A new fabrication method for nano-gratings based on the high flexibility of PDMS (English)
- New search for: Cui, Min
- New search for: Zhang, Yong
- New search for: Zhang, Binzhen
- New search for: Wang, Wanjun
- New search for: Cui, Min
- New search for: Zhang, Yong
- New search for: Zhang, Binzhen
- New search for: Wang, Wanjun
In:
Proc. SPIE
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8616
; 86160Y
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2013
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:A new fabrication method for nano-gratings based on the high flexibility of PDMS
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Contributors:
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Conference:MOEMS and Miniaturized Systems XII ; 2013 ; San Francisco,California,USA
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Published in:Proc. SPIE ; 8616 ; 86160Y
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Publisher:
- New search for: SPIE
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Publication date:2013-03-13
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 86160A
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Optical scanners based on thermo-optical tuning of an integrated-optical waveguide modeMarkweg, E. / Hoffmann, M. et al. | 2013
- 86160C
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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanningHofmann, U. / Aikio, M. / Janes, J. / Senger, F. / Stenchly, V. / Weiss, M. / Quenzer, H.-J. / Wagner, B. / Benecke, W. et al. | 2013
- 86160D
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Position sensing and tracking with quasistatic MEMS mirrorsRichter, S. / Stutz, M. / Gratzke, A. / Schleitzer, Y. / Krampert, G. / Hoeller, F. / Wolf, U. / Riedel, L. / Doering, D. et al. | 2013
- 86160E
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Aluminum nitride supported 1D micromirror with static rotation angle >11°Weinberger, Stefan / Hoffmann, Martin et al. | 2013
- 86160F
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Wide steering angle microscanner based on curved surfaceSabry, Yasser / Khalil, Diaa / Saadany, Bassam / Bourouina, Tarik et al. | 2013
- 86160G
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SOI based electromagnetic MEMS scanners and applications in laser systemsBrown, G. / Bauer, R. / Lubeigt, W. / Uttamchandani, D. et al. | 2013
- 86160H
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Arrayed beam steering device for advanced 3D displaysBae, Jungmok / Choi, Yoon-Sun / Choi, Kyuhwan / Kim, Yunhee / Kwon, Yongjoo / Song, Hoon / Kim, Eoksu / Choi, Seungyeol / Lee, Junghoon / Lee, Sangyoon et al. | 2013
- 86160I
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2D electrostatic micromirror array with high field factor for high-power applicationLani, S. / Bayat, D. / Pétremand, Y. et al. | 2013
- 86160J
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Fabrication of vertical moving micro-optical switch for display applicationsShim, Dongsik / Kim, Woonbae / Choi, Hyung et al. | 2013
- 86160K
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Development of a fully programmable MEMS diffraction gratingZamkotsian, F. / Timotijevic, B. / Lockhart, R. / Stanley, R. P. / Lanzoni, P. / Luetzelschwab, M. / Canonica, M. / Noel, W. / Tormen, M. et al. | 2013
- 86160L
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Design and characterization of a hybrid-integrated MEMS scanning grating spectrometerGrüger, Heinrich / Knobbe, Jens / Pügner, Tino / Schenk, Harald et al. | 2013
- 86160M
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SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensorsBonneville, Christophe / Thomas, Fabrice / de Mengin Poirier, Mikhael / Le Coarer, Etienne / Benech, Pierre / Gonthiez, Thierry / Morand, Alain / Coutant, Olivier / Morino, Eric / Puget, Renaud et al. | 2013
- 86160N
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Fabrication and evaluation of a 500 W cladding-light stripperKliner, A. / Hou, Kai-Chung / Plötner, M. / Hupel, Ch. / Stelzner, Th. / Schreiber, T. / Eberhardt, R. / Tünnermann, A. et al. | 2013
- 86160O
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Spatial beam splitting for fully integrated MEMS interferometerKhirallah, Kareem / Ramsis, Inas / Serry, Mohamed / Swillam, Mohamed / Sedky, Sherif et al. | 2013
- 86160P
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In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirrorSabry, Yasser / Bourouina, Tarik / Saadany, Bassam / Khalil, Diaa et al. | 2013
- 86160Q
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A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuatorTian, Feng / Zhou, Guangya / Chau, Fook Siong / Deng, Jie / Akkipeddi, Ramam / Tang, Xiaosong / Teo, Siew Lang / Loke, Yee Cheong et al. | 2013
- 86160R
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Compact holographic printer using RGB waveguide holographic optical elementsPyun, Kyungsuk P. / Choi, Chilsung / Morozov, Alexander V. / Kim, Sunil / An, Jungkwuen et al. | 2013
- 86160T
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Innovative approach to high stroke electrostatic actuatorsLange, N. / Wippermann, F. / Beckert, E. / Eberhardt, R. / Tünnermann, A. et al. | 2013
- 86160U
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Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beamsSuresh, V. Gowri / Bhattacharya, Shanti / Dasgupta, Nandita et al. | 2013
- 86160V
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Optimization of biogas production using MEMS based near infrared inline-sensorSaupe, Ray / Seider, Thomas / Stock, Volker / Kujawski, Olaf / Otto, Thomas / Gessner, Thomas et al. | 2013
- 86160X
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InGaAsP optical device integration on SOI platform by Ar/O2plasma assisted bondingHigo, A. / Li, L. / Higurashi, E. / Sugiyama, M. / Nakano, Y. et al. | 2013
- 86160Y
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A new fabrication method for nano-gratings based on the high flexibility of PDMSCui, Min / Zhang, Yong / Zhang, Binzhen / Wang, Wanjun et al. | 2013
- 86160Z
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Development of a focusing micromirror device with an in-plane stress relief structure in SOI technologyKronast, Wolfgang / Mescheder, Ulrich / Müller, Bernhard / Huster, Rolf et al. | 2013
- 861601
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Front Matter: Volume 8616| 2013
- 861602
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Towards future systems with nano-optics contributionsKaminska, Bozena / Najiminaini, Mohamadreza / Chuo, Yindar / Landrock, Clint / Omrane, Badr / Carson, Jeffrey J. L. et al. | 2013
- 861603
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MOEMS pressure sensors for geothermal well monitoringChallener, William / Palit, Sabarni / Jones, Roger / Airey, Li / Craddock, Russell / Knobloch, Aaron et al. | 2013
- 861604
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Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomographyLee, Seungwan / Choi, Minseog / Lee, Eunsung / Jung, Kyu-Dong / Chang, Jong-hyeon / Kim, Woonbae et al. | 2013
- 861605
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3D micro-optical lens scanner made by multi-wafer bonding technologyBargiel, S. / Gorecki, C. / Barański, M. / Passilly, N. / Wiemer, M. / Jia, C. / Frömel, J. et al. | 2013
- 861606
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Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imagingMu, Xiaojing / Zhou, Guangya / Yu, Hongbin / Tsai, Julius Ming-Lin / Neo, Wee Keong / Kumar, A Senthil / Chau, Fook Siong et al. | 2013
- 861607
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A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applicationsHuang, Chih-Hsien / Yao, Junjie / Wang, Lihong V. / Zou, Jun et al. | 2013
- 861610
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Development of adaptive liquid microlenses and microlens arraysBerry, Shaun R. / Stewart, Jason B. / Thorsen, Todd A. / Guha, Ingrid et al. | 2013
- 861611
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Tunable cylindrical microlenses based on aluminum nitride membranesLeopold, Steffen / Paetz, Daniel / Knoebber, Fabian / Ambacher, Oliver / Sinzinger, Stefan / Hoffmann, Martin et al. | 2013
- 861612
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Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steeringBerge, Bruno / Broutin, Jérôme / Gaton, Hilario / Malet, Géraldine / Simon, Eric / Thieblemont, Florent et al. | 2013
- 861613
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The fabrication of out of plane aspherical microlens arraysZhang, Yong / Wang, Wanjun et al. | 2013
- 861614
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MOEMS-based time-of-flight camera for 3D video capturingYou, Jang-Woo / Park, Yong-Hwa / Cho, Yong-Chul / Park, Chang-Young / Yoon, Heesun / Lee, Sang-Hun / Lee, Seung-Wan et al. | 2013
- 861615
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Simultaneous multispectral imaging using lenslet arraysHinnrichs, Michele / Jensen, James et al. | 2013
- 861616
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Batch fabrication of micro-optical sensing and imaging devicesWippermann, F. C. / Reimann, A. / Oelschläger, A. / Dannberg, P. / Blöhbaum, F. / Koburg, C. / Köhler, T. et al. | 2013
- 861617
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Diffraction and photometric limits in today's miniature digital camera systemsBrückner, Andreas / Schöberl, Michael et al. | 2013
- 861618
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Optical MEMS in space instruments for Earth observation and astronomyZamkotsian, F. / Liotard, A. / Lanzoni, P. / Viard, T. et al. | 2013
- 861619
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Closed-loop control driver for quasi-static MOEMS mirrorsTortschanoff, A. / Holzmann, D. / Lenzhofer, M. / Sandner, T. / Kenda, A. et al. | 2013
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SOI based electromagnetic MEMS scanners and applications in laser systems [8616-14]Brown, G. / Bauer, R. / Lubeigt, W. / Uttamchandani, D. / SPIE (Society) et al. | 2013
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2D electrostatic micromirror array with high field factor for high-power application [8616-16]Lani, S. / Bayat, D. / Petremand, Y. / SPIE (Society) et al. | 2013
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Tunable cylindrical microlenses based on aluminum nitride membranes [8616-37]Leopold, S. / Paetz, D. / Knoebber, F. / Ambacher, O. / Sinzinger, S. / Hoffmann, M. / SPIE (Society) et al. | 2013
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Optical MEMS in space instruments for Earth observation and astronomy [8616-44]Zamkotsian, F. / Liotard, A. / Lanzoni, P. / Viard, T. / SPIE (Society) et al. | 2013
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Wide steering angle microscanner based on curved surface (Best Student Paper Award) [8616-13]Sabry, Y. / Khalil, D. / Saadany, B. / Bourounia, T. / SPIE (Society) et al. | 2013
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Optimization of biogas production using MEMS based near infrared inline-sensor [8616-30]Saupe, R. / Seider, T. / Stock, V. / Kujawski, O. / Otto, T. / Gessner, T. / SPIE (Society) et al. | 2013
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Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomography [8616-1]Lee, S. / Choi, M. / Lee, E. / Jung, K.-D. / Chang, J. / Kim, W. / SPIE (Society) et al. | 2013
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3D micro-optical lens scanner made by multi-wafer bonding technology [8616-2]Bargiel, S. / Gorecki, C. / Baranski, M. / Passilly, N. / Wiemer, M. / Jia, C. / Fromel, J. / SPIE (Society) et al. | 2013
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Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imaging [8616-3]Mu, X. / Zhou, G. / Yu, H. / Tsai, J.M.-L. / Neo, W.K. / Kumar, A.S. / Chau, F.S. / SPIE (Society) et al. | 2013
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MOEMS pressure sensors for geothermal well monitoring (Plenary Paper) [8616-102]Challener, W. / Palit, S. / Jones, R. / Airey, L. / Craddock, R. / Knobloch, A. / SPIE (Society) et al. | 2013
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Arrayed beam steering device for advanced 3D displays (Invited Paper) [8616-15]Bae, J. / Choi, Y.-S. / Choi, K. / Kim, Y. / Kwon, Y. / Song, H. / Kim, E. / Choi, S. / Lee, J. / Lee, S. et al. | 2013
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A new fabrication method for nano-gratings based on the high flexibility of PDMS [8616-33]Cui, M. / Zhang, Y. / Zhang, B. / Wang, W. / SPIE (Society) et al. | 2013
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SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensors (Invited Paper) [8616-20]Bonneville, C. / Thomas, F. / de Mengin Poirier, M. / Le Coarer, E. / Benech, P. / Gonthiez, T. / Morand, A. / Coutant, O. / Morino, E. / Puget, R. et al. | 2013
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Development of adaptive liquid microlenses and microlens arrays [8616-35]Berry, S.R. / Stewart, J.B. / Thorsen, T.A. / Guha, I. / SPIE (Society) et al. | 2013
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Simultaneous multispectral imaging using lenslet arrays [8616-41]Hinnrichs, M. / Jensen, J. / SPIE (Society) et al. | 2013
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Position sensing and tracking with quasistatic MEMS mirrors (Invited Paper) [8616-11]Richter, S. / Stutz, M. / Gratzke, A. / Schleitzer, Y. / Krampert, G. / Hoeller, F. / Wolf, U. / Riedel, L. / Doering, D. / SPIE (Society) et al. | 2013
-
Aluminum nitride supported 1D micromirror with static rotation angle >11^o [8616-12]Weinberger, S. / Hoffmann, M. / SPIE (Society) et al. | 2013
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Compact holographic printer using RGB waveguide holographic optical elements (Invited Paper) [8616-25]Pyun, K.P. / Choi, C. / Morozov, A.V. / Kim, S. / An, J. / SPIE (Society) et al. | 2013
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Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beams [8616-28]Suresh, V.G. / Bhattacharya, S. / Dasgupta, N. / SPIE (Society) et al. | 2013
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Development of a fully programmable MEMS diffraction grating [8616-18]Zamkotsian, F. / Timotijevic, B. / Lockhart, R. / Stanley, R.P. / Lanzoni, P. / Luetzelschwab, M. / Canonica, M. / Noel, W. / Tormen, M. / SPIE (Society) et al. | 2013
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Spatial beam splitting for fully integrated MEMS interferometer [8616-22]Khirallah, K. / Ramsis, I. / Serry, M. / Swillam, M. / Sedky, S. / SPIE (Society) et al. | 2013
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InGaAsP optical device integration on SOI platform by Ar/O~2 plasma assisted bonding [8616-32]Higo, A. / Li, L. / Higurashi, E. / Sugiyama, M. / Nakano, Y. / SPIE (Society) et al. | 2013
-
Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode [8616-7]Markweg, E. / Hoffmann, M. / SPIE (Society) et al. | 2013
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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning (Best Paper Award) [8616-9]Hofmann, U. / Aikio, M. / Janes, J. / Senger, F. / Stenchly, V. / Weiss, M. / Quenzer, H.-J. / Wagner, B. / Benecke, W. / SPIE (Society) et al. | 2013
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Fabrication and evaluation of a 500 W cladding-light stripper [8616-21]Kliner, A. / Hou, K.-C. / Plotner, M. / Hupel, C. / Stelzner, T. / Schreiber, T. / Eberhardt, R. / Tunnermann, A. / SPIE (Society) et al. | 2013
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Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer (Invited Paper) [8616-19]Gruger, H. / Knobbe, J. / Pugner, T. / Schenk, H. / SPIE (Society) et al. | 2013
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In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror [8616-23]Sabry, Y. / Bourounia, T. / Saadany, B. / Khalil, D. / SPIE (Society) et al. | 2013
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Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology [8616-34]Kronast, W. / Mescheder, U. / Muller, B. / Huster, R. / SPIE (Society) et al. | 2013
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Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steering [8616-38]Berge, B. / Broutin, J. / Gaton, H. / Malet, G. / Simon, E. / Thieblemont, F. / SPIE (Society) et al. | 2013
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MOEMS-based time-of-flight camera for 3D video capturing (Invited Paper) [8616-40]You, J.-W. / Park, Y.-H. / Cho, Y.-C. / Park, C.-Y. / Yoon, H. / Lee, S.-H. / Lee, S.-W. / SPIE (Society) et al. | 2013
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Batch fabrication of micro-optical sensing and imaging devices [8616-42]Wippermann, F.C. / Reimann, A. / Oelschlager, A. / Dannberg, P. / Blohbaum, F. / Koburg, C. / Kohler, T. / SPIE (Society) et al. | 2013
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Diffraction and photometric limits in today's miniature digital camera systems [8616-43]Bruckner, A. / Schoberl, M. / SPIE (Society) et al. | 2013
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Towards future systems with nano-optics contributions (Plenary Paper) [8616-101]Kaminska, B. / Najiminaini, M. / Chuo, Y. / Landrock, C. / Omrane, B. / Carson, J.J.L. / SPIE (Society) et al. | 2013
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A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications [8616-4]Huang, C.-H. / Yao, J. / Wang, L.V. / Zou, J. / SPIE (Society) et al. | 2013
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The fabrication of out of plane aspherical microlens arrays [8616-39]Zhang, Y. / Wang, W. / SPIE (Society) et al. | 2013
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Fabrication of vertical moving micro-optical switch for display applications [8616-17]Shim, D. / Kim, W. / Choi, H. / SPIE (Society) et al. | 2013
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A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator [8616-24]Tian, F. / Zhou, G. / Chau, F.S. / Deng, J. / Akkipeddi, R. / Tang, X. / Teo, S.L. / Loke, Y.C. / SPIE (Society) et al. | 2013
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Innovative approach to high stroke electrostatic actuators [8616-27]Lange, N. / Wippermann, F. / Beckert, E. / Eberhardt, R. / Tunnermann, A. / SPIE (Society) et al. | 2013
-
Closed-loop control driver for quasi-static MOEMS mirrors [8616-45]Tortschanoff, A. / Holzmann, D. / Lenzhofer, M. / Sandner, T. / Kenda, A. / SPIE (Society) et al. | 2013