Year of publication
Type of material
Licence
Synonyms were used for: Halbleitersubstrat
Search without synonyms: keywords:(Halbleitersubstrat)
Used synonyms:
- semiconductor substrate
- semiconductor wafers
-
Wafer manufacturing : shaping of single crystal silicon wafers
TIBKAT | 2021|Keywords: Semiconductor wafers -
Cleaning and surface conditioning technology in semiconductor device manufacturing 11 : [the Eleventh International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the 216th meeting of the Electrochemical Society, in Vienna, Austria from October 4 to 9, 2009]
TIBKAT | 2009|Keywords: Semiconductor wafers -
Cleaning and surface conditioning technology in semiconductor device manufacturing 10 : [Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the fall meeting of the Electrochemical Society in Washington, DC in October 2007]
TIBKAT | 2007|Keywords: Semiconductor wafers -
Cleaning technology in semiconductor device manufacturing IX : [the Ninth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, held during the fall meeting of the Electrochemical Society in Los Angeles, California in October 2005]
TIBKAT | 2005|Keywords: Semiconductor wafers -
On-wafer calibration techniques enabling accurate characterization of high-performance silicon devices at the mm-wave range and beyond
TIBKAT | 2019|Keywords: Semiconductor wafers -
2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA
TIBKAT | 2010|Keywords: Semiconductor wafers -
Cleaning and surface conditioning technology in semiconductor device manufacturing 10
TIBKAT | 2007|Keywords: Semiconductor wafers -
Cleaning technology in semiconductor device manufacturing 1989 - 2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1 - 10
TIBKAT | 2007|Keywords: Semiconductor wafers
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.