Year of publication
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TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Nanoimprint lithography : principles, processes and materials
TIBKAT | 2011|Keywords: Microlithography -
Handbook of microlithography, micromachining, and microfabrication : volume 1: microlithography
TIBKAT | 1997|Keywords: Microlithography -
Mask and Lithography Conference (EMLC), 2007 23rd European : date, 22-26 Jan. 2007
TIBKAT | 2007|Keywords: Microlithography -
Mask and Lithography Conference (EMLC), 2009 25th European : date, 12-15 Jan. 2009
TIBKAT | 2009|Keywords: Microlithography -
Microprocesses and nanotechnology 2007 : digest of papers ; 2007 International Microprocesses and Nanotechnology Conference, [MNC 2007] ; November 5 - 8, 2007 (November 5 technical seminar, 6 - 8 conference), Kyoto International Conference Center, Kyoto, Japan
TIBKAT | 2007|Keywords: Microlithography -
Microprocesses and nanotechnology, 2007 : digest of papers ; 2007 International Microprocesses and Nanotechnology Conference, MNC 2007 ; November 5 - 8, 2007 (November 5 technical seminar, 6 - 8 conference), Kyoto International Conference Center, Kyoto, Japan
TIBKAT | 2007|Keywords: Microlithography -
Mask and Lithography Conference (EMLC), 2006 22nd European : date, 23-26 Jan. 2006
TIBKAT | 2006|Keywords: Microlithography -
Nanoimprint lithography : an enabling process for nanofabrication
TIBKAT | 2013|Keywords: Microlithography -
30th European Mask and Lithography Conference : 24 - 25 June 2014, Dresden, Germany
TIBKAT | 2014|Keywords: Microlithography -
29th European Mask and Lithography Conference : 25 - 27 June 2013, Dresden, Germany
TIBKAT | 2013|Keywords: Microlithography
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