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Smoothening of scalloped DRIE trench walls
Elsevier | 2017|Keywords: DRIE, DRIE Trench walls, Smoothening of DRIE trenches -
Scalloping and stress concentration in DRIE-manufactured comb-drives
Free accessBASE | 2018|Keywords: DRIE -
Silicon Micromachined Waveguide Quadrature-Hybrid Coupler at Terahertz Frequency Band
Online Contents | 2015|Keywords: DRIE -
Scalloping and stress concentration in DRIE-manufactured comb-drives
Free accessBASE | 2018|Keywords: DRIE -
Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging
Online Contents | 2020|Keywords: DRIE -
Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices
IOP Institute of Physics | 2024|Keywords: DRIE -
Design, fabrication, testing and simulation of a rotary double comb drives actuated microgripper
Free accessBASE | 2021|Keywords: DRIE -
Silicon Micromachined Waveguide Quadrature-Hybrid Coupler at Terahertz Frequency Band
Online Contents | 2015|Keywords: DRIE -
High-aspect-ratio silica nozzle fabrication for nano-emitter electrospray applications
Elsevier | 2007|Keywords: DRIE -
Sharp silicon tips with different aspect ratios in wet etching/DRIE and surfactant-modified TMAH etching
Elsevier | 2012|Keywords: DRIE -
Integration of silicon micro-hole arrays as a gas diffusion layer in a micro-fuel cell
Elsevier | 2009|Keywords: DRIE -
An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon
Elsevier | 2007|Keywords: DRIE -
Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
Elsevier | 2016|Keywords: DRIE -
Top-down fabrication of very-high density vertically stacked silicon nanowire arrays with low temperature budget
Elsevier | 2011|Keywords: DRIE -
Deep reactive ion etching and focused ion beam combination for nanotip fabrication
Elsevier | 2006|Keywords: DRIE -
Edgeless sensor development for the LPD hybrid pixel detector at XFEL
Elsevier | 2009|Keywords: DRIE
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