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A micromachined capacitive incremental position sensor: part 2. Experimental assessment
British Library Conference Proceedings | 2006| -
Piezoresistive gauge factor of hydrogenated amorphous carbon films
British Library Conference Proceedings | 2006| -
Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor
British Library Conference Proceedings | 2006| -
Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask
British Library Conference Proceedings | 2006| -
An easy-to-implement method for evaluation of capacitive resonant sensors
British Library Conference Proceedings | 2006| -
A micromachined capacitive incremental position sensor: part 1. Analysis and simulations
British Library Conference Proceedings | 2006| -
Force feedback linearization for higher-order electromechanical sigma-delta modulators
British Library Conference Proceedings | 2006| -
Improved polymer-glass adhesion through micro-mechanical interlocking
British Library Conference Proceedings | 2006| -
RF-sputtering of iridium oxide to be used as stimulation material in functional medical implants
British Library Conference Proceedings | 2006| -
Contour lithography methods for DRIE fabrication of nanometre-millimetre-scale coexisting microsystems
British Library Conference Proceedings | 2006| -
Creating multi-layered structures with freestanding parts in SU-8
British Library Conference Proceedings | 2006| -
In-package MEMS-based thermal actuators for micro-assembly
British Library Conference Proceedings | 2006| -
Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling
British Library Conference Proceedings | 2006| -
Method for measuring fracture toughness of wafer-bonded interfaces with high spatial resolution
British Library Conference Proceedings | 2006| -
Comprehensive spring constant modelling of tethered micromechanical plates
British Library Conference Proceedings | 2006| -
Development of cost-effective high-density through-wafer interconnects for 3D microsystems
British Library Conference Proceedings | 2006|
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