Chapter M-3. Si3N4 Formation via SiCl4/(N2,NH3)(/H2,Ar,He) Reactions (English)
In:
Materials Science Foundations
;
22-24
;
808-833
;
2005
- Article (Journal) / Electronic Resource
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Title:Chapter M-3. Si3N4 Formation via SiCl4/(N2,NH3)(/H2,Ar,He) Reactions
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Published in:Materials Science Foundations ; 22-24 ; 808-833
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Publisher:
- New search for: Trans Tech Publications Ltd
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Publication date:2005-06-01
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Size:26 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 22-24
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- -1
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Acronyms and Abbreviations| 2005
- 1
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Part A. In the Beginning. Chapter A-1. From the Cosmic to the Mundane| 2005
- 3
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Chapter A-2. Book Purpose and Design, Writing Conventions| 2005
- -4
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CONTENTS| 2005
- -5
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Preface| 2005
- -6
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Dedication| 2005
- 6
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Chapter A-3. Historical Comments re Silicon Nitride Studies| 2005
- 12
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Chapter A-4. Natural Occurrence of Si3N4| 2005
- 17
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Chapter A-5. Major Reviews on Formation of Silicon Nitride| 2005
- 19
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Part B. Technical Context of Silicon Nitride Formation| 2005
- 21
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Chapter B-1. The Si-N System| 2005
- 23
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Chapter B-2. Si3N4 Phases and Crystallography| 2005
- 33
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Chapter B-3. Phase Chemistry of a-Si3N4 – "-Si3N4 – $-Si3N4| 2005
- 54
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Chapter B-4. High Pressure Phase Chemistry of Si3N4| 2005
- 64
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Chapter B-5. Silicon Nitride Solid Solutions| 2005
- 73
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Chapter B-6. Phase Diagram Sources for Si3N4 & SiAlON Ceramic Systems| 2005
- 85
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Chapter B-7. Thermodynamics of Si3N4| 2005
- 92
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Chapter B-8. Self-Diffusion in Si3N4| 2005
- 94
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Chapter B-9. Compositional and Phase Analysis of Si3N4| 2005
- 119
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Chapter B-10. Si3N4 Toxicology and Safety| 2005
- 121
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Chapter B-11. Engineering Aspects of Silicon Nitride Production| 2005
- 124
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Chapter B-12. General Comments on Formation Chemistry of Silicon Nitride| 2005
- 127
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Pat C. Si3N4 Products, Uses and Markets| 2005
- 129
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Chapter C-1. Survey of Applications and Markets for Si3N4 Materials| 2005
- 148
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Chapter C-2. Sintered Silicon Nitride Ceramics| 2005
- 182
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Chapter C-3. Overview of Production of Silicon Nitride Powders| 2005
- 198
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Chapter C-4. Overview of Si3N4 Whiskers, Fibers, and Filaments| 2005
- 201
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Chapter C-5. Overview: Si3N4 Films, Coatings, Membranes, Massive CVD| 2005
- 206
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Chapter C-6. Si3N4 Products by Transformation of Si3N4 Source Materials| 2005
- 212
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Illustrative Applications I: SRBSN in Automotive Technology.| 2005
- 213
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Part D. Si3N4 by Reaction of Si(cr) Surfaces and N-Species| 2005
- 215
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Chapter D-1. Comments re Si(s,R,g)/N-Species Preparative Reactions| 2005
- 220
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Chapter D-2. Si3N4 from Si(cr/Surface) /N2(g)| 2005
- 249
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Chapter D-3. Si3N4 from Si(cr)/Activated Nitrogen| 2005
- 255
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Chapter D-4. Si(cr)/N-Ions I. Basic Phenomena of Si3N4 Formation| 2005
- 272
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Chapter D-5. Si(cr)/N-Ions II. Ion Plating of Si3N4 Surface Films| 2005
- 284
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Chapter D-6. Si(cr)/N-Ions III. Ion Implantation of Buried Si3N4 Layers| 2005
- 307
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Part E. Si3N4 Powder Formation from Si(Powder)/N2(g)| 2005
- 308
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Chapter E-1. Basic Phenomena in Si3N4 Formation via Si(Powder)/N2(g)| 2005
- 321
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Chapter E-2. Si3N4 Powder from Si(powder)/N2/(Impurities & Additives)| 2005
- 344
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Chapter E-3. Preparation of Si3N4 Powder via Si(powder)/N2| 2005
- 356
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Illustrative Applications II: SRBSN in Modern Diesel Engines.| 2005
- 357
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Part F. Fabrication of Reaction Bonded Silicon Nitride| 2005
- 359
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Chapter F-1. RBSN Introduction and Summation| 2005
- 368
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Chapter F-2. Reaction Bonded Silicon Nitride Basics| 2005
- 390
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Chapter F-3. RBSN Si Powder Effects and Processing| 2005
- 396
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Chapter F-4. RBSN Green Shape Effects, Forming, Presintering, Machining| 2005
- 407
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Chapter F-5. RBSN Nitridation| 2005
- 416
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Chapter F-6. RBSN Product-Process Observations| 2005
- 426
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Chapter F-7. RBSN Coating and Impregnation| 2005
- 432
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Chapter F-8. Variant Versions of Reaction Bonded Si3N4| 2005
- 437
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Chapter F-9. Doped/Filled/Reinforced RBSN Ceramics| 2005
- 442
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Chapter F-10. SRBSN: Post-Sintering of RBSN| 2005
- 449
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Part G. Si3N4 from Si/N2 Under Vigorous Conditions| 2005
- 450
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Chapter G-1. Si3N4 Formation via Si(R)/N2 Reactions| 2005
- 455
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Chapter G-2. Si(powder)/N2(g) Combustion Synthesis of Si3N4| 2005
- 470
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Chapter G-3. SHS Production of Si3N4 Powders, Whiskers and Fibers| 2005
- 475
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Chapter G-4. Si3N4 by Si/N2 Reactive Sputtering| 2005
- 487
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Chapter G-5. Si3N4 via Si/N2 Reaction in Thermal Plasmas| 2005
- 490
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Chapter G-6. Si3N4 Formation via Si(g)/N2, N, N-Plasma, N-Ion Reactions| 2005
- 494
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Chapter G-7. Si3N4 Formation via Si+/(N-Plasma, N-Ion) Reactions| 2005
- 495
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Chapter G-8. Mechano(-electro)chemical Nitridation of Si Powder| 2005
- 497
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Part H. Si3N4 Formation by Reaction of Si with N-Compounds| 2005
- 498
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Chapter H-1. Introduction to Si/N-Compound Reactions| 2005
- 501
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Chapter H-2. Si3N4 Formation by Thermal Reactions of Si(s)/NH3(g)| 2005
- 524
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Chapter H-3. Si3N4 via Stimulated Reactions of Si(s)/NH3(g)| 2005
- 530
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Chapter H-4. Si3N4 Formation in other Si/NH3 Reaction Systems| 2005
- 535
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Chapter H-5. Si(powder)/NH3(g) Powder Production in Thermal Plasmas| 2005
- 539
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Chapter H-6. Si3N4 from Si(s) Plus N-N Bonded and other N-Compounds| 2005
- 545
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Part Í. Si3N4 by Nitridation of Si-O Based Materials| 2005
- 547
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Chapter Í-1. Si3N4 Formation via Sio(g,s)/(N2,NH3)/(H2,C,CH4)| 2005
- 550
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Chapter Í-2. Si3N4 via C-Free Nitridation of SiOxHy, SiO2, Si2N2O| 2005
- 557
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Chapter Í-3. SiO2/C/N2: Si3N4 by Carbothermal Nitridation of SiO2| 2005
- 596
-
Chapter Í-4. Si3N4 via other SiO2 Carbothermal Nitridation Systems| 2005
- 602
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Chapter Í-5. SiO2 Carbothermal Nitridation Impurity/Additive Effects| 2005
- 613
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Chapter Í-6. Si3N4 via Carbonitridation of Si-O Containing Materials| 2005
- 627
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Part J. Si3N4 Formation Si-N Based Materials| 2005
- 628
-
Chapter J-1. Introduction to Si3N4 from Si-N Based Materials| 2005
- 629
-
Chapter J-2. Si3N4 Formation by Reactions of Si-N Materials| 2005
- 630
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Chapter J-3. Si3N4 from Pyrolysis/Nitridation of Si-N-H Materials, General| 2005
- 639
-
Chapter J-4. Si3N4 Preparation by Pyrolysis of Si(NH)2| 2005
- 658
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Chapter J-5. Si3N4 via Decomposition of Other Si-N-X Compounds| 2005
- 661
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Part K. Comparative Overview and Summary of Si3N4 CVD| 2005
- 662
-
Chapter K-1. Chemical Vapor Deposition of Si3N4: Fundamentals| 2005
- 679
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Chapter K-2. Methods for CVD of Si3N4 Thin Films| 2005
- 701
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Part L. Si3N4 by CVD Nitridation of Si-H Compounds| 2005
- 703
-
Chapter L-1. Preamble: Si3N4 CVD from Silanes| 2005
- 704
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Chapter L-2. Si3N4 Chemical Vapor Deposition from SiH4/N2| 2005
- 724
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Chapter L-3. Si3N4 from SiH4/NH3 Thermal Reactions| 2005
- 757
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Chapter L-4. Si3N4 Formation via Stimulated CVD from SiH4/NH3| 2005
- 773
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Chapter L-5. SiH4/NH3(g) Formation of Si3N4 Powder| 2005
- 785
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Chapter L-6. Si3N4 Formation from SiH4/N2H4(/NH3,N2,H2)| 2005
- 789
-
Chapter L-7. Si3N4 via Other SiHx CVD Nitridation Systems| 2005
- 795
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Part M. Si3N4 by CVD Nitridation of Si Halides and Halosilanes| 2005
- 797
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Chapter M-1. Preamble Re Si3N4 CVD from Si Halides and Halosilanes| 2005
- 799
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Chapter M-2. Si3N4 via CVD Nitridation of Silicon Fluorides| 2005
- 808
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Chapter M-3. Si3N4 Formation via SiCl4/(N2,NH3)(/H2,Ar,He) Reactions| 2005
- 834
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Chapter M-4. Si3N4 from SiCl4/NH3 Reactions in Thermal Plasmas| 2005
- 844
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Chapter M-5. Si3N4 Formation in Other SiClx Nitridation Systems| 2005
- 850
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Chapter M-6. Si3N4 by Nitridation CVD from SiHCl3| 2005
- 855
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Chapter M-7. Si3N4 Formation via SiH2Cl2 Nitridation| 2005
- 880
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Chapter M-8. Si3N4 by CVD Nitridation of SiH3Cl, SiBr4, SiHBr3, SiI4| 2005
- 883
-
Part N. Si3N4 Formation in Si-C-N Systems| 2005
- 884
-
Chapter N-1. Si3N4 from Si-C-N-H(-Cl) CVD Reaction Systems| 2005
- 898
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Chapter N-2. Si3N4 via Pyrolysis/Nitridation of SiC and Si-C-N Materials| 2005
- 905
-
Chapter N-3. Si3N4 from Pyrolysis/Nitridation of Organosilicon Polymers| 2005
- 927
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Part O. Si3N4 Formation in Si-N-X Systems, X = B, P, S, Fe, Other| 2005
- 928
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Chapter O-1. Si3N4 Formation in Si-N-(B, P, S) Systems| 2005
- 931
-
Chapter O-2. Si3N4In SituFormation in Iron and Steel Alloys| 2005
- 940
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Chapter O-3. Si3N4 Preparation by Reactions of Fe-Si Alloys and N2| 2005
- 941
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Chapter O-4. Si3N4 Formation in Non-FeMetal–Silicon–Nitrogen Systems| 2005