Photo system based on scanning electron microscope for IC chip inspection (English)
- New search for: Liu, Wei
- New search for: Shen, Jin
- New search for: Tan, Boxue
- New search for: Liu, Wei
- New search for: Shen, Jin
- New search for: Tan, Boxue
In:
Proc. SPIE
;
7159
; 715903
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2009
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:Photo system based on scanning electron microscope for IC chip inspection
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Contributors:
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Conference:2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications ; 2008 ; Beijing,China
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Published in:Proc. SPIE ; 7159 ; 715903
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Publisher:
- New search for: SPIE
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Publication date:2009-01-13
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 71590A
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Micro amperometric immunosensor for the detection ofsalmonella typhimuriumSun, Jizhou / Xia, Shanhong / Bian, Chao / Qu, Lan et al. | 2009
- 71590C
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A novel resonant pressure sensor with boron diffused silicon resonatorWang, Junbo / Shi, Xiaojing / Liu, Lei / Wu, Zhengwei / Chen, Deyong / Zhao, Jinmin / Li, Shourong et al. | 2009
- 71590D
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The design and analysis of a robust micro-machined vibrating ring gyroscopeChen, Li / Chen, Deyong / Wang, Junbo et al. | 2009
- 71590E
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Studies on dielectrophoretic separation using biochips with different electrode shapesLiu, Yonghong / Zhao, Zhan / Xu, Jing / Pang, Cheng / Fang, Zhen / Du, Lidong et al. | 2009
- 71590F
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Fast matching location algorithm based on mixed moment for wire bondingKong, Fan zhi / Zhang, Xing zhou / Wang, Yi zhong / Zhang, Da wei / LI, Jun lan et al. | 2009
- 71590G
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Design of a self-adaptive fuzzy PID controller for piezoelectric ceramics micro-displacement systemZhang, Shuang / Zhong, Yuning / Xu, Zhongbao et al. | 2009
- 71590H
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Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizerYang, Ming-wei / Zhou, Zhao-ying et al. | 2009
- 71590I
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Finite element analysis of the RF MEMS switchZhao, Fu / Wang, Ping / Gong, Yanjue / Lv, Liang / Lei, Zhang et al. | 2009
- 71590J
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Characteristic analysis and study of an active matrix addressing for grating light modulatorJin, Zhu / Huang, Shanglian / Zhang, Zhihai / Wang, Ning / Wei, Wei / Zhang, Jie et al. | 2009
- 71590K
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High aspect ratio grating fabrication in SU-8 resist by UV-Curing nanoimprintWang, Xudi / Ge, Liangjin / Lu, Jingjing / Fu, Shaojun et al. | 2009
- 71590L
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The effective image denoising method for MEMS based IR image arraysDong, Liquan / Liu, Xiaohua / Zhao, Yuejin / Liu, Ming / Hui, Mei / Zhou, Xiaoxiao et al. | 2009
- 71590M
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Experimental study of roof filling rate during thermal bonding of polymer microchannel sealingWang, Xudi / Lu, Jingjing / Jiang, Yun / Ge, Liangjin / Fu, Shaojun et al. | 2009
- 71590N
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Analysis of a Hadamard transform near-infrared spectrometer based on grating light modulatorWei, Wei / Huang, Shanglian / Zhu, Yong / Wang, Ning / Zhang, Jie / Jin, Zhu et al. | 2009
- 71590O
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Design of the subwavelength dual-layer metallic nanowire-grid polarizerZhou, Yun / Ye, Yan / Shen, Su / Pu, Donglin / Chen, Linsen et al. | 2009
- 71590P
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Study on clamped-clamped beam in-plane capacitive resonatorsJin, Yingxia / Tang, Yaquan / Yu, Xiaomei et al. | 2009
- 71590Q
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Fabrication of 1-dimension nano-material-based device and its electrical characteristicsYang, Xing / Zhou, Zhaoying / Zheng, Fuzhong / Zhang, Min et al. | 2009
- 71590S
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Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devicesLi, Liwei / Zhu, Rong / Zhou, Zhaoying / Ren, Jianxing et al. | 2009
- 71590X
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Experiment on microstructure fabrication with UV-LIGA technologyZheng, Xiaohu et al. | 2009
- 715901
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Front Matter: Volume 7159| 2009
- 715902
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Design and studies of a quadrupolar dielectrophoresis chip integrated with detection electrodeLiu, Yonghong / Zhao, Zhan / Xu, Jing / Pang, Cheng / Fang, Zhen / Du, Lidong et al. | 2009
- 715903
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Photo system based on scanning electron microscope for IC chip inspectionLiu, Wei / Shen, Jin / Tan, Boxue et al. | 2009
- 715904
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The study of image inpainting for infrared imaging system based on micro-cantilever FPAGong, Cheng / Hui, Mei / Dong, Liquan / Liu, Xiaohua / Zhao, Yuejin et al. | 2009
- 715905
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Optimization of a novel structure for micromachined resonant pressure sensorShi, Xiaojing / Chen, Deyong / Wang, Junbo / Wu, Zhengwei et al. | 2009
- 715907
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A single cell penetration system by ultrasonic drivingZhou, Zhaoying / Xiao, Mingfei / Yang, Xing / Wu, Ting et al. | 2009
- 715908
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A micro hemoglobin-A1c immunosensor based on FET and electrochemical growth of gold nanoparticlesQu, Lan / Bian, Chao / Sun, Jizhou / Han, Jinghong / Xia, Shanhong et al. | 2009
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Finite element analysis of the RF MEMS switch [7159-04]Zhao, F. / Wang, P. / Gong, Y. / Lv, L. / Lei, Z. et al. | 2008
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Studies on dielectrophoretic separation using biochips with different electrode shapes [7159-15]Liu, Y. / Zhao, Z. / Xu, J. / Pang, C. / Fang, Z. / Du, L. et al. | 2008
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Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizer [7159-03]Yang, M. / Zhou, Z. et al. | 2008
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Design of a self-adaptive fuzzy PID controller for piezoelectric ceramics micro-displacement system [7159-02]Zhang, S. / Zhong, Y. / Xu, Z. et al. | 2008
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High aspect ratio grating fabrication in SU-8 resist by UV-curing nanoimprint [7159-12]Wang, X. / Ge, L. / Lu, J. / Fu, S. et al. | 2008
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Fast matching location algorithm based on mixed moment for wire bonding [7159-13]Kong, F. / Zhang, X. / Wang, Y. / Zhang, D. / Li, J. et al. | 2008
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Analysis of a Hadamard transform near-infrared spectrometer based on grating light modulator [7159-24]Wei, W. / Huang, S. / Zhu, Y. / Wang, N. / Zhang, J. / Jin, Z. et al. | 2008
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A novel resonant pressure sensor with boron diffused silicon resonator [7159-34]Wang, J. / Shi, X. / Liu, L. / Wu, Z. / Chen, D. / Zhao, J. / Li, S. et al. | 2008
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Characteristic analysis and study of an active matrix addressing for grating light modulator [7159-11]Jin, Z. / Huang, S. / Zhang, Z. / Wang, N. / Wei, W. / Zhang, J. et al. | 2008
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Experiment on microstructure fabrication with UV-LIGA technology [7159-30]Zheng, X. et al. | 2008
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Photo system based on scanning electron microscope for IC chip inspection [7159-01]Liu, W. / Shen, J. / Tan, B. et al. | 2008
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A single cell penetration system by ultrasonic driving [7159-09]Zhou, Z. / Xiao, M. / Yang, X. / Wu, T. et al. | 2008
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Design of the subwavelength dual-layer metallic nanowire-grid polarizer [7159-26]Zhou, Y. / Ye, Y. / Shen, S. / Pu, D. / Chen, L. et al. | 2008
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The effective image denoising method for MEMS based IR image arrays [7159-17]Dong, L. / Liu, X. / Zhao, Y. / Liu, M. / Hui, M. / Zhou, X. et al. | 2008
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Fabrication of 1-dimension nano-material-based device and its electrical characteristics [7159-40]Yang, X. / Zhou, Z. / Zheng, F. / Zhang, M. et al. | 2008
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The study of image inpainting for infrared imaging system based on micro-cantilever FPA [7159-05]Gong, C. / Hui, M. / Dong, L. / Liu, X. / Zhao, Y. et al. | 2008
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Optimization of a novel structure for micromachined resonant pressure sensor [7159-27]Shi, X. / Chen, D. / Wang, J. / Wu, Z. et al. | 2008
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Experimental study of roof filling rate during thermal bonding of polymer microchannel sealing [7159-18]Wang, X. / Lu, J. / Jiang, Y. / Ge, L. / Fu, S. et al. | 2008
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Study on clamped-clamped beam in-plane capacitive resonators [7159-39]Jin, Y. / Tang, Y. / Yu, X. et al. | 2008
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Design and studies of a quadrupolar dielectrophoresis chip integrated with detection electrode [7159-14]Liu, Y. / Zhao, Z. / Xu, J. / Pang, C. / Fang, Z. / Du, L. et al. | 2008
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Micro amperometric immunosensor for the detection of salmonella typhimurium [7159-22]Sun, J. / Xia, S. / Bian, C. / Qu, L. et al. | 2008
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The design and analysis of a robust micro-machined vibrating ring gyroscope [7159-32]Chen, L. / Chen, D. / Wang, J. et al. | 2008
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Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devices [7159-44]Li, L. / Zhu, R. / Zhou, Z. / Ren, J. et al. | 2008
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A micro hemoglobin-A1c immunosensor based on FET and electrochemical growth of gold nanoparticles [7159-23]Qu, L. / Bian, C. / Sun, J. / Han, J. / Xia, S. et al. | 2008