A new model for surface roughness evolution in the Chemical Mechanical Polishing (CMP) process (English)
- New search for: Savio, G.
- New search for: Meneghello, R.
- New search for: Concheri, G.
- New search for: Savio, G.
- New search for: Meneghello, R.
- New search for: Concheri, G.
In:
Laser Metrology and Machine Performance VIII, LAMDAMAP, International Conference on Laser Metrology, Machine Tool, CMM & Robotic Performance, 8
;
252-261
;
2007
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ISBN:
- Conference paper / Print
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Title:A new model for surface roughness evolution in the Chemical Mechanical Polishing (CMP) process
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Contributors:
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Published in:
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Publisher:
- New search for: euspen Headquarters
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Place of publication:Bedford
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Publication date:2007
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Size:10 Seiten, 7 Bilder, 1 Tabelle, 17 Quellen
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:Korrektionsglas , Gießform , Rauigkeit , chemisch-mechanisches Polieren , Parameteridentifikation , Modellmethode , Verschleiß , Reibung , dynamische Reibung , Reibungskoeffizient , Druckverteilung , Geschwindigkeitsprofil , Hertz-Methode , Theorie-Experiment-Vergleich , Atomkraftmikroskopie , Prozessparameter
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 4
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Characterisation of dynamic errors of an ultra precision machine toolMorantz, P. / Luo, X. / Shore, P. et al. | 2007
- 24
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Test piece for testing simultaneous 5-axis machiningBossoni, S. / Cupic, J. et al. | 2007
- 73
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Theoretical and experimental approach for the evaluation of structural dynamics of CNC machine toolsPislaru, C. / Ford, D.G. / Widiyarto, M.H.N. / Myers, A. et al. | 2007
- 109
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Rule based feed rate optimisation for machine toolsHadorn, M. / Jäger, C. / Steinlin, M. et al. | 2007
- 169
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Micro structuring by ultra short pulsed laser ablationFleischer, Juergen / Haupt, Sebastian et al. | 2007
- 211
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Machine tool calibration: Geometric test uncertainty depends on machine tool performanceBringmann, B. / Knapp, W. et al. | 2007
- 221
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Calibration of hybrid kinematics with a 1-DOF gaugeDenkena, Berend / Möhring, Hans-Christian et al. | 2007
- 232
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Diamond machining of diffractive optical patterns by using a nanometer-stroke Fast Tool ServoBrinksmeier, E. / Gläbe, R. / Lünemann, B. et al. | 2007
- 252
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A new model for surface roughness evolution in the Chemical Mechanical Polishing (CMP) processSavio, G. / Meneghello, R. / Concheri, G. et al. | 2007
- 262
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Precision balancing in ultraprecision diamond machiningBrinksmeier, E. / Gläbe, R. / Krause, A. et al. | 2007
- 347
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A compact 6 D.O.F. geometric error measurement system with PSDs for long travel range in mMTKwon, Seol-Ryung / Lee, Jae-Ha / Yang, Seung-Han et al. | 2007
- 358
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Calibration of a 3D- ball plateLiebrich, T. / Bringmann, B. / Knapp, W. et al. | 2007
- 368
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Analysis of CMM measurements of hole plates in interlaboratory comparisonsForbes, A.B. et al. | 2007
- 410
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Petri net-based approach for web service automation resource coordinationMendes, J.Marco / Leitao, Paulo / Colombo, Armando W. / Restivo, Francisco et al. | 2007