Year of publication
Subject
Type of material
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TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
A novel monolithic microactuator fabricated by 3D rapid direct manufacture
Tema Archive | 2009|Keywords: Mikrolithographie -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
Adaptive denoising method to improve aberration measurement performance
Tema Archive | 2013|Keywords: Mikrolithographie -
Data for "3D micro printed capillary electrospray thruster with a fully modular integrated extraction electrode"
Free accessDataCite | 2023|Keywords: 3D Microlithography -
Wykorzystanie bezposredniej litografii interferencyjnej do nanoszenia struktur periodycznych na powierzchni roznych materialow
Tema Archive | 2014|Keywords: Mikrolithographie -
10 micrometer-scale SPM local oxidation lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A one-step route to a perfectly ordered wafer-scale microbowl array for size-dependent superhydrophobicity
Tema Archive | 2008|Keywords: Mikrolithographie -
Technologien und Applikationen der UV-Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik
Tema Archive | 2007|Keywords: Mikrolithographie -
Fabrication of pH-sensitive microparticles for drug delivery applications using soft lithography techniques
Tema Archive | 2008|Keywords: Mikrolithographie -
Angle-dependent resonance of localized and propagating surface plasmons in microhole arrays for enhanced biosensing
Tema Archive | 2012|Keywords: Mikrolithographie -
Microfluidic probe: A new tool for integrating microiuidic environments and electronic wafer-probing
Tema Archive | 2010|Keywords: Mikrolithographie -
Development and ejection behavior of different material-based electrostatic ink-jet heads
Tema Archive | 2010|Keywords: Mikrolithographie -
Control of microstructure shape and morphology In femtosecond laser ablation of imprint rollers
Tema Archive | 2009|Keywords: Mikrolithographie
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