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Cost analysis of device options and scaling boosters below the A14 technology node
SPIE | 2023|Contributors: Kim, Ryoung-Han -
Characterization of asymmetries in 3D NAND memory devices
SPIE | 2023|Contributors: Sendelbach, Matthew J. -
Tracing optimized condition for electron beam metrology of EUV photoresist pattern using low-landing energy
SPIE | 2023|Contributors: Sendelbach, Matthew J. -
Tracing optimized condition for electron beam metrology of EUV photoresist pattern using low landing energy
SPIE | 2023|Contributors: Sendelbach, Matthew J. -
Using active asymmetry control and blind source separation to improve the accuracy of after develop overlay measurements
SPIE | 2023|Contributors: Sendelbach, Matthew J.
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