Selective area growth of InP and InGaAs layers on SiO2-masked substrate by chemical beam epitaxy (English)
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- New search for: Iga, R.
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- New search for: Sugiura, H.
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In:
Japanese Journal of Applied Physics, Part 2
;
30
, 6B
;
L1089-L1091
;
1991
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ISSN:
- Article (Journal) / Print
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Title:Selective area growth of InP and InGaAs layers on SiO2-masked substrate by chemical beam epitaxy
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Additional title:Selektives Flächenwachstum von InP- und InGaAs-Schichten auf SiO2-maskiertem Substrat durch Chemiestrahlepitaxie
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Contributors:
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Published in:Japanese Journal of Applied Physics, Part 2 ; 30, 6B ; L1089-L1091
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Publisher:
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Publication date:1991
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:INGAAS (INDIUM-GALLIUM-ARSENID) , HALBLEITERWERKSTOFF , STRUKTURANALYSE , DUENNE SCHICHT , SCHICHTSTRUKTUR , SUBSTRATTEMPERATUR , SELEKTIVITAET , MASKE , MASKENTECHNIK , HALBLEITERSCHICHT , EPITAXIALWACHSTUM , MOLEKULARSTRAHLEPITAXIE , INDIUMPHOSPHID , ARSENID , INDIUM , GALLIUM , ELEKTRONENMIKROSKOP , SILICIUMDIOXID , KATHODOLUMINESZENZ , DREI-FUENF-VERBINDUNG , UEBERGITTER , CHEMIESTRAHLEPITAXIE , CHEMIESTRAHLEPITAXIALWACHSTUM , INDIUMVERBINDUNG , SEKUNDAERELEKTRONENMIKROSKOPIE , HALBLEITERUEBERGITTER
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Source:
Table of contents – Volume 30, Issue 6B
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- L1086
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Interface modification by hydrocarbon gas molecular beams in heteroepitaxy of SiC on SiYoshinobu, T. / Fuyuki, T. / Matsunami, H. et al. | 1991
- L1089
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Selective area growth of InP and InGaAs layers on SiO2-masked substrate by chemical beam epitaxySugiura, H. / Iga, R. / Yamada, T. / Toriyama, T. et al. | 1991
- L1121
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DC superconducting quantum interference device utilizing the high Tc step-edge junctionEnpuku, K. / Udomoto, J. / Kisu, T. / Erami, A. / Kuromizu, Y. / Yoshida, K. et al. | 1991
- L1125
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NMR study of compositional inhomogeneities in sputtered Co-Cr filmsTakei, K. / Maeda, Y. et al. | 1991