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TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
A novel monolithic microactuator fabricated by 3D rapid direct manufacture
Tema Archive | 2009|Keywords: Mikrolithographie -
Wykorzystanie bezposredniej litografii interferencyjnej do nanoszenia struktur periodycznych na powierzchni roznych materialow
Tema Archive | 2014|Keywords: Mikrolithographie -
10 micrometer-scale SPM local oxidation lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A one-step route to a perfectly ordered wafer-scale microbowl array for size-dependent superhydrophobicity
Tema Archive | 2008|Keywords: Mikrolithographie -
Adaptive denoising method to improve aberration measurement performance
Tema Archive | 2013|Keywords: Mikrolithographie -
Data for "3D micro printed capillary electrospray thruster with a fully modular integrated extraction electrode"
Free accessDataCite | 2023|Keywords: 3D Microlithography -
Fabrication of pH-sensitive microparticles for drug delivery applications using soft lithography techniques
Tema Archive | 2008|Keywords: Mikrolithographie -
Microfluidic probe: A new tool for integrating microiuidic environments and electronic wafer-probing
Tema Archive | 2010|Keywords: Mikrolithographie -
Angle-dependent resonance of localized and propagating surface plasmons in microhole arrays for enhanced biosensing
Tema Archive | 2012|Keywords: Mikrolithographie -
Technologien und Applikationen der UV-Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik
Tema Archive | 2007|Keywords: Mikrolithographie -
Development and ejection behavior of different material-based electrostatic ink-jet heads
Tema Archive | 2010|Keywords: Mikrolithographie -
On control of resist film uniformity in the microlithography process
Tema Archive | 2004|Keywords: Mikrolithographie -
Control of microstructure shape and morphology In femtosecond laser ablation of imprint rollers
Tema Archive | 2009|Keywords: Mikrolithographie -
Micropatterned porous-silicon Bragg mirrors by dry-removal soft lithography
Tema Archive | 2006|Keywords: Mikrolithographie -
Fluorocarbon resist for high-speed scanning probe lithography
Tema Archive | 2007|Keywords: Mikrolithographie -
Micropatterning of polymer-embedded metal nanoparticles by an ion beam contact lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
Multicolor polymer nanocomposites: In situ synthesis and fabrication of 3D microstructures
Tema Archive | 2008|Keywords: Mikrolithographie -
Preparation of porous poly(dimethylsiloxane)-based honeycomb materials with hierarchal surface features and their use as soft-lithography templates
Tema Archive | 2006|Keywords: Mikrolithographie -
Soft Imprint Lithographie für die Erstellung von Mikrolinsen
Tema Archive | 2010|Keywords: Mikrolithographie -
Development of advanced mask inspection optics with transmitted and reflected light image acquisition [6518-64]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Detailed analysis of capability and limitations of CD scatterometry measurements for 65- and 45-nm nodes [6518-30]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Fundamental limits of optical critical dimension metrology: a simulation study (Invited Paper) [6518-29]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Electronically programmable membranes for improved biomolecule handling in micro-compartments on-chip
Tema Archive | 2008|Keywords: Mikrolithographie -
ArF pellicle degradation mechanism for resolving CD variation [6518-191]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Visible light angular scatterometry for nanolithography [6518-118]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
In-line AFM characterization of STI profile at the 65 nm node with advanced carbon probes [6518-45]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Application of carbon nanotube probes in a critical dimension atomic force microscope [6518-43]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Dielectric-thickness dependence of damage induced by electron-beam irradiation of MNOS gate pattern [6518-47]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
High-resolution in-die metrology using beam profile reflectometry and ellipsometry [6518-123]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Device metrology with high-performance scanning ion beams [6518-52]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Modeling the effect of line profile variation on optical critical dimension metrology [6518-34]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
TEM validation of CD AFM image reconstruction [6518-135]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Accuracy in optical image modeling [6518-39]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction [6518-169]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Methodology to set up accurate OPC model using optical CD metrology and atomic force microscopy [6518-11]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Lithography process control using scatterometry metrology and semi-physical modeling [6518-03]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Lithography process transfer from ArF to high-NA KrF tool
Tema Archive | 2009|Keywords: Mikrolithographie -
Lifetime and reliability results for a negative electron affinity photocathode in a demountable vacuum system
Tema Archive | 1998|Keywords: Mikrolithographie -
3D anisotropic semiconductor grooves measurement simulations (scatterometry) using FDTD methods [6518-168]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
0.32-mum pitch random line pattern formation by dense dummy pattern and double exposure in KrF wavelength [4000-121]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Basic imaging characteristics of phase-edge lithography and impact of lens aberration on these characteristics [4000-142]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Improving image control by correcting the lens-heating focus drift [4000-82]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography
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