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Type of material
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TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Calculation and uses of the lithographic aerial image
Tema Archive | 2012|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Mikrolithographische Verfahren auf der Basis von SU-8-Dicklack zur Realisierung mikrooptischer Komponenten
Free accessBASE | 2005|Keywords: Mikrolithographie, Dickschicht-Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
Generating Switchable and Reconfigurable Optical Vortices via Photopatterning of Liquid Crystals
Wiley | 2014|Keywords: microlithography -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
A novel monolithic microactuator fabricated by 3D rapid direct manufacture
Tema Archive | 2009|Keywords: Mikrolithographie -
Wykorzystanie bezposredniej litografii interferencyjnej do nanoszenia struktur periodycznych na powierzchni roznych materialow
Tema Archive | 2014|Keywords: Mikrolithographie -
10 micrometer-scale SPM local oxidation lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A one-step route to a perfectly ordered wafer-scale microbowl array for size-dependent superhydrophobicity
Tema Archive | 2008|Keywords: Mikrolithographie -
Adaptive denoising method to improve aberration measurement performance
Tema Archive | 2013|Keywords: Mikrolithographie -
Overlay target design and evaluation for SADP process [8324-107]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Overlay control methodology comparison: field-by-field and high-order methods [8324-74]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Diffraction-based overlay measurement on dedicated mark using rigorous modeling method [8324-68]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Recess gate process control by using 3D SCD in 3xm vertical DRAM [8324-65]
British Library Conference Proceedings | 2012|Keywords: Microlithography
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