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Cu Barrier Property of Low-K SiOCH Film with k = 3.5 Deposited by PE-CVD Using HMDSO and N~2O Gases
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Atomic Layer Deposition of Ruthenium from RuCp^2 and Oxygen: Film Growth and Reaction Mechanism Studies
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Chemical Vapor Deposition of Zirconium Tin Titanate: A Dielectric Material for Potential Microelectronic Applications
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Aluminium Oxide Thin Film Grown by Low Pressure MOCVD Using Aluminium Acetylacetone and Nitrous Oxide
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Characterization of SiO~2 Films by Photo-CVD using a Xe~2 Excimer Lamp
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Grafting Metalorganic Species into Mesoporous Silica from the Vapour Phase
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Characteristics of Tungsten Carbide Films Prepared by Plasma Assisted Atomic Layer Deposition using Bis (TerT-Butylimido) Bis (Dimethylamido)Tungsten
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Local Deposition Rates of alpha-Al~2O~3 from AlCl~3-CO~2-H~2-HCl derived with PHOENICS-CVD from Thermogravimetric Measurements in a Hot-Wall Reactor with Long Isothermal Zone
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Identification of Black Deposits Produced During the Hydride-OMVPE Growth of GaN
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Comparative Study of MOCVD Platinum Thin films Obtained by the Use of Liquid Injection System or Conventional Bubbler
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Nanoscale CeO~2-ZrO~2 Thin Films: A Combined Approach by CVD and Sol-Gel Routes
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Thin Tungsten and Tungsten Oxide Films Produced by Tungsten Pentacarbonyle Pentaisonitrile in a Remote Plasma Reactor
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
CVD of Transition Metals from Metalorganic Complexes
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Novel Precursor for High-k Dielectrics and Metal Electrodes Part I: Synthesis
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Atmospheric Pressure Deposition of SiO~x Thin Films by Oxidation of Liquid HMDSO in Remote Plasma
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Atmospheric Pressure Deposition of Silica Thin Films by Photo-CVD Using Vacuum Ultraviolet Excimer Lamp
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Atomic Layer Deposition of Alumina from Trimethylaluminum and Ozone
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
MOCVD of Tungsten Nitride Thin Films from the Imido Complex Cl~4(CH~3CN)W(NiPr): Effect of NH~3 on Film Properties
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Interrelation of Bond Configuration and Optical Properties of muc-SiC Thin Films by Spectroscopic Ellipsometry
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition -
Critical Issues in Group-III Nitride MOVPE Modeling
British Library Conference Proceedings | 2003|Keywords: chemical vapor deposition, chemical vapour deposition
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