Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2thin film in 3D-integration (English)
- New search for: Lehmkau, R.
- New search for: Mutschall, D.
- New search for: Kaiser, A.
- New search for: Ebermann, M.
- New search for: Neumann, N.
- New search for: Czernohorsky, M.
- New search for: Neuber, M.
- New search for: Hiller, K.
- New search for: Seiler, J.
- New search for: Großmann, T. D.
- New search for: Lehmkau, R.
- New search for: Mutschall, D.
- New search for: Kaiser, A.
- New search for: Ebermann, M.
- New search for: Neumann, N.
- New search for: Czernohorsky, M.
- New search for: Neuber, M.
- New search for: Hiller, K.
- New search for: Seiler, J.
- New search for: Großmann, T. D.
In:
Proc. SPIE
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12002
; 120020M
;
2022
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2thin film in 3D-integration
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Contributors:Lehmkau, R. ( author ) / Mutschall, D. ( author ) / Kaiser, A. ( author ) / Ebermann, M. ( author ) / Neumann, N. ( author ) / Czernohorsky, M. ( author ) / Neuber, M. ( author ) / Hiller, K. ( author ) / Seiler, J. ( author ) / Großmann, T. D. ( author )
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Conference:Oxide-based Materials and Devices XIII ; 2022 ; San Francisco,California,United States
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Published in:Proc. SPIE ; 12002 ; 120020M
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Publisher:
- New search for: SPIE
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Publication date:2022-03-05
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 120020A
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- 120020B
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First-principles studies of diffusion in gallium oxideWang, Mengen / Mu, Sai / Van de Walle, Chris et al. | 2022
- 120020C
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Sputtering platform for double-sided precision optical coatingsSchneider, Michael / Bruns, Stefan / Galonska, Kristin / Vergöhl, Michael / Henning, Philipp / Melzig, Thomas et al. | 2022
- 120020D
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- 120020E
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Enhanced nonlinear optics in nanowires, waveguides, and ring resonators integrated with graphene oxide filmsZhang, Yuning / Wu, Jiayang / Qu, Yang / Yang, Yunyi / Sun, Yang / Jia, Linnan / Jia, Baohua / Moss, David J. et al. | 2022
- 120020F
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Synthesis and characterization of semiconducting oxide nanoparticles and hybrid composites with energy-related applicationsVázquez-López, Antonio / García-Alonso, Javier / Nahirniak, Svitlana / Bartolomé, Javier / Ramírez-Castellanos, Julio / Maestre, David / Saruhan, Bilge / Cremades, Ana et al. | 2022
- 120020G
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Investigation of dynamic optical processes of tapered silicon pillarsKalem, Seref et al. | 2022
- 120020H
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Structural properties and absorption band edge tunability in ZnMnO by metal-organic chemical vapor deposition and atomic layer depositionSaravade, Vishal / Ghods, Amirhossein / Manzoor, Zahra / Zhou, Chuanle / Lu, Na / Klein, Benjamin / Ferguson, Ian et al. | 2022
- 120020I
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Polarization-resolved photoluminescence study of an atom probe tip containing a ZnO-(Mg,Zn)O heterostructureDalapati, P. / Weikum, E. M. / Beainy, G. / Di Russo, E. / Houard, J. / Moldovan, S. / Vella, A. / Chauveau, J. M. / Hugues, M. / Le Biavan, N. et al. | 2022
- 120020J
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Nanostructures wetting evaluation using ultra high frequency ultrasoundSalhab, A. / Carlier, J. / Toubal, M. / Campistron, P. / Neyens, M. / Nongaillard, B. / Thomy, V. et al. | 2022
- 120020K
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Investigation of transition metal-doped zinc oxide for spintronicsSaravade, Vishal / Zhou, Chuanle / Lu, Na / Klein, Benjamin / Ferguson, Ian et al. | 2022
- 120020L
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Second harmonic generation in multiferroic BaTiO3-BiFeO3film and nanorod arrays grown on Si substrateMudiyanselage, Rathsara R. H. H. / Smith, Nicholas W. G. / Magill, Brenden A. / Kang, Min Gyu / Priya, Shashank / Khodaparast, Giti A. et al. | 2022
- 120020M
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Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2thin film in 3D-integrationLehmkau, R. / Mutschall, D. / Kaiser, A. / Ebermann, M. / Neumann, N. / Czernohorsky, M. / Neuber, M. / Hiller, K. / Seiler, J. / Großmann, T. D. et al. | 2022
- 120020N
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Electron plasma parameters of oxide-based silver crystalsNetesova, Nadezhda P. / Arakelyan, Sarkis R. / Arakelyan, Ekaterina A. et al. | 2022
- 120020O
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Metal oxide nanoparticles incorporated mesoporous silica nanospheres for oxygen scavengingAhmad, Ishaq / Lo, Po Shan / Khaleed, Abdul / Djurišic, Aleksandra / He, Yanling / Ng, Alan Man Ching et al. | 2022
- 120020P
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Characterizations of tin oxide thin films prepared by different methods for perovskite solar cell applicationsLin, Jingyang / He, Yanling / Chen, Wei / Ng, Alan Man Ching / Djurišić, Aleksandra B. et al. | 2022
- 1200201
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Front Matter: Volume 12002| 2022
- 1200202
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Semiconductor plasmonics and metamaterials for IR applicationsLoren, P. / Fehlen, P. / Guise, J. / Barho, F. / Najem, M. / Gonzalez-Posada-Flores, F. / Blin, S, / Cerutti, L. / Smaali, R. / Centeno, E. et al. | 2022
- 1200203
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Coupling of localized surface plasmons to intersubband transitions in CdO/GaAsHierro, Adrian / Martinez Castellano, Eduardo / Tamayo-Arriola, Julen / Gonzalo, Alicia / Stanojević, Lazar / Ulloa, Jose M. / Klymov, Oleksii / Yeste, Javier / Agouram, Said / Muñoz, Elias et al. | 2022
- 1200204
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Electrochromic photonic devices for nanoplasmonic transmission modulationHopmann, Eric / Shahriar, Basem Y. / Carnio, Brett N. / Firby, Curtis J. / Elezzabi, Abdulhakem Y. et al. | 2022
- 1200205
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Growth and defect characterization of doped and undoped β-Ga2O3crystalsMcCloy, John S. / Jesenovec, Jani / Dutton, Benjamin L. / Pansegrau, Christopher / Remple, Cassandra / Weber, Marc H. / Swain, Santosh / McCluskey, Matthew / Scarpulla, Michael et al. | 2022
- 1200206
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Conduction properties and threshold voltage instability in β-Ga2O3MOSFETsFregolent, Manuel / Brusaterra, Enrico / De Santi, Carlo / Tetzner, Kornelius / Würfl, Joachim / Meneghesso, Gaudenzio / Zanoni, Enrico / Meneghini, Matteo et al. | 2022
- 1200207
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Effect of high-energy electron irradiation on the electronic properties of β-gallium oxideDang, Thi-Huong / Konczykowski, Marcin / Safarov, Viatcheslav I. / Hammou, Elie / Romero Vega, Lucia / Ollier, Nadège / Grasset, Romain / Alessi, Antonino / Drouhin, Henri-Jean / Jaffrès, Henri et al. | 2022
- 1200208
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Ultralow-power deep-ultraviolet photodetection using oxide-nitride heterojunctions integrated on siliconAlfaraj, Nasir / Li, Kuang-Hui / Kang, Chun Hong / Braic, Laurentiu / Zoita, Nicolae Catalin / Kiss, Adrian Emil / Ng, Tien Khee / Ooi, Boon S. et al. | 2022
- 1200209
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Deep levels and conduction processes in nitrogen-implanted Ga2O3Schottky barrier diodesDe Santi, C. / Fregolent, M. / Buffolo, M. / Higashiwaki, M. / Meneghesso, G. / Zanoni, E. / Meneghini, M. et al. | 2022