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Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
Free accessAmerican Institute of Physics | 2018| -
Practical guide for curve fitting in x-ray photoelectron spectroscopy
Free accessAmerican Institute of Physics | 2020| -
Status and prospects of plasma-assisted atomic layer deposition
Free accessAmerican Institute of Physics | 2019| -
Overview of atomic layer etching in the semiconductor industry
Free accessAmerican Institute of Physics | 2015| -
XPS guide: Charge neutralization and binding energy referencing for insulating samples
Free accessAmerican Institute of Physics | 2020| -
Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
Free accessAmerican Institute of Physics | 2017| -
Assessment of the frequency and nature of erroneous x-ray photoelectron spectroscopy analyses in the scientific literature
Free accessAmerican Institute of Physics | 2020| -
Practical guides for x-ray photoelectron spectroscopy: Quantitative XPS
Free accessAmerican Institute of Physics | 2020| -
Consistency and reproducibility in atomic layer deposition
Free accessAmerican Institute of Physics | 2020| -
Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film
Free accessAmerican Institute of Physics | 2019| -
X-ray photoelectron spectroscopy: A perspective on quantitation accuracy for composition analysis of homogeneous materials
Free accessAmerican Institute of Physics | 2020| -
Misconceptions in interpretation of nitrogen chemistry from x-ray photoelectron spectra
Free accessAmerican Institute of Physics | 2020| -
Review Article: Catalysts design and synthesis via selective atomic layer deposition
Free accessAmerican Institute of Physics | 2018| -
Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
Free accessAmerican Institute of Physics | 2019| -
Practical guide to the use of backgrounds in quantitative XPS
Free accessAmerican Institute of Physics | 2021| -
Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development
Free accessAmerican Institute of Physics | 2018| -
Review Article: Atomic layer deposition of doped ZnO films
Free accessAmerican Institute of Physics | 2019| -
Review Article: Hydrogenated graphene: A user’s guide
Free accessAmerican Institute of Physics | 2018| -
Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
Free accessAmerican Institute of Physics | 2017|
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