharma, Jaibir / DasGupta, Amitava et al. | 2008
- 043008
-
High-accuracy correction of critical dimension errors taking sequence of large-scale integrated circuits fabrication processes into accountAbe, Takayuki / Yashima, Jun / Shibata, Hayato / Kato, Yasuo / Matsumoto, Hiroshi / Iijima, Tomohiro et al. | 2008
- 043010
-
Coherence control of illumination optics in mask inspection systemsTakada, Akira / Tojo, Toru / Shibuya, Masato et al. | 2008
- 043012
-
Rapid fabrication of polymethylmethacrylate micromold masters using a hot intrusion processShiu, Pun Pang / Ostojic, Mile / Knopf, George K. / Nikumb, Suwas et al. | 2008
- 043013
-
Study of interface mechanical properties between thin-film Au and polymethyl methacrylatePan, C. T. / Shen, Sheng-Chih / Lin, Chun-Yu et al. | 2008
- 043014
-
Two microthermal shear stress sensors: surface micromachined and bulk-bonding micromachinedShi, Shali / Yi, Liang / Chen, Dapeng / Ou, Yi / Jing, Yupeng / Ye, Tianchun / Cheng, Zhongyu et al. | 2008
- 043015
-
In-plane rotary comb-drive actuator for a variable optical attenuatorHou, Max Ti-Kuang / Huang, Jing-Yi / Jiang, Shiue-Shr / Yeh, J. Andrew et al. | 2008
- 043020
-
Extraction of Young’s modulus and residual stress of structural materials through measurement of pull-in voltage and off-capacitance of beamsSharma, Jaibir / DasGupta, Amitava et al. | 2008
- 043025
-
Low-power electrothermal actuation for microelectromechanical systemsSkinner, Jack L. / Dentinger, Paul M. / Strong, Fabian W. / Gianoulakis, Steve E. et al. | 2008
- 043026
-
Low-friction large step-size micromotor driven by a scratch-drive actuator with bounceback mechanismHuang, I-Yu / Chen, Guan-Ming / Lee, Yen-Chi et al. | 2008
- 043030
-
Performance assessment of a novel triaxis microgyroscopeTsai, Nan-Chyuan / Sue, Chung-Yang / Lin, Chih-Che et al. | 2008
- 043035
-
Design and characterization of a microheater array device fabricated with SwIFT-Lite™Williams, Layne D. / Okandan, Murat / Blair, Steve et al. | 2008