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Surface wettability of silicon nanopillar array structures fabricated by biotemplate ultimate top-down processes
American Institute of Physics | 2021| -
Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition
Free accessAmerican Institute of Physics | 2022| -
Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam
American Institute of Physics | 2019| -
Atomic layer defect-free etching for germanium using HBr neutral beam
American Institute of Physics | 2019|
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