Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators (English)
- New search for: Hiller, Karla
- New search for: Kuechler, Matthias
- New search for: Billep, Detlef
- New search for: Schroeter, Bernd
- New search for: Dienel, Marco
- New search for: Scheibner, Dirk
- New search for: Gessner, Thomas
- New search for: Hiller, Karla
- New search for: Kuechler, Matthias
- New search for: Billep, Detlef
- New search for: Schroeter, Bernd
- New search for: Dienel, Marco
- New search for: Scheibner, Dirk
- New search for: Gessner, Thomas
In:
Proc. SPIE
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5715
; 80
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2005
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators
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Contributors:Hiller, Karla ( author ) / Kuechler, Matthias ( author ) / Billep, Detlef ( author ) / Schroeter, Bernd ( author ) / Dienel, Marco ( author ) / Scheibner, Dirk ( author ) / Gessner, Thomas ( author )
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Conference:Micromachining and Microfabrication Process Technology X ; 2005 ; San Jose,California,United States
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Published in:Proc. SPIE ; 5715 ; 80
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Publisher:
- New search for: SPIE
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Publication date:2005-01-22
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Novel applications of MOEMS display and imagingWu, Ming C. et al. | 2005
- 1
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Novel applications of MOEMS display and imaging [5715-200]Wu, M. C. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 11
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Vibrating RF MEMS overview: applications to wireless communications [5715-201]Nguyen, C. T.-C. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 11
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Vibrating RF MEMS overview: applications to wireless communicationsNguyen, Clark T. et al. | 2005
- 26
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Biologically inspired technologies using artificial muscles [5715-203]Bar-Cohen, Y. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 26
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Biologically inspired technologies using artificial musclesBar-Cohen, Yoseph et al. | 2005
- 33
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Notch reduction in silicon on insulator (SOI) structures using a time division multiplex etch processesLai, Shouliang / Srinivasan, Sunil / Westerman, Russell J. / Johnson, Dave / Nolan, John J. et al. | 2005
- 33
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Notch reduction in silicon on insulator (SOI) structures using a time division multiplex etch processes [5715-02]Lai, S. / Srinivasan, S. / Westerman, R. J. / Johnson, D. / Nolan, J. J. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 39
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Uniformity-improving dummy structures for deep reactive ion etching (DRIE) processesJensen, Soren / Jensen, Jonas M. / Quaade, Ulrich J. / Hansen, Ole et al. | 2005
- 39
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Uniformity-improving dummy structures for deep reactive ion etching (DRIE) processes [5715-03]Jensen, S. / Jensen, J. M. / Quaade, U. J. / Hansen, O. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 47
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Temperature rise of the silicon mask-PMMA resist assembly during LIGA exposure [5715-05]Ting, A. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 47
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Temperature rise of the silicon mask-PMMA resist assembly during LIGA exposureTing, Aili et al. | 2005
- 59
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Polymeric microfluidic devices for the monitoring and separation of water-borne pathogens utilizing insulative dielectrophoresis [5715-06]McGraw, G. J. / Davalos, R. V. / Brazzle, J. D. / Hachman, J. T. / Hunter, M. C. / Chames, J. M. / Fiechtner, G. J. / Cummings, E. B. / Fintschenko, Y. / Simmons, B. A. et al. | 2005
- 59
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Polymeric microfluidic devices for the monitoring and separation of water-borne pathogens utilizing insulative dielectrophoresisMcGraw, Greg J. / Davalos, Rafael V. / Brazzle, John D. / Hachman, John T. / Hunter, Marion C. / Chames, Jeffery M. / Fiechtner, Gregory J. / Cummings, Eric B. / Fintschenko, Yolanda / Simmons, Blake A. et al. | 2005
- 69
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Spatial light modulators with monocrystalline silicon micromirrors made by water bonding [5715-07]Bakke, T. / Friedrichs, M. / Volker, B. / Reiche, M. / Leonardsson, L. / Schenk, H. / Lakner, H. K. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 69
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Spatial light modulators with monocrystalline silicon micromirrors made by wafer bondingBakke, Thor / Friedrichs, Martin / Voelker, Benjamin / Reiche, Manfred / Leonardsson, Lars / Schenk, Harald / Lakner, Hubert K. et al. | 2005
- 80
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Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators [5715-08]Hiller, K. / Kuchler, M. / Billep, D. / Schroter, B. / Dienel, M. / Scheibner, D. / Gessner, T. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 80
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Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuatorsHiller, Karla / Kuechler, Matthias / Billep, Detlef / Schroeter, Bernd / Dienel, Marco / Scheibner, Dirk / Gessner, Thomas et al. | 2005
- 92
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Fabrication of three-dimensional photonic devices using femtosecond laser pulsesSohn, Ik-Bu / Lee, Man-Seop / Lee, Sang-Man / Woo, Jung-Sik / Jung, Jung-Yong et al. | 2005
- 92
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Fabrication of three-dimensional photonic devices using femtosecond laser pulses [5715-10]Sohn, I.-B. / Lee, M.-S. / Lee, S.-M. / Woo, J.-S. / Jung, J.-Y. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 101
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Column growth mechanisms during KrF laser micromachining of Al2O3-TiCOliveira, V. / Simoes, F. / Vilar, Rui et al. | 2005
- 101
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Column growth mechanisms during KrF laser micromachining of Al~2O~3-TiC [5715-12]Oliveira, V. / Simoes, F. / Vilar, R. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 110
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Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laserLiao, Yunn-shiuan / Chen, Ying-Tung / Chao, Choung-Lii / Liu, Yih-Ming et al. | 2005
- 110
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Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser [5715-13]Liao, Y. / Chen, Y.-T. / Chao, C.-L. / Liu, Y.-M. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 118
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Fabrication of 3D microstructure and analysis of voxel generation by ultrafast-laser-induced two-photon absorptionYi, Shin Wook / Lee, Seong Ku / Cho, Mi Jung / Kong, Hong Jin / Yang, Dong-Yol / Park, Sang-hu / Lim, Tae-woo / Kim, Ran Hee / Lee, Kwang-Sup et al. | 2005
- 118
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Fabrication of 3D microstructure and analysis of voxel generation by ultrafast-laser-induced two-photon absorption [5715-14]Yi, S. W. / Lee, S. K. / Cho, M. J. / Kong, H. J. / Yang, D.-Y. / Park, S. / Lim, T. / Kim, R. H. / Lee, K.-S. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 130
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Effects of laser-induced plasma in machining of transparent materialsKadan, Viktor M. / Blonsky, Ivan V. / Salnikov, Vadim O. / Orieshko, Evgen V. et al. | 2005
- 130
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Effects of laser-induced plasma in machining of transparent materials [5715-15]Kadan, V. M. / Blonsky, I. V. / Salnikov, V. O. / Orieshko, E. V. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 138
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Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gapsMonajemi, Pejman / Ayazi, Farrokh et al. | 2005
- 138
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Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps [5715-18]Monajemi, P. / Ayazi, F. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 148
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MEMS fabrication process management environmentPopp, Jens / Schmidt, Thilo / Wagener, Andreas / Hahn, Kai et al. | 2005
- 148
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MEMS fabrication process management environment [5715-19]Popp, J. / Schmidt, T. / Wagener, A. / Hahn, K. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 159
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Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMSHerrmann, Cari F. / DelRio, Frank W. / George, Steven M. / Bright, Victor M. et al. | 2005
- 159
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Properties of atomic-layer-deposited Al~2O~3/ZnO dielectric films grown at low temperature for RF MEMS [5715-23]Herrmann, C. F. / DelRio, F. W. / George, S. M. / Bright, V. M. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 167
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Characterization of thin films and stack in MOEMS structure with ellipsometry and reflectometry techniquesSun, Lianchao / Hou, Ping et al. | 2005
- 167
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Characterization of thin films and stack in MOEMS structure with ellipsometry and reflectometry techniques [5715-24]Sun, L. / Hou, P. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 174
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Small devices manufacturing by copper vapor laser [5715-25]Gorney, S. G. / Polyakov, I. V. / Nikonchuk, M. O. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 174
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Small devices manufacturing by copper vapor laserGorney, Sergey G. / Polyakov, Igor V. / Nikonchuk, Mikhail O. et al. | 2005
- 180
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Silicon-glass anodic bonding at low temperatureMalecki, Krzysztof M. / Della Corte, Francesco G. et al. | 2005
- 180
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Silicon-glass anodic bonding at low temperature [5715-26]Malecki, K. M. / Corte, F. G. D. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 190
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Design and fabrication of giant micromirrors using electroplating-based technology [5715-28]Ilias, S. / Topart, P. A. / Larouche, C. / Leclair, S. / Jerominek, H. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 190
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Design and fabrication of giant micromirrors using electroplating-based technologyIlias, Samir / Topart, Patrice A. / Larouche, Carl / Leclair, Sebastien / Jerominek, Hubert et al. | 2005