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Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry
Free accessAmerican Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition
American Institute of Physics | 2016|Keywords: Vacuum Science and Technology -
Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications
American Institute of Physics | 2014|Keywords: Vacuum Science and Technology -
Measurement and simulation of rarefied Couette Poiseuille flow with variable cross section
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Energy accommodation coefficient extracted from acoustic resonator experiments
American Institute of Physics | 2016|Keywords: Vacuum Science and Technology -
Spatial atomic layer deposition: Performance of low temperature H2O and O3 oxidant chemistry for flexible electronics encapsulation
American Institute of Physics | 2015|Keywords: Vacuum Science and Technology -
Outgassing behavior of different high-temperature resistant polymers
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Shape-memory alloy rings as tight couplers between ultrahigh-vacuum pipes: Design and experimental assessment
American Institute of Physics | 2017|Keywords: Vacuum Science and Technology -
Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes
American Institute of Physics | 2015|Keywords: Vacuum Science and Technology -
Microstructural modifications in powder-metallurgically produced Al0.675Cr0.275Fe0.05 targets during cathodic arc evaporation
American Institute of Physics | 2016|Keywords: Vacuum Science and Technology -
In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WOx as hole-selective contacts for Si solar cells
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Outgassing rate measurements of stainless steel and polymers using the difference method
American Institute of Physics | 2015|Keywords: Vacuum Science and Technology -
Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers
American Institute of Physics | 2017|Keywords: Vacuum Science and Technology -
Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure
American Institute of Physics | 2016|Keywords: Vacuum Science and Technology -
Partial pressure measurement standard for characterizing partial pressure analyzers and measuring outgassing rates
American Institute of Physics | 2015|Keywords: Vacuum Science and Technology -
Quantitative measurements of various gases in high and ultrahigh vacuum
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Nonevaporable getter coating chambers for extreme high vacuum
American Institute of Physics | 2018|Keywords: Vacuum Science and Technology -
Results and problems in the construction phase of the SuperKEKB vacuum system
American Institute of Physics | 2016|Keywords: Vacuum Science and Technology
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