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Phase shift lithography in the manufacture of sub-120 nm low-voltage DSP circuits
Tema Archive | 2000| -
Sub-wavelength printing using multiple overlapping masks
Online Contents | 2000|Contributors: Watson, G.P. -
Probing the Limits of Optical Lithography: The Fabrication of Sub-100nm Devices with 193nm Wavelength Lithography
Online Contents | 2000|Contributors: Watson, G.P. -
Writing an arbitrary non-periodic pattern using interference lithography
Online Contents | 2001|Contributors: Watson, G.P. -
High density submicron features using a laser pattern generator and double patterning
British Library Conference Proceedings | 2009| -
High density submicron features using a laser pattern generator and double patterning
British Library Online Contents | 2009|
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