Production of round profiled microgrooves in monocrystalline silicon (English)
- New search for: Loffler, F.
- New search for: Meess, R.
- New search for: Heyne, H.P.
- New search for: Hinzmann, G.
- New search for: Rother, J.
- New search for: Loffler, F.
- New search for: Meess, R.
- New search for: Heyne, H.P.
- New search for: Hinzmann, G.
- New search for: Rother, J.
In:
European Society for Precision Engineering
;
103-104
;
2004
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ISBN:
- Conference paper / Print
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Title:Production of round profiled microgrooves in monocrystalline silicon
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Contributors:Loffler, F. ( author ) / Meess, R. ( author ) / Heyne, H.P. ( author ) / Hinzmann, G. ( author ) / Rother, J. ( author )
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Conference:Conference; 4th, European Society for Precision Engineering ; 2004 ; Glasgow, Scotland
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Published in:
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Publisher:
- New search for: LG Digital
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Place of publication:Kempston
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Publication date:2004-01-01
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Size:2 pages
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Remarks:Includes bibliographical references
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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From Nanotechnology to New Production Systems: The EU PerspectivePero, H. et al. | 2004
- 2
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Commercialising NanotechnologyAtherton, P. et al. | 2004
- 3
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Dimensional Metrology for Components of Microsystem TechnologyBrand, U. / Doering, L. / Nesterov, V. / Neuschaefer-Rube, U. et al. | 2004
- 5
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High-resistant Micro Components made by Injection MouldingPiotter, V. / Oerlygsson, G. / Ruprecht, R. / Hausselt, J. et al. | 2004
- 7
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Microsystems Industrial Infrastructurevan Heeren, H. / Salomon, P. / Paschalidou, L. / El-Fatatry, A. et al. | 2004
- 9
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2-DOF thin film metallic glass actuatorHata, S. / Jeong, H.W. / Shimokohbe, A. et al. | 2004
- 9
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2-DOF thin film metallic glass microactuatorHata, S. / Jeong, H.W. / Shimokohbe, A. et al. | 2003
- 11
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Design, modeling and simulation of high-Q Micro-InductorsPang, A.J. / Wang, C.H. / Sangster, A.J. et al. | 2004
- 13
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The Micro Harmonic Drive: A high precision gear system miniaturized by Direct-LIGSlatter, R. / Degen, R. et al. | 2004
- 15
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A New Driving Method for Electrostatic MEMS Actuators to Prevent StickingFukushige, T. / Hata, S. / Shimokohbe, A. et al. | 2004
- 17
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Calibration and redesign of a nano probe based on MST technologyBos, E.J.C. / Widdershoven, I. / Haitjema, H. et al. | 2004
- 19
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Fabrication of Long-period Fiber Grating Optical BiosensorChen, P.J. / Lin, H.Y. / Chen, D.T. / Liu, I.M. / Ma, K.J. / Chien, H.H. / Chao, C.L. et al. | 2004
- 21
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Nanostructured surfaces for the selective capture of biological objectsYeh, Y.-P. / Ramsden, J.J. et al. | 2004
- 23
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Determination of failure mechanisms in MEMSLavu, S. / Desmulliez, M. / Bell, G. / Begbie, M. et al. | 2004
- 25
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Simulation, Fabrication and Testing of a microturbine using fluid-assisted levitationKanteres, A. / Dhariwal, R. / Leonard, M. et al. | 2004
- 27
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Design, Modeling and Simulation of a MicrofanChowti, P. / Pang, A.J. / Dhariwal, R.S. / Desmulliez, M. / Reuben, R.L. et al. | 2004
- 29
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Microengineered dynamometer for Microfan thrust measurementChowti, P. / Armstrong, J. / Dhariwal, R.S. / Desmulliez, M. / Reuben, R.L. et al. | 2004
- 31
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- 33
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- 35
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- 37
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- 39
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- 41
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- 43
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New Applications for Micro-EDMFleischer, J. / Masuzawa, T. / Schmidt, J. / Knoll, M. et al. | 2004
- 45
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``Analysis of EDM instability when machining Silicon Carbide''Mahdavinejad, R.A. et al. | 2004
- 47
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Nano-Scale Fracture Properties of Glasses as Studied by IN-SITU and REAL-TIME A.F.M. ExperimentsMarliere, C. / Celarie, F. et al. | 2004
- 49
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- 51
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Study on Key Technique of Micro-EDM EquipmentsWang, Z. / Zhang, Y. / Zhao, W. et al. | 2004
- 53
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Semiconductor nanoparticles-based light emitting devicesGallardo, D.E. / Bertoni, C. / Dunn, S. et al. | 2004
- 55
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Investigations on Effects of External Parameters and Inherent Properties on the Natural Response of Piezoelectric Actuators dedicated to Ultra PositioningMekid, S. / Lim, B. et al. | 2004
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- 63
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- 65
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Laser Assisted Jet Electrochemical Machining investigations in micro applicationsPajak, P.T. / De Silva, A.K.M. / McGeough, J.A. / Harrison, D.K. et al. | 2004
- 67
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- 69
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Micromachining Center based on the Integration of various Technologies in one coordinate SystemWulfsberg, J.-P. / Hilpert, S.-E. / Kuhn, A. / Lehmann, J. et al. | 2004
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- 103
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Simulation on Effect of Ultra High-Frequency Vibration for NanomachiningShimizu, J. / Tanaka, H. / Zhou, L. / Eda, H. et al. | 2004
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``ASSEMIC advanced methods and tools for handling and assembly in micro technology'' - An FP6 Marie Curie Research Training NetworkBrenner, W. / Almansa, A. / Suemecz, F. et al. | 2004
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Recent development in absolute interferometry using two diode lasersWu, J. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. et al. | 2004
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Development of a Sensitive Probe for Coordinate Measuring MachineFurutani, R. / Watanabe, M. et al. | 2004
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Precision Measurement of Large Step Height Using Confocal Differential Heterodyne Interferometry (CDHI)Kim, T.J. / Lee, S.W. / Gweon, D.G. / Kim, K.S. et al. | 2004
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Measurement Uncertainty in Nanometrology - an exemplary application on NanoscratchesWeckenmann, A. / Wiedenhoefer, T. et al. | 2004
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Design and Performance Test of 6-DOF Fine Positioner for Alignment of Condenser in Soft X-ray Microscope Using Stewart Platform and Cylindrical FlexureKang, S.-h. / Kang, D.W. / Gweon, D.G. / Yoon, G.H. / Min, J.Y. et al. | 2004
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Precision Position Control for a Self-moving Stage Utilizing Spring-mounted Piezoelectric ActuatorsLiu, Y.-T. / Wang, C.-W. et al. | 2004
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A Fibre-Optic Device for Micro Dozes CharacterizationKorposh, S.O. / Sakalosh, I.I. / Sharkany, J.P. / Sichka, M.Y. et al. | 2004
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Approximation of Surface Texture Profiles and ParametersBrennan, J.K. / Mason, J.C. / Jiang, X. / Leach, R.K. / Harris, P.M. et al. | 2004
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Metrology for Microsystems - Characterisation of a new broadband interferometerLee-Bennett, I. / Leach, R. et al. | 2004
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The Role of Metrology in Nanotechnology and Precision EngineeringCarneiro, K. et al. | 2004
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A Device for Rapid Measurement of 6-DOF Dynamic Motion ErrorsSpiewak, S. et al. | 2004
- 300
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Nonlinearity Measurement and Correction of Metrology Data from an Interferometer SystemChu, D.C. / Ray, A.B. et al. | 2004
- 302
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In-Situ measurement of large microstructured surfaces for optical applicationsPfeifer, T. / Schneefuss, K. / Dorner, D. et al. | 2004
- 304
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Measurement of mechanical properties of materials at the nanoscale: directions and limitationsMendels, D.-A. / Evanno, N.M.P. / Cuenat, A. et al. | 2004
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Mapping micro-mechanical properties of carbon-filled polymer composites by TPMLiu, X. / Zhang, J. / Piotter, V. et al. | 2004
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A new instrument for measuring crystal orientation with extreme accuracyBecker, P. / Drosemeyer, H. / Jager, V. et al. | 2004
- 310
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Microscopic Friction Force Measuring System for the Investigation of Micro ComponentsPhataralaoha, A. / Buttgenbach, S. et al. | 2004
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Optimized selection of indirect methods of measureSevilla, L. / Sebastian, M.A. et al. | 2004
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Simultaneous measurement and compensation of 5-DOF motion errors using extended Twyman-Green interferometryOh, J.S. / Bae, E.D. / Kim, S.-W. et al. | 2004
- 316
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Development of calibration methods for spherical indenters used in the nanoindentation testDai, G. / Herrmann, K. / Pohlenz, F. et al. | 2004
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Dynamic goniometers based on ring laser and optical encoderBournachev, M. / Filatov, Y. / Goncharov, N. / Loukianov, D. / Pavlov, P. et al. | 2004
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Micro litre-scale flow measurement for Microsystems studiesHowell, G.P. / Tamadoni, R. / Chetwynd, D.G. et al. | 2004
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A simple microtensometer for polymeric micro-partsSun, M.-C. / Chetwynd, D.G. / Gardner, J.W. et al. | 2004
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Traceability of Dimensional Measurements using the Scanning Electron MicroscopeDe Chiffre, L. / Bariani, P. / Hansen, H.N. / Horsewell, A. et al. | 2004
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Surface Mapping with an AFM-CMM Integrated System and Stitching SoftwareDe Chiffre, L. / Marinello, F. / Bariani, P. / Hansen, H.N. et al. | 2004
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Improving the accuracy of 3D displacement measurement using ring-shaped laser beam and high resolution CCDUsuki, S. / Enami, K. / Sato, O. / Takahashi, S. / Takamasu, K. et al. | 2004
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Precision measurement of carnage straightness and tilt error motions of an ultra-precision asphenc grinding machineArai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / Kuriyagawa, T. et al. | 2003
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Precision measurement of carriage straightness and tilt error motions of an ultra-precision aspheric grinding machineArai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / Kuriyagawa, T. et al. | 2004
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Shape measurement of long microbores applying photon counting methodJablonski, R. / Orzechowski, P. et al. | 2004
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A Precision Sensor for Detecting Foreign Bodies in Soft TissueShimizu, H. / Gao, W. / Nakashima, S. / Kiyono, S. et al. | 2004
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An Abbe-compliant 3D-measurement concept based on linear scalesHemschoote, D. / Vleugels, P. / Qian, J. / Van Brussel, H. / Reynaerts, D. et al. | 2004
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Study on Particle Detection for Patterned Wafers by Evanescent Light IlluminationYoshioka, T. / Miyoshi, T. / Takaya, Y. / Takahashi, S. et al. | 2004
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Investigation and evaluation of mechanical properties of ZrO~2 micro-bending specimens produced by different micro-moulding techniquesAuhorn, M. / Beck, T. / Schulze, V. / Lohe, D. et al. | 2004
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The characteristics of force-deformation curves in fast mapping mode by TPMZhang, J. / Liu, X. et al. | 2004
- 344
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Measurement and Simulation of Heat Development during the Micro-Grinding Process of Hardened SteelsHoffmeister, H.-W. / Hlavac, M. et al. | 2004
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Nonlinear error compensation for optical profilerGuo, J. / Gao, Y. / Wang, X. / Xie, T. et al. | 2004
- 348
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Wave Front Metrology ErrorsJohnstone, E. / Schluchter, C. / Ray, A.B. et al. | 2004
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Complex wavelet transform for extraction of morphological features on surface topographyMa, J.W. / Jiang, X. / Blunt, L. et al. | 2004
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Development of Tolerances for Microsystems on the Example of Plasma Deposited SurfacesWestkaemper, E. / Schoebel, J. / Gottwald, B. / Sommadossi, S. et al. | 2004
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Position measurement of a miniature robot using position sensitive detectorsTorii, A. / Inoue, T. / Doki, K. / Ueda, A. et al. | 2004
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Development of a Virtual Standard for Nanoindentation InstrumentsLi, Z. / Herrmann, K. / Pohlenz, F. / Menelao, F. et al. | 2004
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Alignment measurement of two-dimensional zero-reference marksChenggang, Z. / Yingnan, W. / Yuhang, C. / Wenhao, H. et al. | 2004
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A Miniatre PH Meter on an Optical MonofibreSharkany, J.P. / Korposh, S.A. / Sichka, M.Y. / Zhitov, N.B. et al. | 2004
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Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometersFruehauf, J. / Gaertner, E. / Brand, U. / Doering, L. et al. | 2004
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The 3D Measurement and Analysis of Aspheric SurfacesMcBride, J.W. / Sun, W. / Maul, C. et al. | 2004
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Assessing thermally induced errors of machine tools using a telescopic double ball barDelbressine, F.L.M. / Florussen, G.H.J. / Schijvenaars, L.A. / Schellekens, P.H.J. et al. | 2004
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Magnetically Preloaded WheelsSlocum, A. / Lang, J. / Awtar, S. / Hart, A.J. / Mukaddam, K. et al. | 2004
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Design, Simulation and Testing of a Precision Alignment Frame for the Next Linear ColliderFitsos, P. et al. | 2004
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A novel design for a high precision freeform ELID grinding machineQian, J. / Vleugels, P. / Hemschoote, D. / Reynaerts, D. / van Brussel, H. et al. | 2004
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High Speed Creation of Ultraprecision Straight Microgrooves by Means of a Shuttle UnitEbihara, K. / Kawai, T. / Sawada, K. et al. | 2004
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Development of a Hydrostatic Linear Guidance based on the Design of Ball Bearing GuidanceBrecher, C. / Weck, M. / Winterschladen, M. / Paepenmuller, F. et al. | 2004
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An Ultraprecision Positioning System using Twist-roller Friction Drive with Fine AdjustmentMizumoto, H. / Shimizu, Y. / Yabuta, Y. / Arii, S. / Kami, Y. et al. | 2004
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Long Distance Microscope for Measurement of Tool Shape in High Precision X-Y TumingHaberland, R. et al. | 2004
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Investigation of the noise behaviour of aerostatic bearings for ultra-precisions stagesSchaeffel, C. / Hesse, S. / Mohr, H.-U. et al. | 2004
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Planar Motion System for a Nanopositioning- and Nanomeasuring Machine (NPM/NMM) with 200x200mm^2 operating rangeHesse, S. / Schaeffel, C. / Mohr, H.-U. et al. | 2004
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Improving axial depth of cut accuracy in micro millingBissacco, G. / Hansen, H.N. / De Chiffre, L. et al. | 2004
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The Abbe principle, self-calibration and the design of co-ordinate measuring systemsForbes, A.B. / Leach, R.K. / Brill, N. et al. | 2004
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Six Degrees of Freedom Planar MotorsCompter, J.C. et al. | 2004
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Characterization of a scanning microscopy tuning fork and optical fiber assembly with an application to biotechnologyWoody, S. / Jain, P. et al. | 2004
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Flexible Support For Cantilever LoadLeow, Y.P. et al. | 2004
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Full parameter calibration of parallel mechanismSato, O. / Shimojima, K. / Olea, G. / Furutani, R. / Takamasu, K. et al. | 2004
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Flexure Hinge Load Capacity and OptimisationHaberland, R. et al. | 2004
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Performance of machining table with feed driver made of PZT actuatorsInoue, M. / Ohta, A. / Tochigi, M. et al. | 2004
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Development of a laser-guided deep-hole grinding toolKatsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Park, H.K. / Hamano, Y. et al. | 2004
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Preliminary design of an ultraprecision mother machine supported by active mountsHoriuchi, O. / Yamaguchi, Y. / Shibutani, H. et al. | 2004
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A predictive 3D grinding method for large cylindersKuosmanen, P. / Juhanko, J. et al. | 2004
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A Low Cost- High Precision Variable Stiffness Flexure Valve Element SystemFreeman, D. / Slocum, A. et al. | 2004
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Understanding the dynamic response of a machine tool structure by finite element analysisXu, Q. / Barrans, S. / Holmes, A. / Ford, D. et al. | 2004
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Force Ripple Compensation and High Speed Tracking Control of a High Precision Linear Motor System using a Multi-Segment Magnet ArrayChoi, Y.-M. / Lee, M.G. / Gweon, D.-G. / Suk-Won, L. / Jong-Hwan, O. et al. | 2004
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A planar piezoelectric drive with a stepping and a resonant operation modeDevos, S. / Van de Vijver, W. / Decoster, K. / Reynaerts, D. / Van Brussel, H. et al. | 2004
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Tolerance Allocation and Alignment of Focusing Unit for Near Field Recording SystemLee, J.H. / Yoon, H.K. / Jeong, J. / Kim, T.J. / Gweon, D.G. et al. | 2004
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Optimal design of ultra precision X-Y-Theta stage with flexure mechanismKang, D.W. / Kim, K.H. / Gweon, D.G. / Lee, S.W. / Song, S.K. et al. | 2004
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Analysis of Flexure Mechanisms: a New Semi-Analytical TechniqueVenanzi, S. / Giesen, P. et al. | 2004
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Finite Element Analysis: precision of principlesFolgering, H.T.E. et al. | 2004
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Design of a PoliGrind MachineKnaapen, R.J.W. / Krastev, K.T. / Dona, M.J.J. et al. | 2004
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Additional imaging optics for soft x-ray microscopeYoo, H.K. / Kang, D.W. / Gweon, D.G. / Yoon, G.H. / Min, H.J. et al. | 2004
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Design approach of a magnetostrictive actuatorYang, B. / Bonis, M. / Tao, H. / Prelle, C. et al. | 2004
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Manufacturing of Free-Form Surfaces using a Fast Tool Servo (FTS)Brecher, C. / Weck, M. / Winterschladen, M. / Wetter, O. / Hennig, J. et al. | 2004
- 432
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Thrust Balance for Ground Testing of Electric ThrustersHughes, E.B. / Oldfield, S. et al. | 2004
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Development of Externally Pressurised Foil bearingsAl-Bender, F. / Smets, K. et al. | 2004
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Development of Ultra-High Speed Rotating DeviceAl-bender, F. / Gregoir, C. et al. | 2004
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The design of high precision X-Y-Theta stage using VCMKim, D. / Kim, K. / Gweon, D. / Lee, S.-W. / Choi, W. et al. | 2004
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Advanced Design Principles to Develop Nanopositioning MachinesTheska, R. / Frank, T. / Lotz, M. / Hackel, T. / Hohne, G. / Frank, S. et al. | 2004
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The Micro/Nano InterfaceDavies, G.J. / Ward, M. et al. | 2004