Defect-Selective Etching of Semiconductors (English)
- New search for: Weyher, Jan L.
- New search for: Kelly, John J.
- New search for: Weyher, Jan L.
- New search for: Kelly, John J.
In:
Springer Handbook of Crystal Growth
;
1453-1476
;
2010
- Article/Chapter (Book) / Electronic Resource
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Title:Defect-Selective Etching of Semiconductors
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Contributors:Weyher, Jan L. ( author ) / Kelly, John J. ( author )
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Published in:Springer Handbook of Crystal Growth ; 1453-1476Springer Handbooks ; 1453-1476
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Publisher:
- New search for: Springer Berlin Heidelberg
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Place of publication:Berlin, Heidelberg
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Publication date:2010-01-01
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Size:24 pages
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ISBN:
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ISSN:
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DOI:
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Type of media:Article/Chapter (Book)
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Type of material:Electronic Resource
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Language:English
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Keywords:Etch Rate , Electrochemical Etching , Multiple Quantum Well , Liquid Encapsulate Czochralski , Inversion DomainPhysics , Solid State Physics , Physical Chemistry , Theoretical and Applied Mechanics , Spectroscopy and Microscopy , Crystallography and Scattering Methods , Materials Science, general , Defect-Selective Etching of Semiconductors , Semiconductors , Defect-selective etching , Photoetching , Wide-bandgap semiconductors , Defect inspection
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Source:
Table of contents eBook
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3
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Crystal Growth Techniques and Characterization: An OverviewDhanaraj, Govindhan / Byrappa, Kullaiah / Prasad, Vishwanath (Vish) / Dudley, Michael et al. | 2010
- 17
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Nucleation at SurfacesMarkov, Ivan V. et al. | 2010
- 53
-
Morphology of Crystals Grown from SolutionsAbbona, Francesco / Aquilano, Dino et al. | 2010
- 93
-
Generation and Propagation of Defects During Crystal GrowthKlapper, Helmut et al. | 2010
- 133
-
Single Crystals Grown Under Unconstrained ConditionsSunagawa, Ichiro et al. | 2010
- 159
-
Defect Formation During Crystal Growth from the MeltRudolph, Peter et al. | 2010
- 205
-
Indium Phosphide: Crystal Growth and Defect Control by Applying Steady Magnetic FieldsBliss, David F. et al. | 2010
- 231
-
Czochralski Silicon Single Crystals for Semiconductor and Solar Cell ApplicationsKakimoto, Koichi et al. | 2010
- 245
-
Czochralski Growth of Oxide Photorefractive CrystalsDiéguez, Ernesto / Plaza, Jose Luis / Aggarwal, Mohan D. / Batra, Ashok K. et al. | 2010
- 281
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Bulk Crystal Growth of Ternary III–V SemiconductorsDutta, Partha S. et al. | 2010
- 327
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Growth and Characterization of Antimony-Based Narrow-Bandgap III–V Semiconductor Crystals for Infrared Detector ApplicationsDixit, Vijay K. / Bhat, Handady L. et al. | 2010
- 367
-
Crystal Growth of Oxides by Optical Floating Zone TechniqueDabkowska, Hanna A. / Dabkowski, Antoni B. et al. | 2010
- 393
-
Laser-Heated Pedestal Growth of Oxide FibersAndreeta, Marcello R.B. / Hernandes, Antonio Carlos et al. | 2010
- 433
-
Synthesis of Refractory Materials by Skull Melting TechniqueOsiko, Vyacheslav V. / Borik, Mikhail A. / Lomonova, Elena E. et al. | 2010
- 479
-
Crystal Growth of Laser Host Fluorides and OxidesLi, Hongjun / Xu, Jun et al. | 2010
- 509
-
Shaped Crystal GrowthTatartchenko, Vitali A. et al. | 2010
- 559
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Bulk Single Crystals Grown from Solution on Earth and in MicrogravityAggarwal, Mohan D. / Batra, Ashok K. / Lal, Ravindra B. / Penn, Benjamin G. / Frazier, Donald O. et al. | 2010
- 599
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Hydrothermal Growth of Polyscale CrystalsByrappa, Kullaiah et al. | 2010
- 655
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Hydrothermal and Ammonothermal Growth of ZnO and GaNCallahan, Michael J. / Chen, Qi-Sheng et al. | 2010
- 691
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Stoichiometry and Domain Structure of KTP-Type Nonlinear Optical CrystalsRoth, Michael et al. | 2010
- 725
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High-Temperature Solution Growth: Application to Laser and Nonlinear Optical CrystalsCarvajal, Joan J. / Pujol, Maria Cinta / Díaz, Francesc et al. | 2010
- 759
-
Growth and Characterization of KDP and Its AnalogsWang, Sheng-Lai / Sun, Xun / Tao, Xu-Tang et al. | 2010
- 797
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Growth and Characterization of Silicon Carbide CrystalsDhanaraj, Govindhan / Raghothamachar, Balaji / Dudley, Michael et al. | 2010
- 821
-
AlN Bulk Crystal Growth by Physical Vapor TransportDalmau, Rafael / Sitar, Zlatko et al. | 2010
- 845
-
Growth of Single-Crystal Organic SemiconductorsKloc, Christian / Siegrist, Theo / Pflaum, Jens et al. | 2010
- 869
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Growth of III-Nitrides with Halide Vapor Phase Epitaxy (HVPE)Hemmingsson, Carl / Monemar, Bo / Kumagai, Yoshinao / Koukitu, Akinori et al. | 2010
- 897
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Growth of Semiconductor Single Crystals from Vapor PhaseDhanasekaran, Ramasamy et al. | 2010
- 939
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Epitaxial Growth of Silicon Carbide by Chemical Vapor DepositionBhat, Ishwara B. et al. | 2010
- 967
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Liquid-Phase Electroepitaxy of SemiconductorsDost, Sadik et al. | 2010
- 999
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Epitaxial Lateral Overgrowth of SemiconductorsZytkiewicz, Zbigniew R. et al. | 2010
- 1041
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Liquid-Phase Epitaxy of Advanced MaterialsKlemenz Rivenbark, Christine F. et al. | 2010
- 1069
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Molecular-Beam Epitaxial Growth of HgCdTeGarland, James W. / Sivananthan, Sivalingam et al. | 2010
- 1133
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Metalorganic Vapor-Phase Epitaxy of Diluted Nitrides and Arsenide Quantum DotsPohl, Udo W. et al. | 2010
- 1153
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Formation of SiGe Heterostructures and Their PropertiesShiraki, Yasuhiro / Sakai, Akira et al. | 2010
- 1193
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Plasma Energetics in Pulsed Laser and Pulsed Electron DepositionStrikovski, Mikhail D. / Kim, Jeonggoo / Kolagani, Solomon H. et al. | 2010
- 1215
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Convection and Control in Melt Growth of Bulk CrystalsLan, Chung-Wen et al. | 2010
- 1243
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Vapor Growth of III NitridesCai, Dang / Zheng, Lili / Zhang, Hui et al. | 2010
- 1281
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Continuum-Scale Quantitative Defect Dynamics in Growing Czochralski Silicon CrystalsKulkarni, Milind S. et al. | 2010
- 1335
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Models for Stress and Dislocation Generation in Melt Based Compound Crystal GrowthPrasad, Vishwanath (Vish) / Pendurti, Srinivas et al. | 2010
- 1379
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Mass and Heat Transport in BS and EFG SystemsGeorge, Thomas F. / Balint, Stefan / Braescu, Liliana et al. | 2010
- 1405
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Crystalline Layer Structures with X-Ray DiffractometryFewster, Paul F. et al. | 2010
- 1425
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X-Ray Topography Techniques for Defect Characterization of CrystalsRaghothamachar, Balaji / Dudley, Michael / Dhanaraj, Govindhan et al. | 2010
- 1453
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Defect-Selective Etching of SemiconductorsWeyher, Jan L. / Kelly, John J. et al. | 2010
- 1477
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Transmission Electron Microscopy Characterization of CrystalsBai, Jie / Wang, Shixin / Wang, Lu-Min / Dudley, Michael et al. | 2010
- 1521
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Electron Paramagnetic Resonance Characterization of Point DefectsZvanut, Mary E. et al. | 2010
- 1551
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Defect Characterization in Semiconductors with Positron Annihilation SpectroscopyTuomisto, Filip et al. | 2010
- 1583
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Protein Crystal Growth MethodsGutiérrez-Quezada, Andrea E. / Arreguín-Espinosa, Roberto / Moreno, Abel et al. | 2010
- 1607
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Crystallization from GelsNarayana Kalkura, S. / Natarajan, Subramanian et al. | 2010
- 1637
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Crystal Growth and Ion Exchange in Titanium SilicatesCelestian, Aaron J. / Parise, John B. / Clearfield, Abraham et al. | 2010
- 1663
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Single-Crystal Scintillation MaterialsNikl, Martin / Vedda, Anna / Laguta, Valentin V. et al. | 2010
- 1701
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Silicon Solar Cells: Materials, Devices, and ManufacturingNarayanan, Mohan / Ciszek, Ted et al. | 2010
- 1719
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Wafer Manufacturing and Slicing Using WiresawKao, Imin / Chung, Chunhui / Moreno Rodriguez, Roosevelt et al. | 2010