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Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Calculation and uses of the lithographic aerial image
Tema Archive | 2012|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Generating Switchable and Reconfigurable Optical Vortices via Photopatterning of Liquid Crystals
Wiley | 2014|Keywords: microlithography -
Mikrolithographische Verfahren auf der Basis von SU-8-Dicklack zur Realisierung mikrooptischer Komponenten
Free accessBASE | 2005|Keywords: Mikrolithographie, Dickschicht-Mikrolithographie -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
Data for "3D micro printed capillary electrospray thruster with a fully modular integrated extraction electrode"
Free accessDataCite | 2023|Keywords: 3D Microlithography -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
Apply multiple target for advanced gate ADI critical dimension measurement by scatterometry technology [8324-66]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Impacts of overlay correction model and metrology sampling scheme on device yield [8324-57]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
SEM metrology on bit patterned media nanoimprint template: issues and improvements [8324-49]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Static and dynamic photoresist shrinkage effects in EUV photoresists [8324-48]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Overlay accuracy fundamentals [8324-41]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Automated S/TEM metrology on advanced semiconductor gate structures [8324-33]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Scatterometry metrology challenges of EUV [8324-21]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
ArFi lithography optimization for thin OMOG reticle with fast aerial imaging [8324-11]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
New analytical algorithm for overlay accuracy [8324-09]
British Library Conference Proceedings | 2012|Keywords: Microlithography
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