Year of publication
Type of material
Licence
TIB reading rooms collection
LUH institutes collection
Synonyms were used for: MEMS
Search without synonyms: keywords:("MEMS")
Used synonyms:
- microelectromechanical systems
- mikroelektromechanisches system
-
A Materials Roadmap to Functional Neural Interface Design
Wiley | 2018|Keywords: microelectromechanical systems -
MEMS cost analysis : from laboratory to industry
TIBKAT | 2014|Keywords: MEMS, Microelectromechanical systems industry, Microelectromechanical systems -
Edge field emission of large-area single layer graphene
Elsevier | 2015|Keywords: Microelectromechanical systems -
Compressive Magnetostriction of FeSm Alloy Film
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
A Comparative Study of the Strength of Si, SiN and SiC Used at Nanoscales
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Fabrication of C54-TiSi~2 Thin Films Using Cathodic Arc Deposition and Rapid Thermal Annealing
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
RF MEMS Behavior, Surface Roughness and Asperity Contact
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Effects of Supercritical Carbon Dioxide on Adhesive Strength Between Micro-Sized Photoresist Patterns and Silicon Substrates
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back Volume
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion Implantation
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Design and Fabrication of an Optical-MEMS Sensor
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
C-Axis Oriented ZnO Film by RF Sputtering and Its Integration with MEMS Processing
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Enabling the Desktop NanoFab with DPN® Pen and Ink Delivery Systems
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Bottom-Up Fabrication of Individual SnO~2 Nanowires-Based Gas Sensors on Suspended Micromembranes
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems -
Optimization of the Geometry of the MEMS Electrothermal Actuator to Maximize In-Plane Tip Deflection
British Library Conference Proceedings | 2008|Keywords: Microelectromechanical systems
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