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Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Improving the topography performance of ion implantation resist [10147-48]
British Library Conference Proceedings | 2017 -
Full chip hierarchical inverse lithography: a solution with perfect symmetry [10147-20]
British Library Conference Proceedings | 2017 -
Small-size waveguide He-Ne laser with HF (SHF) pumping for optoelectronic systems for speed measurements [2729-08]
British Library Conference Proceedings| -
Single-frequency diode-pumped Q-switched Nd:YVO~4 laser [2729-06]
British Library Conference Proceedings| -
Energy efficient transmitters for high bandwidth density links
British Library Conference Proceedings | 2022| -
Diffuse optical methods for assessing breast cancer chemotherapy [8940-57]
British Library Conference Proceedings | 2014| -
Optical characterization of ex-vivo axillary lymph nodes of breast-cancer patients using a custom-built spectrophotometer [8940-25]
British Library Conference Proceedings | 2014| -
Diffusing-wave polarimetry for tissue diagnostics [8940-6]
British Library Conference Proceedings | 2014| -
Propagation and scattering of vector light beam in turbid scattering medium [8940-5]
British Library Conference Proceedings | 2014| -
KrF excimer laser-based patterning system for dual applications in both lithography and ablation
British Library Conference Proceedings | 2020| -
Advanced high order field-to-field modeling for wafer edge control
British Library Conference Proceedings | 2020| -
Divided spectrum illumination for high resolution flat panel display exposure tools
British Library Conference Proceedings | 2020| -
Resist shrinkage during development: rigorous simulations and first compact model for OPC
British Library Conference Proceedings | 2020| -
SRAF printing prediction using artificial neural network
British Library Conference Proceedings | 2020| -
Short reach, low cost silicon photonic micro-transceivers for embedded and co-packaged system integration
British Library Conference Proceedings | 2020|
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