Optimizing Light-Source Aperture for Off-Axis Illumination in Optical Nanolithography: Theoretical Consideration (English)
- New search for: Ivin, V. V.
- New search for: Makhviladze, T. M.
- New search for: Valiev, K. A.
- New search for: Ivin, V. V.
- New search for: Makhviladze, T. M.
- New search for: Valiev, K. A.
In:
Russian Microelectronics
;
33
, 3
;
127-136
;
2004
- Article (Journal) / Electronic Resource
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Title:Optimizing Light-Source Aperture for Off-Axis Illumination in Optical Nanolithography: Theoretical Consideration
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Contributors:
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Published in:Russian Microelectronics ; 33, 3 ; 127-136
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Publisher:
- New search for: Kluwer Academic Publishers-Plenum Publishers
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Place of publication:New York
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Publication date:2004-05-01
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Size:10 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 33, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 127
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Optimizing Light-Source Aperture for Off-Axis Illumination in Optical Nanolithography: Theoretical ConsiderationIvin, V. V. / Makhviladze, T. M. / Valiev, K. A. et al. | 2004
- 137
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Pore Sealing on Si(001) and Si(111) in Homoepitaxy and Annealing: A Monte Carlo SimulationZverev, A. V. / Neizvestny, I. G. / Chemakin, A. V. / Shwartz, N. L. / Yanovitskaya, Z. Sh. et al. | 2004
- 147
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Phase Formation in Ti–Co–N/CoSi x /Si(100) and Ti–Co–Si–N/CoSi x /Si(100) Systems by Diffusion Reactions: The Role of NitrogenVasiliev, A. G. / Vasiliev, A. L. / Zakharov, R. A. / Orlikovsky, A. A. / Horin, I. A. / Eindou, M. et al. | 2004
- 152
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Majority-Carrier Lifetime in the Potential Barrier of an MIS Capacitor under Monopolar ConditionsPenin, N. A. et al. | 2004
- 159
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Effect of Surface Roughness on Quantum Carrier Transport in Ultrathin FilmsAnaniev, S. D. / V'yurkov, V. V. / Orlikovsky, A. A. et al. | 2004
- 165
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ZnO Thin Films with Hole Conduction Produced by N+ Ion Implantation and Oxygen-Radical AnnealingGeorgobiani, A. N. / Gruzintsev, A. N. / Volkov, V. T. / Vorob'ev, M. O. / Dravin, V. A. et al. | 2004
- 165
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ZnO thin film with hole conduction produced by N+ ion implantation and oxygen-radical annealingGeorgobiani, A.N. / Gruzintsev, A.N. / Volkov, V.T. / Vorobev, M.O. / Dravin, V.A. et al. | 2004
- 169
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Anisotropic Etching of SiO2 in High-Voltage Gas-Discharge PlasmasKazanskii, N. L. / Kolpakov, V. A. / Kolpakov, A. I. et al. | 2004
- 183
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Circuit-Design Techniques of Radiation Hardening for Monolithic Op AmpsAgakhanyan, T. M. et al. | 2004
- 188
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Power Consumption of Asymptotically Adiabatic Static Logic GatesLosev, V. V. / Starosel'skii, V. I. et al. | 2004